JPH0459573B2 - - Google Patents

Info

Publication number
JPH0459573B2
JPH0459573B2 JP57161198A JP16119882A JPH0459573B2 JP H0459573 B2 JPH0459573 B2 JP H0459573B2 JP 57161198 A JP57161198 A JP 57161198A JP 16119882 A JP16119882 A JP 16119882A JP H0459573 B2 JPH0459573 B2 JP H0459573B2
Authority
JP
Japan
Prior art keywords
diaphragm
ring
pressure
welding
annular surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57161198A
Other languages
Japanese (ja)
Other versions
JPS5950326A (en
Inventor
Kofuku Ito
Shunichiro Anami
Takeshi Nishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Priority to JP16119882A priority Critical patent/JPS5950326A/en
Publication of JPS5950326A publication Critical patent/JPS5950326A/en
Publication of JPH0459573B2 publication Critical patent/JPH0459573B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007Fluidic connecting means
    • G01L19/0046Fluidic connecting means using isolation membranes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Diaphragms And Bellows (AREA)

Description

【発明の詳細な説明】 本発明は圧力発信器、差圧発振器等においてボ
デイへダイヤフラムを固定する方法に関するもの
である。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for fixing a diaphragm to a body in a pressure transmitter, differential pressure oscillator, etc.

液封式の圧力発振器や差圧発進器等は、外圧を
内封液に伝達する円板状のダイヤフラムを備えて
おり、このダイヤフラムをボデイへ固定するに
は、ボデイと環状の座金との間にダイヤフラムを
挾み、本体と座金とを周縁部で溶着するという方
法が採られている。第1図は従来の固定方法を説
明するために示す差圧発振器のダイヤフラム外周
部近傍の断面図であつて、ボデイ1とカバー2と
の外周部に設けた環状接合部間には、ダイヤフラ
ム3とリング4とが重ねられてボデイ1とリング
4との周縁が溶着されており、溶着後ボデイ1と
カバー2とは図示しないボルトによつて締結され
る。
Liquid ring type pressure oscillators and differential pressure starters are equipped with a disc-shaped diaphragm that transmits external pressure to the internal liquid. A method is adopted in which the diaphragm is sandwiched between the two, and the main body and washer are welded together at the peripheral edge. FIG. 1 is a cross-sectional view of the vicinity of the outer periphery of the diaphragm of a differential pressure oscillator shown to explain a conventional fixing method. and ring 4 are stacked on top of each other, and the peripheral edges of body 1 and ring 4 are welded together, and after welding, body 1 and cover 2 are fastened together with bolts (not shown).

このような従来のダイヤフラム固定方法は来板
状のリング4を溶着するものであるために、溶着
後および計器の使用中に種々の問題が発生してい
た。すなわち、リング4は溶着によつて外周部が
収縮するのに対して内周部が収縮しないので、全
体が歪み、内周部がボデイ1から離間する方向に
膨出して皿状になる。したがつて、第1図に示す
ようにボデイ1とリング4との間にすき間がで
き、ダイヤフラム3が外周部を挾持されずに遊離
状態になつてしまう。このような状態で内封液5
が封入されたのち測定流体の温度変化で封入液量
が変化した場合、ある一定のところまではボデイ
1の内周縁Pを支点にして運動していたダイヤフ
ラム3が、一定の膨張量を越えると溶着点P1
支点にして運動するようになり、この結果容積変
化と圧力変化との比である容積圧力係数が変化す
る。したがつて温度と圧力との関係を線図で表わ
した場合に直線とならず、これを電気的に補正す
ることがきわめてむつかしいので、正確な測定結
果を得ることが困難である。また、ダイヤフラム
3が軟質であるために第2図に示すように溶着後
ボデイ1の接合面から離間することがあり、この
ままカバー2を締め付けると、ダイアフラム3の
位置が図の下方へ押されて内封液圧が上昇し、ゼ
ロシフトが発生するという不具合がある。さら
に、歪んだリング4をカバー2で無理に押付けて
締めることによりリング4が割れてしまい、再度
溶着を繰返さなければならないことがあつた。
Since such a conventional diaphragm fixing method involves welding the plate-shaped ring 4, various problems have occurred after welding and during use of the instrument. That is, while the outer circumferential portion of the ring 4 contracts due to welding, the inner circumferential portion does not, so that the entire ring 4 is distorted and the inner circumferential portion bulges in a direction away from the body 1, forming a dish-like shape. Therefore, as shown in FIG. 1, a gap is created between the body 1 and the ring 4, and the diaphragm 3 is left in a free state without being held at its outer periphery. In this condition, the sealing liquid 5
If the amount of filled liquid changes due to a change in the temperature of the fluid to be measured after the diaphragm 3 is filled, the diaphragm 3, which was moving around the inner peripheral edge P of the body 1 as a fulcrum up to a certain point, will expand beyond a certain amount. It begins to move with the welding point P1 as a fulcrum, and as a result, the volume-pressure coefficient, which is the ratio of volume change to pressure change, changes. Therefore, when the relationship between temperature and pressure is expressed in a diagram, it is not a straight line, and it is extremely difficult to correct this electrically, making it difficult to obtain accurate measurement results. In addition, since the diaphragm 3 is soft, it may separate from the joint surface of the body 1 after welding as shown in Figure 2. If the cover 2 is tightened in this state, the position of the diaphragm 3 will be pushed downward in the figure. There is a problem that the internal fluid pressure increases and a zero shift occurs. Furthermore, when the distorted ring 4 is forcibly pressed and tightened with the cover 2, the ring 4 breaks, and welding has to be repeated again.

