JPH046593U - - Google Patents

Info

Publication number
JPH046593U
JPH046593U JP4434990U JP4434990U JPH046593U JP H046593 U JPH046593 U JP H046593U JP 4434990 U JP4434990 U JP 4434990U JP 4434990 U JP4434990 U JP 4434990U JP H046593 U JPH046593 U JP H046593U
Authority
JP
Japan
Prior art keywords
rotor
bottom plate
vacuum pump
cylindrical body
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4434990U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4434990U priority Critical patent/JPH046593U/ja
Priority to DE19914113122 priority patent/DE4113122A1/de
Publication of JPH046593U publication Critical patent/JPH046593U/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP4434990U 1990-04-25 1990-04-25 Pending JPH046593U (ru)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP4434990U JPH046593U (ru) 1990-04-25 1990-04-25
DE19914113122 DE4113122A1 (de) 1990-04-25 1991-04-22 Vakuumpumpe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4434990U JPH046593U (ru) 1990-04-25 1990-04-25

Publications (1)

Publication Number Publication Date
JPH046593U true JPH046593U (ru) 1992-01-21

Family

ID=12689038

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4434990U Pending JPH046593U (ru) 1990-04-25 1990-04-25

Country Status (2)

Country Link
JP (1) JPH046593U (ru)
DE (1) DE4113122A1 (ru)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012032863A1 (ja) * 2010-09-06 2012-03-15 エドワーズ株式会社 ターボ分子ポンプ
WO2012043027A1 (ja) * 2010-09-28 2012-04-05 エドワーズ株式会社 排気ポンプ
WO2012043035A1 (ja) * 2010-09-28 2012-04-05 エドワーズ株式会社 排気ポンプ
WO2013008519A1 (ja) * 2011-07-14 2013-01-17 エドワーズ株式会社 ネジ溝式真空ポンプ及びこれを使用した真空排気システム
WO2015045748A1 (ja) * 2013-09-30 2015-04-02 エドワーズ株式会社 ネジ溝ポンプ機構、該ネジ溝ポンプ機構を用いた真空ポンプ、並びに前記ネジ溝ポンプ機構に用いられるロータ、外周側ステータ及び内周側ステータ

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9525337D0 (en) * 1995-12-12 1996-02-14 Boc Group Plc Improvements in vacuum pumps
DE19632375A1 (de) * 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gasreibungspumpe
EP3623634B1 (de) * 2019-08-13 2022-04-06 Pfeiffer Vacuum Gmbh Vakuumpumpe umfassend eine holweckpumpstufe und zwei seitenkanalpumpstufen

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012032863A1 (ja) * 2010-09-06 2012-03-15 エドワーズ株式会社 ターボ分子ポンプ
JP5738869B2 (ja) * 2010-09-06 2015-06-24 エドワーズ株式会社 ターボ分子ポンプ
US9416784B2 (en) 2010-09-28 2016-08-16 Edwards Japan Limited Exhaust pump
WO2012043027A1 (ja) * 2010-09-28 2012-04-05 エドワーズ株式会社 排気ポンプ
WO2012043035A1 (ja) * 2010-09-28 2012-04-05 エドワーズ株式会社 排気ポンプ
CN102834620A (zh) * 2010-09-28 2012-12-19 埃地沃兹日本有限公司 排气泵
JPWO2012043027A1 (ja) * 2010-09-28 2014-02-06 エドワーズ株式会社 排気ポンプ
EP3499045A1 (en) * 2010-09-28 2019-06-19 Edwards Japan Limited Exhaust pump
EP2623791A4 (en) * 2010-09-28 2018-06-27 Edwards Japan Limited Exhaust pump
JP5763660B2 (ja) * 2010-09-28 2015-08-12 エドワーズ株式会社 排気ポンプ
JP5767644B2 (ja) * 2010-09-28 2015-08-19 エドワーズ株式会社 排気ポンプ
CN102834620B (zh) * 2010-09-28 2016-03-02 埃地沃兹日本有限公司 排气泵
WO2013008519A1 (ja) * 2011-07-14 2013-01-17 エドワーズ株式会社 ネジ溝式真空ポンプ及びこれを使用した真空排気システム
JPWO2013008519A1 (ja) * 2011-07-14 2015-02-23 エドワーズ株式会社 ネジ溝式真空ポンプ及びこれを使用した真空排気システム
KR20160061921A (ko) * 2013-09-30 2016-06-01 에드워즈 가부시키가이샤 나사 홈 펌프 기구, 상기 나사 홈 펌프 기구를 이용한 진공 펌프, 및 상기 나사 홈 펌프 기구에 이용되는 로터, 외주측 스테이터 및 내주측 스테이터
JPWO2015045748A1 (ja) * 2013-09-30 2017-03-09 エドワーズ株式会社 ネジ溝ポンプ機構、該ネジ溝ポンプ機構を用いた真空ポンプ、並びに前記ネジ溝ポンプ機構に用いられるロータ、外周側ステータ及び内周側ステータ
WO2015045748A1 (ja) * 2013-09-30 2015-04-02 エドワーズ株式会社 ネジ溝ポンプ機構、該ネジ溝ポンプ機構を用いた真空ポンプ、並びに前記ネジ溝ポンプ機構に用いられるロータ、外周側ステータ及び内周側ステータ
US10253777B2 (en) 2013-09-30 2019-04-09 Edwards Japan Limited Thread groove pump mechanism, vacuum pump including thread groove pump mechanism, and rotor, outer circumference side stator, and inner circumference side stator used in thread groove pump mechanism

Also Published As

Publication number Publication date
DE4113122A1 (de) 1991-10-31

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