JPH0457682U - - Google Patents
Info
- Publication number
- JPH0457682U JPH0457682U JP9992090U JP9992090U JPH0457682U JP H0457682 U JPH0457682 U JP H0457682U JP 9992090 U JP9992090 U JP 9992090U JP 9992090 U JP9992090 U JP 9992090U JP H0457682 U JPH0457682 U JP H0457682U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum processing
- gas
- chamber
- load lock
- lock chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9992090U JPH0457682U (cs) | 1990-09-25 | 1990-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9992090U JPH0457682U (cs) | 1990-09-25 | 1990-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0457682U true JPH0457682U (cs) | 1992-05-18 |
Family
ID=31842189
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9992090U Pending JPH0457682U (cs) | 1990-09-25 | 1990-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0457682U (cs) |
-
1990
- 1990-09-25 JP JP9992090U patent/JPH0457682U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0457682U (cs) | ||
| JPH05179447A (ja) | イオン注入装置 | |
| JPH0385797U (cs) | ||
| JPS5894423U (ja) | 蒸機用の排気装置 | |
| JPS59133800U (ja) | エゼクタ−ポンプ | |
| JPH01134782U (cs) | ||
| JPH033733U (cs) | ||
| JPS61168630U (cs) | ||
| JPH0378982U (cs) | ||
| JPH0363573U (cs) | ||
| JPS6367241U (cs) | ||
| JPH0259371U (cs) | ||
| JPH024292Y2 (cs) | ||
| JPS6387289U (cs) | ||
| JPS6449675U (cs) | ||
| JPH03118545U (cs) | ||
| JPS62175275U (cs) | ||
| JPS58109670U (ja) | リ−ドバルブ装置 | |
| JPH0471934U (cs) | ||
| JPS62188567U (cs) | ||
| JPS6223835B2 (cs) | ||
| JPS5837988U (ja) | 真空ポンプ排気用調圧箱 | |
| JPH03122023U (cs) | ||
| JPH0442727U (cs) | ||
| JPS6198868U (cs) |