JPH0468537U - - Google Patents

Info

Publication number
JPH0468537U
JPH0468537U JP11191390U JP11191390U JPH0468537U JP H0468537 U JPH0468537 U JP H0468537U JP 11191390 U JP11191390 U JP 11191390U JP 11191390 U JP11191390 U JP 11191390U JP H0468537 U JPH0468537 U JP H0468537U
Authority
JP
Japan
Prior art keywords
gripping
wafer cassette
driving
section
driving part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11191390U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11191390U priority Critical patent/JPH0468537U/ja
Publication of JPH0468537U publication Critical patent/JPH0468537U/ja
Pending legal-status Critical Current

Links

JP11191390U 1990-10-25 1990-10-25 Pending JPH0468537U (US08087162-20120103-C00010.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11191390U JPH0468537U (US08087162-20120103-C00010.png) 1990-10-25 1990-10-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11191390U JPH0468537U (US08087162-20120103-C00010.png) 1990-10-25 1990-10-25

Publications (1)

Publication Number Publication Date
JPH0468537U true JPH0468537U (US08087162-20120103-C00010.png) 1992-06-17

Family

ID=31859398

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11191390U Pending JPH0468537U (US08087162-20120103-C00010.png) 1990-10-25 1990-10-25

Country Status (1)

Country Link
JP (1) JPH0468537U (US08087162-20120103-C00010.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0870027A (ja) * 1994-08-30 1996-03-12 Canon Inc 基板保管装置及びそれを有する半導体製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0870027A (ja) * 1994-08-30 1996-03-12 Canon Inc 基板保管装置及びそれを有する半導体製造装置

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