JPH0459436U - - Google Patents
Info
- Publication number
- JPH0459436U JPH0459436U JP10214590U JP10214590U JPH0459436U JP H0459436 U JPH0459436 U JP H0459436U JP 10214590 U JP10214590 U JP 10214590U JP 10214590 U JP10214590 U JP 10214590U JP H0459436 U JPH0459436 U JP H0459436U
- Authority
- JP
- Japan
- Prior art keywords
- force sensor
- strain
- semiconductor
- axis force
- axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 239000013078 crystal Substances 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 8
- 238000004088 simulation Methods 0.000 description 2
Landscapes
- Force Measurement Appropriate To Specific Purposes (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10214590U JP2514974Y2 (ja) | 1990-09-27 | 1990-09-27 | 半導体３軸力覚センサーの起歪体構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10214590U JP2514974Y2 (ja) | 1990-09-27 | 1990-09-27 | 半導体３軸力覚センサーの起歪体構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0459436U true JPH0459436U (da) | 1992-05-21 |
| JP2514974Y2 JP2514974Y2 (ja) | 1996-10-23 |
Family
ID=31846153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10214590U Expired - Lifetime JP2514974Y2 (ja) | 1990-09-27 | 1990-09-27 | 半導体３軸力覚センサーの起歪体構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2514974Y2 (da) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017166847A (ja) * | 2016-03-14 | 2017-09-21 | トヨタ自動車株式会社 | 力センサの設計方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4303091B2 (ja) * | 2003-11-10 | 2009-07-29 | ニッタ株式会社 | 歪みゲージ型センサおよびこれを利用した歪みゲージ型センサユニット |
| JP2023099959A (ja) * | 2022-01-04 | 2023-07-14 | 住友重機械工業株式会社 | 歯車装置及びセンサ設置部材 |
-
1990
- 1990-09-27 JP JP10214590U patent/JP2514974Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017166847A (ja) * | 2016-03-14 | 2017-09-21 | トヨタ自動車株式会社 | 力センサの設計方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2514974Y2 (ja) | 1996-10-23 |