JPH0334061U - - Google Patents
Info
- Publication number
- JPH0334061U JPH0334061U JP9363289U JP9363289U JPH0334061U JP H0334061 U JPH0334061 U JP H0334061U JP 9363289 U JP9363289 U JP 9363289U JP 9363289 U JP9363289 U JP 9363289U JP H0334061 U JPH0334061 U JP H0334061U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust
- plasma processing
- processing chamber
- hole
- exhaust hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9363289U JPH0334061U (cs) | 1989-08-09 | 1989-08-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9363289U JPH0334061U (cs) | 1989-08-09 | 1989-08-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0334061U true JPH0334061U (cs) | 1991-04-03 |
Family
ID=31643000
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9363289U Pending JPH0334061U (cs) | 1989-08-09 | 1989-08-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0334061U (cs) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005332985A (ja) * | 2004-05-20 | 2005-12-02 | Sanyo Electric Co Ltd | 半導体製造装置およびそれを用いて製造した光起電力装置 |
| JP2010186949A (ja) * | 2009-02-13 | 2010-08-26 | Nuflare Technology Inc | 半導体製造装置および半導体製造方法 |
| JP2016149526A (ja) * | 2015-02-12 | 2016-08-18 | エーエスエム アイピー ホールディング ビー．ブイ． | 半導体製造装置 |
-
1989
- 1989-08-09 JP JP9363289U patent/JPH0334061U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005332985A (ja) * | 2004-05-20 | 2005-12-02 | Sanyo Electric Co Ltd | 半導体製造装置およびそれを用いて製造した光起電力装置 |
| JP2010186949A (ja) * | 2009-02-13 | 2010-08-26 | Nuflare Technology Inc | 半導体製造装置および半導体製造方法 |
| JP2016149526A (ja) * | 2015-02-12 | 2016-08-18 | エーエスエム アイピー ホールディング ビー．ブイ． | 半導体製造装置 |