JPH0457854U - - Google Patents
Info
- Publication number
- JPH0457854U JPH0457854U JP9972690U JP9972690U JPH0457854U JP H0457854 U JPH0457854 U JP H0457854U JP 9972690 U JP9972690 U JP 9972690U JP 9972690 U JP9972690 U JP 9972690U JP H0457854 U JPH0457854 U JP H0457854U
- Authority
- JP
- Japan
- Prior art keywords
- photoresist layer
- light source
- substrate
- photomask
- illuminating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9972690U JPH0457854U ( ) | 1990-09-26 | 1990-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9972690U JPH0457854U ( ) | 1990-09-26 | 1990-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0457854U true JPH0457854U ( ) | 1992-05-18 |
Family
ID=31841849
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9972690U Pending JPH0457854U ( ) | 1990-09-26 | 1990-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0457854U ( ) |
-
1990
- 1990-09-26 JP JP9972690U patent/JPH0457854U/ja active Pending