本発明は以上のような点に鑑みなされたもの
で、ダイヤフラムを固定するためのリングを内周
と外周とが軸線方向にずれた皿ばね状に形成し、
このリングの内周縁側をボデイの環状面上のダイ
ヤフラムに当てて外周縁側をダイヤフラム方向へ
押圧することによつて平板状に弾性変形させ、こ
の状態でリングとダイヤフラムおよびボデイの外
周縁を一体に溶着することにより、ダイヤフラム
とボデイ間の密着を確実にするとともに、溶着時
におけるリングの損傷を防止できるダイヤフラム
の固定方法を提供するものである。以下、図に示
す実施例により詳細に説明する。
The present invention was made in view of the above points, and a ring for fixing a diaphragm is formed in the shape of a disc spring with an inner circumference and an outer circumference shifted in the axial direction,
The inner peripheral edge of this ring is pressed against the diaphragm on the annular surface of the body, and the outer peripheral edge is pressed toward the diaphragm to elastically deform it into a flat plate. In this state, the ring, diaphragm, and outer peripheral edge of the body are integrated. The present invention provides a method for fixing a diaphragm that ensures close contact between the diaphragm and the body by welding, and prevents damage to the ring during welding. Hereinafter, a detailed explanation will be given with reference to embodiments shown in the drawings.

第3図は本発明に係るダイヤフラムの固定方法
を説明するための差圧発振器の断面図、第4図は
同じくリングの断面図である。図において差圧発
振器11は受圧部12と発信部13とで一体的に
形成されており、受圧部12に発進部13と接続
されたセンサを収納するセンサ室14が付設され
ている。受圧部12は円筒状に形成されたボデイ
15を備えており、その両端部には、高圧側の内
室16と低圧側の内室17とが環状の接合部と後
述するダイヤフラム18とで囲まれて設けられて
いる。また、両方の内室16,17と、センサ室
14内のセンサの高圧側、低圧側とは、内封液通
路19,20でそれぞれ連通されており、内室1
6,17と内封液通路19,20内にはシリコン
油等の内封液21が内封されている。22はボデ
イ15の鍔部を貫通する複数個のボルト23によ
つてボデイ15と締結される一対のカバーであつ
て、ボデイ15の環状面24との間を後述するダ
イヤフラム18とリング25とを介して接合され
る環状面26を有しており、環状面26には気密
保持用のOリング27が装填されている。また、
カバー21には孔28,29がそれぞれ穿設され
ており、これによつてカバー22の内室と、プロ
セスの高圧側、低圧側とがそれぞれ連通されてい
る。
FIG. 3 is a sectional view of a differential pressure oscillator for explaining the method of fixing a diaphragm according to the present invention, and FIG. 4 is a sectional view of a ring. In the figure, the differential pressure oscillator 11 is integrally formed with a pressure receiving part 12 and a transmitting part 13, and the pressure receiving part 12 is provided with a sensor chamber 14 that houses a sensor connected to the starting part 13. The pressure receiving part 12 includes a cylindrical body 15, and at both ends thereof, an internal chamber 16 on the high pressure side and an internal chamber 17 on the low pressure side are surrounded by an annular joint and a diaphragm 18, which will be described later. It is set up. Further, both inner chambers 16 and 17 and the high pressure side and low pressure side of the sensor in the sensor chamber 14 are communicated with each other through inner sealing liquid passages 19 and 20, and the inner chamber 1
A sealing liquid 21 such as silicone oil is sealed inside the sealing liquid passages 6 and 17 and the sealing liquid passages 19 and 20. A pair of covers 22 are fastened to the body 15 by a plurality of bolts 23 passing through the flange of the body 15, and a diaphragm 18 and a ring 25, which will be described later, are connected between the annular surface 24 of the body 15 and the annular surface 24 of the body 15. It has an annular surface 26 that is joined through the annular surface 26, and an O-ring 27 for airtightness is mounted on the annular surface 26. Also,
Holes 28 and 29 are formed in the cover 21, respectively, so that the inner chamber of the cover 22 communicates with the high-pressure side and the low-pressure side of the process, respectively.

