JPH0463135U - - Google Patents

Info

Publication number
JPH0463135U
JPH0463135U JP10430990U JP10430990U JPH0463135U JP H0463135 U JPH0463135 U JP H0463135U JP 10430990 U JP10430990 U JP 10430990U JP 10430990 U JP10430990 U JP 10430990U JP H0463135 U JPH0463135 U JP H0463135U
Authority
JP
Japan
Prior art keywords
recess
elastic plate
contacts
insulating film
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10430990U
Other languages
English (en)
Japanese (ja)
Other versions
JP2533431Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990104309U priority Critical patent/JP2533431Y2/ja
Publication of JPH0463135U publication Critical patent/JPH0463135U/ja
Application granted granted Critical
Publication of JP2533431Y2 publication Critical patent/JP2533431Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1990104309U 1990-10-03 1990-10-03 Ｉｃウエーハ試験用プローブ Expired - Lifetime JP2533431Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990104309U JP2533431Y2 (ja) 1990-10-03 1990-10-03 Ｉｃウエーハ試験用プローブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990104309U JP2533431Y2 (ja) 1990-10-03 1990-10-03 Ｉｃウエーハ試験用プローブ

Publications (2)

Publication Number Publication Date
JPH0463135U true JPH0463135U (US06826419-20041130-M00005.png) 1992-05-29
JP2533431Y2 JP2533431Y2 (ja) 1997-04-23

Family

ID=31849533

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990104309U Expired - Lifetime JP2533431Y2 (ja) 1990-10-03 1990-10-03 Ｉｃウエーハ試験用プローブ

Country Status (1)

Country Link
JP (1) JP2533431Y2 (US06826419-20041130-M00005.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07263501A (ja) * 1994-01-25 1995-10-13 Hughes Aircraft Co ピボット運動可能な自己中心位置設定エラストマー圧力ウェハプローブ
JP2019109102A (ja) * 2017-12-18 2019-07-04 株式会社ヨコオ 検査治具

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02163664A (ja) * 1988-10-11 1990-06-22 Hewlett Packard Co <Hp> 自動補償装置及び自己レベリング膜プローブ装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02163664A (ja) * 1988-10-11 1990-06-22 Hewlett Packard Co <Hp> 自動補償装置及び自己レベリング膜プローブ装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07263501A (ja) * 1994-01-25 1995-10-13 Hughes Aircraft Co ピボット運動可能な自己中心位置設定エラストマー圧力ウェハプローブ
JP2019109102A (ja) * 2017-12-18 2019-07-04 株式会社ヨコオ 検査治具

Also Published As

Publication number Publication date
JP2533431Y2 (ja) 1997-04-23

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term