JPH0472623U - - Google Patents
Info
- Publication number
- JPH0472623U JPH0472623U JP11631890U JP11631890U JPH0472623U JP H0472623 U JPH0472623 U JP H0472623U JP 11631890 U JP11631890 U JP 11631890U JP 11631890 U JP11631890 U JP 11631890U JP H0472623 U JPH0472623 U JP H0472623U
- Authority
- JP
- Japan
- Prior art keywords
- spin dryer
- turntable
- processed
- substrate
- tray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 238000005406 washing Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Description
第１図は本考案の一実施例の縦断面図、第２図
は一実施例に用いる枠体の斜視図、第３図は従来
のスピン乾燥機の一例を示す斜視図、第４図は従
来の乾燥機に用いる治具の斜視図、第５図は洗浄
トレーの斜視図、第６図は従来のスピン乾燥機の
他の例を示す縦断面図である。
１……ターンテーブル、２……枠体、３……被
処理基板、４……モータ、５……治具、６……洗
浄トレー、７……仕切り板、８……回転中心軸、
９……ガイドレール。
Fig. 1 is a longitudinal sectional view of an embodiment of the present invention, Fig. 2 is a perspective view of a frame used in the embodiment, Fig. 3 is a perspective view of an example of a conventional spin dryer, and Fig. 4 is a perspective view of an example of a conventional spin dryer. FIG. 5 is a perspective view of a jig used in a conventional dryer, FIG. 5 is a perspective view of a cleaning tray, and FIG. 6 is a longitudinal sectional view showing another example of a conventional spin dryer. DESCRIPTION OF SYMBOLS 1... Turntable, 2... Frame, 3... Processing substrate, 4... Motor, 5... Jig, 6... Cleaning tray, 7... Partition plate, 8... Rotation center shaft,
9...Guide rail.
Claims (1)
設け、この枠体に被処理基板を収納したトレーあ
るいは治具をセツトして前記被処理基板をその面
方向に水平回転させることにより水切りを行うス
ピン乾燥機において、前記枠体に前記被処理基板
を収納する洗浄トレーをターンテーブルの回転方
向に対し傾斜させてセツトするためのガイドレー
ルを設けたことを特徴とするスピン乾燥機。 ２ ガイドレールは洗浄トレーが所定の傾斜角度
になるように左右の高さを違えて取り付けられて
いる請求項１記載のスピン乾燥機。 ３ 枠体は洗浄トレーをセツトするために揺動可
能にターンテーブルに取付けられている請求項１
記載のスピン乾燥機。[Claims for Utility Model Registration] 1. A plurality of frames are provided on a turntable at equal intervals around the circumference, a tray or a jig containing a substrate to be processed is set in the frame, and the substrate to be processed is placed on that surface. In a spin dryer that drains water by horizontal rotation in a direction, the frame body is provided with a guide rail for setting a cleaning tray storing the substrate to be processed at an angle with respect to the direction of rotation of the turntable. Features spin dryer. 2. The spin dryer according to claim 1, wherein the guide rails are installed at different heights on the left and right sides so that the washing tray has a predetermined inclination angle. 3. Claim 1, wherein the frame body is swingably attached to the turntable in order to set the cleaning tray.
Spin dryer as described.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11631890U JPH0472623U (en) | 1990-11-06 | 1990-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11631890U JPH0472623U (en) | 1990-11-06 | 1990-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0472623U true JPH0472623U (en) | 1992-06-26 |
Family
ID=31864135
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11631890U Pending JPH0472623U (en) | 1990-11-06 | 1990-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0472623U (en) |
-
1990
- 1990-11-06 JP JP11631890U patent/JPH0472623U/ja active Pending
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