JPH0462393U - - Google Patents

Info

Publication number
JPH0462393U
JPH0462393U JP10494290U JP10494290U JPH0462393U JP H0462393 U JPH0462393 U JP H0462393U JP 10494290 U JP10494290 U JP 10494290U JP 10494290 U JP10494290 U JP 10494290U JP H0462393 U JPH0462393 U JP H0462393U
Authority
JP
Japan
Prior art keywords
pump
pump body
model
turbo molecular
discrimination circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10494290U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0752397Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990104942U priority Critical patent/JPH0752397Y2/ja
Publication of JPH0462393U publication Critical patent/JPH0462393U/ja
Application granted granted Critical
Publication of JPH0752397Y2 publication Critical patent/JPH0752397Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Control Of Positive-Displacement Air Blowers (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP1990104942U 1990-10-05 1990-10-05 ターボ分子ポンプ Expired - Fee Related JPH0752397Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990104942U JPH0752397Y2 (ja) 1990-10-05 1990-10-05 ターボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990104942U JPH0752397Y2 (ja) 1990-10-05 1990-10-05 ターボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPH0462393U true JPH0462393U (enrdf_load_stackoverflow) 1992-05-28
JPH0752397Y2 JPH0752397Y2 (ja) 1995-11-29

Family

ID=31850416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990104942U Expired - Fee Related JPH0752397Y2 (ja) 1990-10-05 1990-10-05 ターボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPH0752397Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006344503A (ja) * 2005-06-09 2006-12-21 Boc Edwards Kk 端子構造及び真空ポンプ
JP2011226377A (ja) * 2010-04-20 2011-11-10 Osaka Vacuum Ltd 分子ポンプ装置の制御装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3786803B2 (ja) * 1999-07-14 2006-06-14 株式会社ジェイテクト 制御型磁気軸受装置及び磁気軸受の機種判定方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60178506A (ja) * 1984-02-24 1985-09-12 Mitsubishi Agricult Mach Co Ltd 農機における自動制御装置の機種選択装置
JPH01124001A (ja) * 1987-11-09 1989-05-16 Mitsubishi Electric Corp ロボット制御方式

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60178506A (ja) * 1984-02-24 1985-09-12 Mitsubishi Agricult Mach Co Ltd 農機における自動制御装置の機種選択装置
JPH01124001A (ja) * 1987-11-09 1989-05-16 Mitsubishi Electric Corp ロボット制御方式

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006344503A (ja) * 2005-06-09 2006-12-21 Boc Edwards Kk 端子構造及び真空ポンプ
JP2011226377A (ja) * 2010-04-20 2011-11-10 Osaka Vacuum Ltd 分子ポンプ装置の制御装置

Also Published As

Publication number Publication date
JPH0752397Y2 (ja) 1995-11-29

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Legal Events

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