JPH0461351U - - Google Patents

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Publication number
JPH0461351U
JPH0461351U JP10538390U JP10538390U JPH0461351U JP H0461351 U JPH0461351 U JP H0461351U JP 10538390 U JP10538390 U JP 10538390U JP 10538390 U JP10538390 U JP 10538390U JP H0461351 U JPH0461351 U JP H0461351U
Authority
JP
Japan
Prior art keywords
exhaust
spin cup
forced
box
exhaust box
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10538390U
Other languages
English (en)
Other versions
JP2524697Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10538390U priority Critical patent/JP2524697Y2/ja
Publication of JPH0461351U publication Critical patent/JPH0461351U/ja
Application granted granted Critical
Publication of JP2524697Y2 publication Critical patent/JP2524697Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Coating Apparatus (AREA)
  • Weting (AREA)

Description

【図面の簡単な説明】
第１図は本考案に係る排気連通装置を具備して
成る回転式基板処理装置の縦断面図、第２図及び
第３図はそれぞれ第１図中の部及び部の拡大
断面図、第４図は連通ダクトの変形例を示す要部
断面図、第５図は従来例を示す第１図相当図であ
る。 １……スピンカツプ、１１……排気管、１２…
…連通ダクト、１２ｂ……連通ダクトのベローズ
部分、１３……強制排気箱。

Claims (1)

  1. 【実用新案登録請求の範囲】 回転する基板を囲う昇降自在なスピンカツプを
    強制排気箱に連通して、スピンカツプ内を強制排
    気するようにした回転式基板処理装置におけるス
    ピンカツプと強制排気箱との排気連通装置であつ
    て、 上端部がスピンカツプに連結してスピンカツプ
    と共に昇降し、下端部が強制排気箱内に遊通状に
    挿入された排気管と、 排気管を遊通状に挿通し、上端部が排気管の周
    面と気密に連結し、下端が強制排気箱と気密に連
    結した伸縮自在な筒状部材からなる連通ダクトと
    からなることを特徴とする回転式基板処理装置の
    排気連通装置。
JP10538390U 1990-10-05 1990-10-05 回転式基板処理装置の排気連通装置 Expired - Lifetime JP2524697Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10538390U JP2524697Y2 (ja) 1990-10-05 1990-10-05 回転式基板処理装置の排気連通装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10538390U JP2524697Y2 (ja) 1990-10-05 1990-10-05 回転式基板処理装置の排気連通装置

Publications (2)

Publication Number Publication Date
JPH0461351U true JPH0461351U (ja) 1992-05-26
JP2524697Y2 JP2524697Y2 (ja) 1997-02-05

Family

ID=31851046

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10538390U Expired - Lifetime JP2524697Y2 (ja) 1990-10-05 1990-10-05 回転式基板処理装置の排気連通装置

Country Status (1)

Country Link
JP (1) JP2524697Y2 (ja)

Also Published As

Publication number Publication date
JP2524697Y2 (ja) 1997-02-05

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term