JPH04748U - - Google Patents
Info
- Publication number
- JPH04748U JPH04748U JP4007590U JP4007590U JPH04748U JP H04748 U JPH04748 U JP H04748U JP 4007590 U JP4007590 U JP 4007590U JP 4007590 U JP4007590 U JP 4007590U JP H04748 U JPH04748 U JP H04748U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- transferred
- chuck
- pusher
- selection mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 23
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4007590U JPH04748U (OSRAM) | 1990-04-13 | 1990-04-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4007590U JPH04748U (OSRAM) | 1990-04-13 | 1990-04-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04748U true JPH04748U (OSRAM) | 1992-01-07 |
Family
ID=31549549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4007590U Pending JPH04748U (OSRAM) | 1990-04-13 | 1990-04-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04748U (OSRAM) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49141792U (OSRAM) * | 1973-04-07 | 1974-12-06 | ||
| JPS551274U (OSRAM) * | 1979-04-18 | 1980-01-07 |
-
1990
- 1990-04-13 JP JP4007590U patent/JPH04748U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49141792U (OSRAM) * | 1973-04-07 | 1974-12-06 | ||
| JPS551274U (OSRAM) * | 1979-04-18 | 1980-01-07 |