JPH0466580U - - Google Patents
Info
- Publication number
- JPH0466580U JPH0466580U JP11045690U JP11045690U JPH0466580U JP H0466580 U JPH0466580 U JP H0466580U JP 11045690 U JP11045690 U JP 11045690U JP 11045690 U JP11045690 U JP 11045690U JP H0466580 U JPH0466580 U JP H0466580U
- Authority
- JP
- Japan
- Prior art keywords
- strain gauge
- metal substrate
- cantilever
- acceleration sensor
- insulating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 230000001133 acceleration Effects 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11045690U JPH0466580U (th) | 1990-10-22 | 1990-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11045690U JPH0466580U (th) | 1990-10-22 | 1990-10-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0466580U true JPH0466580U (th) | 1992-06-11 |
Family
ID=31857796
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11045690U Pending JPH0466580U (th) | 1990-10-22 | 1990-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0466580U (th) |
-
1990
- 1990-10-22 JP JP11045690U patent/JPH0466580U/ja active Pending