次に前記ダイヤフラム18およびリング25の
構成とダイヤフラム18の固定方法とを説明す
る。ダイヤフラム18は、断面波形状で同心円の
凹凸を有する円板状に形成されており、外周部を
ボデイ15の環状面24と接合されている。ま
た、環状座金としてのリング25は、平面視を環
状に形成されているとともに、第4図に示すよう
に内周円と外周円とを符号tで示すだけずらして
全体を皿状に形成されている。このように構成さ
れたダイヤフラム18とリング25とを固定する
には、ボデイ15の環状面24とカバー22の環
状面26とでダイヤフラム18とリング25とを
挾持させたのちボルト23を締めてボデイ15と
カバー22とを締結する。この場合リング25を
小径部である内周面側がダイヤフラム18側に面
するように介挿する。こうして締結すると、リン
グ25は、締結圧力により弾性変形して平板状と
なり、これにはダイヤフラム18をボデイ15の
環状面24へ押圧する力が蓄積される。そしてこ
の状態でボデイ15の周縁とリング25の周縁と
を溶着して溶着部30を形成する。
Next, the configuration of the diaphragm 18 and ring 25 and the method of fixing the diaphragm 18 will be explained. The diaphragm 18 is formed into a disk shape with a corrugated cross section and concentric irregularities, and its outer peripheral portion is joined to the annular surface 24 of the body 15. Further, the ring 25 as an annular washer is formed into an annular shape when viewed from above, and the inner circumferential circle and the outer circumferential circle are shifted by an amount indicated by the symbol t, as shown in FIG. ing. In order to fix the diaphragm 18 and the ring 25 configured in this way, the diaphragm 18 and the ring 25 are held between the annular surface 24 of the body 15 and the annular surface 26 of the cover 22, and then the bolt 23 is tightened to secure the body. 15 and the cover 22 are fastened. In this case, the ring 25 is inserted so that the inner peripheral surface side, which is the small diameter portion, faces the diaphragm 18 side. When fastened in this manner, the ring 25 is elastically deformed by the fastening pressure to become a flat plate, and a force that presses the diaphragm 18 against the annular surface 24 of the body 15 is accumulated therein. In this state, the periphery of the body 15 and the periphery of the ring 25 are welded together to form a welded portion 30.

以上のようにしてダイヤフラム18が固定され
た差圧発振器において、プロセス管路内高圧部の
圧力が孔28を介した高圧側のダイヤフロム18
に印加され低圧部の圧力が孔29を介して低圧側
のダイヤフラム18に印加されると、高圧は内封
液21を介してセンサの高圧側へ導かれ、また低
圧は内封液21を介してセンサの低圧側へ導かれ
る。センサは高圧と低圧との差圧を検出し、電気
信号に変換して発信する。
In the differential pressure oscillator in which the diaphragm 18 is fixed as described above, the pressure in the high pressure section in the process pipe is transferred to the diaphragm 18 on the high pressure side through the hole 28.
When the pressure of the low pressure part is applied to the low pressure side diaphragm 18 through the hole 29, the high pressure is guided to the high pressure side of the sensor via the internal sealing liquid 21, and the low pressure is introduced via the internal sealing liquid 21. and is guided to the low pressure side of the sensor. The sensor detects the differential pressure between high and low pressure, converts it into an electrical signal, and sends it out.

