JPH0466048U - - Google Patents
Info
- Publication number
- JPH0466048U JPH0466048U JP10926090U JP10926090U JPH0466048U JP H0466048 U JPH0466048 U JP H0466048U JP 10926090 U JP10926090 U JP 10926090U JP 10926090 U JP10926090 U JP 10926090U JP H0466048 U JPH0466048 U JP H0466048U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- pressure regulator
- line
- supply system
- gas supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
Description
第１図はこの考案のガス供給システムの一実施
例を示す配管図、第２図は従来のガス供給システ
ムの配管図である。
図において、ＧＢ１〜ＧＢ３はガスボンベ、Ｖ
１〜Ｖ１２はバルブ、Ｒ１〜Ｒ３はレギユレータ
、Ｍ１はマスフローを示す。なお、図中、同一符
号は同一、または相当部分を示す。
FIG. 1 is a piping diagram showing an embodiment of the gas supply system of this invention, and FIG. 2 is a piping diagram of a conventional gas supply system. In the figure, GB1 to GB3 are gas cylinders, V
1 to V12 are valves, R1 to R3 are regulators, and M1 is a mass flow. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.
Claims (1)
、この各々のガスボンベからガスラインを通して
１個のガス圧力調節器に結び、この各々のガス圧
力調節器からのガスラインを結合し１つのガスラ
インとして１個のガス流量制御器に結び、ガス供
給室に結んだことを特徴とするガス供給システム
。 A plurality of gas cylinders containing semiconductor material gas, etc. are connected to one gas pressure regulator through a gas line from each gas cylinder, and the gas lines from each gas pressure regulator are combined to form one gas line. A gas supply system characterized by being connected to a gas flow rate controller and connected to a gas supply chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10926090U JPH0466048U (en) | 1990-10-16 | 1990-10-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10926090U JPH0466048U (en) | 1990-10-16 | 1990-10-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0466048U true JPH0466048U (en) | 1992-06-10 |
Family
ID=31856432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10926090U Pending JPH0466048U (en) | 1990-10-16 | 1990-10-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0466048U (en) |
-
1990
- 1990-10-16 JP JP10926090U patent/JPH0466048U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0466048U (en) | ||
| JPH0480522U (en) | ||
| JPS59180760U (en) | paint supply device | |
| JPS58178599U (en) | gas switching device | |
| JPH0295599U (en) | ||
| JPS63143703U (en) | ||
| JPH0177102U (en) | ||
| JPS61198848U (en) | ||
| JPS614181U (en) | Condenser | |
| JPH0212600U (en) | ||
| JPH02112774U (en) | ||
| JPH0397573U (en) | ||
| JPH02101856U (en) | ||
| JPS62169812U (en) | ||
| JPS6176248U (en) | ||
| JPS62176600U (en) | ||
| JPS62158341U (en) | ||
| JPS63196054U (en) | ||
| JPS6321702U (en) | ||
| JPS5863963U (en) | shotplast machine | |
| JPS60184800U (en) | fuel supply device | |
| FR1503695A (en) | Regulator for controlling a pressurized fluid, air or gas | |
| JPS6161876U (en) | ||
| JPS5946931U (en) | Continuous distribution control device | |
| JPH0341299U (en) |