JPH0455532U - - Google Patents
Info
- Publication number
- JPH0455532U JPH0455532U JP9944790U JP9944790U JPH0455532U JP H0455532 U JPH0455532 U JP H0455532U JP 9944790 U JP9944790 U JP 9944790U JP 9944790 U JP9944790 U JP 9944790U JP H0455532 U JPH0455532 U JP H0455532U
- Authority
- JP
- Japan
- Prior art keywords
- force sensor
- diffusion
- bonding
- connection terminal
- crystal substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Force Measurement Appropriate To Specific Purposes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9944790U JPH0455532U (da) | 1990-09-20 | 1990-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9944790U JPH0455532U (da) | 1990-09-20 | 1990-09-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0455532U true JPH0455532U (da) | 1992-05-13 |
Family
ID=31841382
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9944790U Pending JPH0455532U (da) | 1990-09-20 | 1990-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0455532U (da) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11211586A (ja) * | 1998-01-27 | 1999-08-06 | Matsushita Electric Works Ltd | 半導体装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01253625A (ja) * | 1988-04-01 | 1989-10-09 | Ricoh Co Ltd | 力覚センサの信号伝達体 |
-
1990
- 1990-09-20 JP JP9944790U patent/JPH0455532U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01253625A (ja) * | 1988-04-01 | 1989-10-09 | Ricoh Co Ltd | 力覚センサの信号伝達体 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11211586A (ja) * | 1998-01-27 | 1999-08-06 | Matsushita Electric Works Ltd | 半導体装置 |