JPH0460653U - - Google Patents
Info
- Publication number
- JPH0460653U JPH0460653U JP10239690U JP10239690U JPH0460653U JP H0460653 U JPH0460653 U JP H0460653U JP 10239690 U JP10239690 U JP 10239690U JP 10239690 U JP10239690 U JP 10239690U JP H0460653 U JPH0460653 U JP H0460653U
- Authority
- JP
- Japan
- Prior art keywords
- surface plate
- polishing
- piezoelectric body
- plate
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 8
- 239000002002 slurry Substances 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10239690U JPH0460653U (zh) | 1990-09-29 | 1990-09-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10239690U JPH0460653U (zh) | 1990-09-29 | 1990-09-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0460653U true JPH0460653U (zh) | 1992-05-25 |
Family
ID=31846617
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10239690U Pending JPH0460653U (zh) | 1990-09-29 | 1990-09-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0460653U (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009194631A (ja) * | 2008-02-14 | 2009-08-27 | Seiko Instruments Inc | ウエハ、ウエハ研磨装置、ウエハ研磨方法、圧電振動子の製造方法、圧電振動子、発振器、電子機器及び電波時計 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01140960A (ja) * | 1987-11-27 | 1989-06-02 | Speedfam Co Ltd | 平面研磨装置 |
-
1990
- 1990-09-29 JP JP10239690U patent/JPH0460653U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01140960A (ja) * | 1987-11-27 | 1989-06-02 | Speedfam Co Ltd | 平面研磨装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009194631A (ja) * | 2008-02-14 | 2009-08-27 | Seiko Instruments Inc | ウエハ、ウエハ研磨装置、ウエハ研磨方法、圧電振動子の製造方法、圧電振動子、発振器、電子機器及び電波時計 |