JPH0474419U - - Google Patents
Info
- Publication number
- JPH0474419U JPH0474419U JP11863590U JP11863590U JPH0474419U JP H0474419 U JPH0474419 U JP H0474419U JP 11863590 U JP11863590 U JP 11863590U JP 11863590 U JP11863590 U JP 11863590U JP H0474419 U JPH0474419 U JP H0474419U
- Authority
- JP
- Japan
- Prior art keywords
- photoresist
- photoresist liquid
- viscosity
- wafer
- resist coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims 3
- 238000000576 coating method Methods 0.000 claims 3
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11863590U JPH0474419U (enExample) | 1990-11-13 | 1990-11-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11863590U JPH0474419U (enExample) | 1990-11-13 | 1990-11-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0474419U true JPH0474419U (enExample) | 1992-06-30 |
Family
ID=31866582
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11863590U Pending JPH0474419U (enExample) | 1990-11-13 | 1990-11-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0474419U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20200096149A (ko) * | 2019-02-01 | 2020-08-11 | 도쿄엘렉트론가부시키가이샤 | 기판 처리 장치, 기판 처리 장치의 제어 방법 및 기억 매체 |
-
1990
- 1990-11-13 JP JP11863590U patent/JPH0474419U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20200096149A (ko) * | 2019-02-01 | 2020-08-11 | 도쿄엘렉트론가부시키가이샤 | 기판 처리 장치, 기판 처리 장치의 제어 방법 및 기억 매체 |
| JP2020126886A (ja) * | 2019-02-01 | 2020-08-20 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法及び記憶媒体 |
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