JPH0466048U - - Google Patents
Info
- Publication number
- JPH0466048U JPH0466048U JP10926090U JP10926090U JPH0466048U JP H0466048 U JPH0466048 U JP H0466048U JP 10926090 U JP10926090 U JP 10926090U JP 10926090 U JP10926090 U JP 10926090U JP H0466048 U JPH0466048 U JP H0466048U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- pressure regulator
- line
- supply system
- gas supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10926090U JPH0466048U (cs) | 1990-10-16 | 1990-10-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10926090U JPH0466048U (cs) | 1990-10-16 | 1990-10-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0466048U true JPH0466048U (cs) | 1992-06-10 |
Family
ID=31856432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10926090U Pending JPH0466048U (cs) | 1990-10-16 | 1990-10-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0466048U (cs) |
-
1990
- 1990-10-16 JP JP10926090U patent/JPH0466048U/ja active Pending
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