JPH0462393U - - Google Patents
Info
- Publication number
- JPH0462393U JPH0462393U JP10494290U JP10494290U JPH0462393U JP H0462393 U JPH0462393 U JP H0462393U JP 10494290 U JP10494290 U JP 10494290U JP 10494290 U JP10494290 U JP 10494290U JP H0462393 U JPH0462393 U JP H0462393U
- Authority
- JP
- Japan
- Prior art keywords
- pump
- pump body
- model
- turbo molecular
- discrimination circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
- Control Of Positive-Displacement Air Blowers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990104942U JPH0752397Y2 (ja) | 1990-10-05 | 1990-10-05 | ターボ分子ポンプ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990104942U JPH0752397Y2 (ja) | 1990-10-05 | 1990-10-05 | ターボ分子ポンプ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0462393U true JPH0462393U (enrdf_load_stackoverflow) | 1992-05-28 |
JPH0752397Y2 JPH0752397Y2 (ja) | 1995-11-29 |
Family
ID=31850416
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990104942U Expired - Fee Related JPH0752397Y2 (ja) | 1990-10-05 | 1990-10-05 | ターボ分子ポンプ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0752397Y2 (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006344503A (ja) * | 2005-06-09 | 2006-12-21 | Boc Edwards Kk | 端子構造及び真空ポンプ |
JP2011226377A (ja) * | 2010-04-20 | 2011-11-10 | Osaka Vacuum Ltd | 分子ポンプ装置の制御装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3786803B2 (ja) * | 1999-07-14 | 2006-06-14 | 株式会社ジェイテクト | 制御型磁気軸受装置及び磁気軸受の機種判定方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60178506A (ja) * | 1984-02-24 | 1985-09-12 | Mitsubishi Agricult Mach Co Ltd | 農機における自動制御装置の機種選択装置 |
JPH01124001A (ja) * | 1987-11-09 | 1989-05-16 | Mitsubishi Electric Corp | ロボット制御方式 |
-
1990
- 1990-10-05 JP JP1990104942U patent/JPH0752397Y2/ja not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60178506A (ja) * | 1984-02-24 | 1985-09-12 | Mitsubishi Agricult Mach Co Ltd | 農機における自動制御装置の機種選択装置 |
JPH01124001A (ja) * | 1987-11-09 | 1989-05-16 | Mitsubishi Electric Corp | ロボット制御方式 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006344503A (ja) * | 2005-06-09 | 2006-12-21 | Boc Edwards Kk | 端子構造及び真空ポンプ |
JP2011226377A (ja) * | 2010-04-20 | 2011-11-10 | Osaka Vacuum Ltd | 分子ポンプ装置の制御装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0752397Y2 (ja) | 1995-11-29 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |