JPH0468537U - - Google Patents
Info
- Publication number
- JPH0468537U JPH0468537U JP11191390U JP11191390U JPH0468537U JP H0468537 U JPH0468537 U JP H0468537U JP 11191390 U JP11191390 U JP 11191390U JP 11191390 U JP11191390 U JP 11191390U JP H0468537 U JPH0468537 U JP H0468537U
- Authority
- JP
- Japan
- Prior art keywords
- gripping
- wafer cassette
- driving
- section
- driving part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 claims description 3
Description
第１図は本考案に係るウエハカセツトの把持装
置の一実施例を示す外観斜視図、第２図は駆動部
及び伝達機構部を示す概略斜視図、第３図はウエ
ハカセツトの把持装置と収納棚との位置関係を示
す部分省略縦断面図、第４図は第１図のＡ−Ａ矢
視部分省略断面図、第５図は第１図のＢ−Ｂ矢視
部分省略断面図、第６図はクリーン保管庫の一例
を示す内部透視概略正面図、第７図は同じく内部
透視右側面図、第８図は同じく内部透視平面図で
ある。
１０……駆動部、２０……把持部、３０……伝
達機構部、Ｃ……ウエハカセツト。
FIG. 1 is an external perspective view showing an embodiment of a wafer cassette gripping device according to the present invention, FIG. 2 is a schematic perspective view showing a drive section and a transmission mechanism, and FIG. 3 is a wafer cassette gripping device and storage. 4 is a partially omitted longitudinal cross-sectional view showing the positional relationship with the shelf; FIG. 4 is a partially omitted cross-sectional view taken along the line A-A in FIG. 1; FIG. FIG. 6 is a schematic front view showing an example of the clean storage, FIG. 7 is a right side view showing the inside, and FIG. 8 is a plan view showing the inside. DESCRIPTION OF SYMBOLS 10... Drive part, 20... Gripping part, 30... Transmission mechanism part, C... Wafer cassette.
Claims (1)
駆動部の駆動により作動し、ウエハカセツトを把
持する把持部とを有するウエハカセツトの把持装
置であつて、前記駆動部と把持部とを間隔を開け
て配置するとともに、駆動部の駆動力を把持部へ
伝える伝達機構部を設けたことを特徴とするウエ
ハカセツトの把持装置。 A wafer cassette gripping device comprising a driving part provided on a lifting platform of a crane, and a gripping part operated by the driving of the driving part to grip the wafer cassette, the driving part and the gripping part being spaced apart from each other. A gripping device for a wafer cassette, characterized in that it is arranged in an open position and is provided with a transmission mechanism section for transmitting the driving force of a drive section to a gripping section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11191390U JPH0468537U (en) | 1990-10-25 | 1990-10-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11191390U JPH0468537U (en) | 1990-10-25 | 1990-10-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0468537U true JPH0468537U (en) | 1992-06-17 |
Family
ID=31859398
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11191390U Pending JPH0468537U (en) | 1990-10-25 | 1990-10-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0468537U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0870027A (en) * | 1994-08-30 | 1996-03-12 | Canon Inc | Substrate storage and semiconductor manufacturing device having the same |
-
1990
- 1990-10-25 JP JP11191390U patent/JPH0468537U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0870027A (en) * | 1994-08-30 | 1996-03-12 | Canon Inc | Substrate storage and semiconductor manufacturing device having the same |