JPH0469460U - - Google Patents
Info
- Publication number
- JPH0469460U JPH0469460U JP11153190U JP11153190U JPH0469460U JP H0469460 U JPH0469460 U JP H0469460U JP 11153190 U JP11153190 U JP 11153190U JP 11153190 U JP11153190 U JP 11153190U JP H0469460 U JPH0469460 U JP H0469460U
- Authority
- JP
- Japan
- Prior art keywords
- motor
- motor assembly
- chamber
- mounting stay
- assembly according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002265 prevention Effects 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11153190U JPH0469460U (enExample) | 1990-10-24 | 1990-10-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11153190U JPH0469460U (enExample) | 1990-10-24 | 1990-10-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0469460U true JPH0469460U (enExample) | 1992-06-19 |
Family
ID=31858995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11153190U Pending JPH0469460U (enExample) | 1990-10-24 | 1990-10-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0469460U (enExample) |
-
1990
- 1990-10-24 JP JP11153190U patent/JPH0469460U/ja active Pending