JPH0460602A - Focus detector and observation device equipped with the same - Google Patents

Focus detector and observation device equipped with the same

Info

Publication number
JPH0460602A
JPH0460602A JP17248190A JP17248190A JPH0460602A JP H0460602 A JPH0460602 A JP H0460602A JP 17248190 A JP17248190 A JP 17248190A JP 17248190 A JP17248190 A JP 17248190A JP H0460602 A JPH0460602 A JP H0460602A
Authority
JP
Japan
Prior art keywords
photodetector
surface
inspected
body
image formation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17248190A
Inventor
Masafumi Kamata
Osamu Konouchi
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP17248190A priority Critical patent/JPH0460602A/en
Publication of JPH0460602A publication Critical patent/JPH0460602A/en
Application status is Pending legal-status Critical

Links

Abstract

PURPOSE: To attain highly accurate focus position detection over a wide defocusing range wherein the quantity of defocusing is large by properly setting respective elements for making eccentric luminous flux incident on an image formation optical system and respective elements such as an auxiliary detector.
CONSTITUTION: A light limiting member 91 has a reflecting surface which reflects reflected light from a surface to be inspected and directs it to a photodetector 7, the auxiliary photodetector 3 detecting part of the reflected light from the surface to be inspected which does not strike on the photodetector 7 by passing by the reflecting surface is arranged, and the position of the surface to be inspected in the direction of the optical axis 114 is adjusted according to the signal from this auxiliary photodetector 3. Then when a body 92 is large and in a defocusing state, a driving means 40 moves and adjusts the body 92 or image formation optical system 9 and then the reflected luminous flux from the body 92 is made incident on the photodetector 7, which outputs a specific difference signal. Consequently, the focus position of the image formation optical system 9 can be detected with high accuracy over the wide range.
COPYRIGHT: (C)1992,JPO&Japio
JP17248190A 1990-06-29 1990-06-29 Focus detector and observation device equipped with the same Pending JPH0460602A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17248190A JPH0460602A (en) 1990-06-29 1990-06-29 Focus detector and observation device equipped with the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17248190A JPH0460602A (en) 1990-06-29 1990-06-29 Focus detector and observation device equipped with the same

Publications (1)

Publication Number Publication Date
JPH0460602A true JPH0460602A (en) 1992-02-26

Family

ID=15942792

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17248190A Pending JPH0460602A (en) 1990-06-29 1990-06-29 Focus detector and observation device equipped with the same

Country Status (1)

Country Link
JP (1) JPH0460602A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004520105A (en) * 2000-12-19 2004-07-08 ハイシャン ゼン、 Method and apparatus for simultaneous measurement of the electromagnetic radiation by the method and apparatus as well as a number of measuring devices for spectroscopic and fluorescence and reflectance imaging

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004520105A (en) * 2000-12-19 2004-07-08 ハイシャン ゼン、 Method and apparatus for simultaneous measurement of the electromagnetic radiation by the method and apparatus as well as a number of measuring devices for spectroscopic and fluorescence and reflectance imaging

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