JPH04748U - - Google Patents

Info

Publication number
JPH04748U
JPH04748U JP4007590U JP4007590U JPH04748U JP H04748 U JPH04748 U JP H04748U JP 4007590 U JP4007590 U JP 4007590U JP 4007590 U JP4007590 U JP 4007590U JP H04748 U JPH04748 U JP H04748U
Authority
JP
Japan
Prior art keywords
wafer
transferred
chuck
pusher
selection mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4007590U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4007590U priority Critical patent/JPH04748U/ja
Publication of JPH04748U publication Critical patent/JPH04748U/ja
Pending legal-status Critical Current

Links

JP4007590U 1990-04-13 1990-04-13 Pending JPH04748U (pm)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4007590U JPH04748U (pm) 1990-04-13 1990-04-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4007590U JPH04748U (pm) 1990-04-13 1990-04-13

Publications (1)

Publication Number Publication Date
JPH04748U true JPH04748U (pm) 1992-01-07

Family

ID=31549549

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4007590U Pending JPH04748U (pm) 1990-04-13 1990-04-13

Country Status (1)

Country Link
JP (1) JPH04748U (pm)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49141792U (pm) * 1973-04-07 1974-12-06
JPS551274U (pm) * 1979-04-18 1980-01-07

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49141792U (pm) * 1973-04-07 1974-12-06
JPS551274U (pm) * 1979-04-18 1980-01-07

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