このように動作する差圧発振器11におけるダ
イヤフラム18の固定方法においては、皿状に形
成したリング25を小径部がダイヤフラム18側
に位置するようにして介挿しこれをカバー22で
平面状にしてダイヤフラム18への押圧力を蓄積
した状態で溶着するように構成することにより、
溶着によつてリング25はその外周部が収縮して
も内周部がダイヤフラム18から離間することが
なく、蓄積された力でダイヤフラム18を押圧
し、ダイヤフラム18とリング25とが平面接触
する。
In the method of fixing the diaphragm 18 in the differential pressure oscillator 11 that operates in this way, a ring 25 formed in a dish shape is inserted with the small diameter part located on the diaphragm 18 side, and the ring 25 is flattened with a cover 22 and fixed to the diaphragm. By configuring so that the welding is performed while the pressing force on 18 is accumulated,
Due to the welding, even if the outer circumference of the ring 25 contracts, the inner circumference of the ring 25 does not separate from the diaphragm 18, and the accumulated force presses the diaphragm 18, bringing the diaphragm 18 and the ring 25 into planar contact.

第5図は本発明の他の実施例を示すリングとし
ての環状座金25Aの断面図であつて、第4図の
実施例ではテーパ面が直線状であつたのを円弧状
に形成したものである。
FIG. 5 is a sectional view of an annular washer 25A as a ring showing another embodiment of the present invention, in which the tapered surface is formed into an arc shape instead of a straight line in the embodiment shown in FIG. be.

なお、前記各実施例は本発明を差圧発信器に実
施した例を示したが、1箇所の圧力を測定する圧
力発信器などにも同様に実施することができる。
Although each of the above-mentioned embodiments shows an example in which the present invention is implemented in a differential pressure transmitter, the present invention can be similarly implemented in a pressure transmitter that measures pressure at one location.

以上説明したように本発明によれば、ダイヤフ
ラムを固定するための環状座金を内周と外周とが
軸線方向にずれた皿ばね状に形成し、この環状座
金の内周縁側をボデイの環状面上のダイヤフラム
に当てて外周縁側をダイヤフラム方向へ押圧する
ことによつて平板状に弾性変形させ、この状態で
環状座金とダイヤフラムおよびボデイの外周縁を
一体に溶着するものであるから、溶着によつて環
状座金の外周部が収縮しても内周部がダイヤフラ
ムから離間することがなく、環状座金はダイヤフ
ラムと平面接触してこれを強固に固定するので、
測定流体の温度が変化してもダイヤフラムの運動
支点が変化せず、温度変化にかかわらず容積圧力
係数が一定であつて補正を要しないきわめて正確
な測定結果が得られる測定精度が向上するととも
に、ダイヤフラムが内封液圧縮側へ移動すること
がなく、液圧の上昇によるゼロシフトの発生を防
止することができる。また、溶着後に歪んだ環状
座金を無理に押圧するというようなことがないの
で、溶着部が割れることがなく、材料費と再溶着
作業の労力とを節減することができる。
As explained above, according to the present invention, the annular washer for fixing the diaphragm is formed in the shape of a disc spring in which the inner circumference and the outer circumference are shifted in the axial direction, and the inner circumferential edge side of the annular washer is formed on the annular surface of the body. By applying pressure to the upper diaphragm and pressing the outer periphery toward the diaphragm, it is elastically deformed into a flat plate shape, and in this state, the annular washer, diaphragm, and outer periphery of the body are welded together. Even if the outer periphery of the annular washer contracts, the inner periphery will not separate from the diaphragm, and the annular washer makes plane contact with the diaphragm to firmly fix it.
The fulcrum of motion of the diaphragm does not change even if the temperature of the fluid to be measured changes, and the volume-pressure coefficient remains constant regardless of temperature changes, resulting in highly accurate measurement results that do not require correction. This improves measurement accuracy. The diaphragm does not move toward the compression side of the sealed liquid, and zero shift due to an increase in liquid pressure can be prevented from occurring. Further, since there is no need to forcefully press a distorted annular washer after welding, the welded portion does not crack, and material costs and labor for re-welding can be reduced.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図および第2図はそれぞれ従来のダイヤフ
ラム固定方法を説明するために示す差圧発信器の
ダイヤフラム外周部近傍の断面図、第3図は本発
明に係るダイヤフラム固定方法を説明するための
差圧発信器の断面図、第4図は同じくリングの断
面図、第5図はそれぞれ本発明の他の実施例を説
明するために示すリングの断面図である。 15……ボデイ、18……ダイヤフラム、22
……カバー、24……環状面、25……リング、
30……溶着部。
1 and 2 are cross-sectional views of the vicinity of the outer periphery of the diaphragm of a differential pressure transmitter shown for explaining the conventional diaphragm fixing method, respectively, and FIG. 3 is a cross-sectional view for explaining the diaphragm fixing method according to the present invention. FIG. 4 is a sectional view of the pressure transmitter, FIG. 4 is a sectional view of the ring, and FIG. 5 is a sectional view of the ring shown for explaining another embodiment of the present invention. 15...Body, 18...Diaphragm, 22
...cover, 24 ... annular surface, 25 ... ring,
30...Welded part.

