JPH0467799B2 - - Google Patents

Info

Publication number
JPH0467799B2
JPH0467799B2 JP9640385A JP9640385A JPH0467799B2 JP H0467799 B2 JPH0467799 B2 JP H0467799B2 JP 9640385 A JP9640385 A JP 9640385A JP 9640385 A JP9640385 A JP 9640385A JP H0467799 B2 JPH0467799 B2 JP H0467799B2
Authority
JP
Japan
Prior art keywords
laser
processing
laser beam
guide
power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9640385A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61255079A (ja
Inventor
Osami Ichiko
Katsuhiro Minamida
Takeshi Kitsukawa
Takashi Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Nippon Steel Corp
Original Assignee
Mitsubishi Electric Corp
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp, Nippon Steel Corp filed Critical Mitsubishi Electric Corp
Priority to JP9640385A priority Critical patent/JPS61255079A/ja
Publication of JPS61255079A publication Critical patent/JPS61255079A/ja
Publication of JPH0467799B2 publication Critical patent/JPH0467799B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Lasers (AREA)
JP9640385A 1985-05-07 1985-05-07 Ｃｏ↓２レ−ザ発振器 Granted JPS61255079A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9640385A JPS61255079A (ja) 1985-05-07 1985-05-07 Ｃｏ↓２レ−ザ発振器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9640385A JPS61255079A (ja) 1985-05-07 1985-05-07 Ｃｏ↓２レ−ザ発振器

Publications (2)

Publication Number Publication Date
JPS61255079A JPS61255079A (ja) 1986-11-12
JPH0467799B2 true JPH0467799B2 (enrdf_load_stackoverflow) 1992-10-29

Family

ID=14163994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9640385A Granted JPS61255079A (ja) 1985-05-07 1985-05-07 Ｃｏ↓２レ−ザ発振器

Country Status (1)

Country Link
JP (1) JPS61255079A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5368261B2 (ja) * 2008-11-06 2013-12-18 ギガフォトン株式会社 極端紫外光源装置、極端紫外光源装置の制御方法
JP6760044B2 (ja) * 2016-12-21 2020-09-23 トヨタ自動車株式会社 光軸調整用装置

Also Published As

Publication number Publication date
JPS61255079A (ja) 1986-11-12

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