JPH0460549U - - Google Patents
Info
- Publication number
- JPH0460549U JPH0460549U JP10110990U JP10110990U JPH0460549U JP H0460549 U JPH0460549 U JP H0460549U JP 10110990 U JP10110990 U JP 10110990U JP 10110990 U JP10110990 U JP 10110990U JP H0460549 U JPH0460549 U JP H0460549U
- Authority
- JP
- Japan
- Prior art keywords
- gate valves
- pair
- opening
- gate
- rolling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10110990U JPH0721569Y2 (ja) | 1990-09-26 | 1990-09-26 | 真空成膜装置の仕切弁装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10110990U JPH0721569Y2 (ja) | 1990-09-26 | 1990-09-26 | 真空成膜装置の仕切弁装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0460549U true JPH0460549U (en:Method) | 1992-05-25 |
| JPH0721569Y2 JPH0721569Y2 (ja) | 1995-05-17 |
Family
ID=31844284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10110990U Expired - Lifetime JPH0721569Y2 (ja) | 1990-09-26 | 1990-09-26 | 真空成膜装置の仕切弁装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0721569Y2 (en:Method) |
-
1990
- 1990-09-26 JP JP10110990U patent/JPH0721569Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0721569Y2 (ja) | 1995-05-17 |