Claims (1)

【特許請求の範囲】[Claims] 1 ボデイの環状面とリングとの間にダイヤフラ
ム介装し、それぞれの外周縁を溶接することによ
りダイヤフラムをボデイに固定する方法におい
て、前記リングを内周と外周とが軸線方向にずれ
た皿ばね状に形成し、このリングの内周縁側をボ
デイの環状面上のダイヤフラムに当てて外周縁側
をダイヤフラム方向へ押圧することによつて平板
状に弾性変形させ、この状態でリングとダイヤフ
ラムおよびボデイの外周縁を一体に溶着すること
を特徴とするダイヤフラム固定方法。
1. A method in which a diaphragm is interposed between an annular surface of a body and a ring, and the diaphragm is fixed to the body by welding the outer peripheries of each, and the ring is a disc spring in which the inner and outer peripheries are offset in the axial direction. The inner peripheral edge of the ring is pressed against the diaphragm on the annular surface of the body, and the outer peripheral edge is pressed toward the diaphragm to elastically deform it into a flat plate. In this state, the ring, diaphragm, and body are A diaphragm fixing method characterized by welding the outer periphery together.
JP16119882A 1982-09-16 1982-09-16 Fixing method of diaphragm Granted JPS5950326A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16119882A JPS5950326A (en) 1982-09-16 1982-09-16 Fixing method of diaphragm

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16119882A JPS5950326A (en) 1982-09-16 1982-09-16 Fixing method of diaphragm

Publications (2)

Publication Number Publication Date
JPS5950326A JPS5950326A (en) 1984-03-23
JPH0459573B2 true JPH0459573B2 (en) 1992-09-22

Family

ID=15730447

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16119882A Granted JPS5950326A (en) 1982-09-16 1982-09-16 Fixing method of diaphragm

Country Status (1)

Country Link
JP (1) JPS5950326A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1228279A (en) * 1984-06-21 1987-10-20 Martin J. Field Fuel pressure regulator
JPS6140639U (en) * 1984-08-16 1986-03-14 カルソニックカンセイ株式会社 pressure detection device
JP6106004B2 (en) * 2013-03-29 2017-03-29 株式会社不二工機 Pressure sensor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57110931A (en) * 1980-12-27 1982-07-10 Yokogawa Hokushin Electric Corp Manufacture of diaphragm for pressure detection

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57110931A (en) * 1980-12-27 1982-07-10 Yokogawa Hokushin Electric Corp Manufacture of diaphragm for pressure detection

Also Published As

Publication number Publication date
JPS5950326A (en) 1984-03-23

Similar Documents

Publication Publication Date Title
US5874679A (en) Pressure sensor package and method of making the same
US7383737B1 (en) Capacitive pressure sensor
JPH09504100A (en) Capacitive pressure sensor
KR20110134308A (en) Hermetically sealed pressure sensor device
US6066882A (en) Semiconductor pressure detecting device
JPH025255B2 (en)
US4199991A (en) Isolation diaphragm assembly for pressure transducers and method of manufacture
JPH0546489B2 (en)
CA1316700C (en) Floating diaphragm apparatus
JPH02287132A (en) Pressure detector
EP2113760A1 (en) Capacitive pressure sensor
US6224094B1 (en) Force sensor for seat occupant weight sensor
GB2040456A (en) Differential pressure transducer
JPH0459573B2 (en)
JP6628261B1 (en) Pressure detecting unit, pressure sensor using the same, and method of manufacturing pressure detecting unit
JP3570638B2 (en) Liquid ring vibration isolator
JPH0442753Y2 (en)
JP4157360B2 (en) Orifice member for liquid-filled vibration isolator and jig used for assembly of the orifice member
JPS5930447Y2 (en) pressure gauge
JPS6111625A (en) Liquid sealed type pressure sensor and its manufacture
JPH08136380A (en) Pressure sensor
JPH0212581Y2 (en)
JPS63243830A (en) Semiconductor pressure detector
JP2531924Y2 (en) Pressure sensor
JP3714414B2 (en) Differential pressure transmitter