JPH0472623U - - Google Patents

Info

Publication number
JPH0472623U
JPH0472623U JP11631890U JP11631890U JPH0472623U JP H0472623 U JPH0472623 U JP H0472623U JP 11631890 U JP11631890 U JP 11631890U JP 11631890 U JP11631890 U JP 11631890U JP H0472623 U JPH0472623 U JP H0472623U
Authority
JP
Japan
Prior art keywords
spin dryer
turntable
processed
substrate
tray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11631890U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11631890U priority Critical patent/JPH0472623U/ja
Publication of JPH0472623U publication Critical patent/JPH0472623U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP11631890U 1990-11-06 1990-11-06 Pending JPH0472623U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11631890U JPH0472623U (enrdf_load_stackoverflow) 1990-11-06 1990-11-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11631890U JPH0472623U (enrdf_load_stackoverflow) 1990-11-06 1990-11-06

Publications (1)

Publication Number Publication Date
JPH0472623U true JPH0472623U (enrdf_load_stackoverflow) 1992-06-26

Family

ID=31864135

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11631890U Pending JPH0472623U (enrdf_load_stackoverflow) 1990-11-06 1990-11-06

Country Status (1)

Country Link
JP (1) JPH0472623U (enrdf_load_stackoverflow)

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