JPH0474440U - - Google Patents
Info
- Publication number
- JPH0474440U JPH0474440U JP11773790U JP11773790U JPH0474440U JP H0474440 U JPH0474440 U JP H0474440U JP 11773790 U JP11773790 U JP 11773790U JP 11773790 U JP11773790 U JP 11773790U JP H0474440 U JPH0474440 U JP H0474440U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- notches
- main body
- dovetail
- recess
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11773790U JPH0474440U (en, 2012) | 1990-11-13 | 1990-11-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11773790U JPH0474440U (en, 2012) | 1990-11-13 | 1990-11-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0474440U true JPH0474440U (en, 2012) | 1992-06-30 |
Family
ID=31865644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11773790U Pending JPH0474440U (en, 2012) | 1990-11-13 | 1990-11-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0474440U (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10150095A (ja) * | 1996-11-18 | 1998-06-02 | Toshiba Corp | ウエーハ処理装置 |
-
1990
- 1990-11-13 JP JP11773790U patent/JPH0474440U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10150095A (ja) * | 1996-11-18 | 1998-06-02 | Toshiba Corp | ウエーハ処理装置 |