JPH0468538U - - Google Patents
Info
- Publication number
- JPH0468538U JPH0468538U JP11229890U JP11229890U JPH0468538U JP H0468538 U JPH0468538 U JP H0468538U JP 11229890 U JP11229890 U JP 11229890U JP 11229890 U JP11229890 U JP 11229890U JP H0468538 U JPH0468538 U JP H0468538U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- transfer arm
- wafer transfer
- heat insulating
- pin insertion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000003780 insertion Methods 0.000 claims description 2
- 230000037431 insertion Effects 0.000 claims description 2
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990112298U JP2519577Y2 (ja) | 1990-10-26 | 1990-10-26 | ウエハー搬送アーム |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990112298U JP2519577Y2 (ja) | 1990-10-26 | 1990-10-26 | ウエハー搬送アーム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0468538U true JPH0468538U (zh) | 1992-06-17 |
JP2519577Y2 JP2519577Y2 (ja) | 1996-12-04 |
Family
ID=31859796
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990112298U Expired - Lifetime JP2519577Y2 (ja) | 1990-10-26 | 1990-10-26 | ウエハー搬送アーム |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2519577Y2 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010253670A (ja) * | 2009-03-31 | 2010-11-11 | Sharp Corp | 吸着装置及び搬送装置 |
-
1990
- 1990-10-26 JP JP1990112298U patent/JP2519577Y2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010253670A (ja) * | 2009-03-31 | 2010-11-11 | Sharp Corp | 吸着装置及び搬送装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2519577Y2 (ja) | 1996-12-04 |