JPH0457279U - - Google Patents
Info
- Publication number
- JPH0457279U JPH0457279U JP10116190U JP10116190U JPH0457279U JP H0457279 U JPH0457279 U JP H0457279U JP 10116190 U JP10116190 U JP 10116190U JP 10116190 U JP10116190 U JP 10116190U JP H0457279 U JPH0457279 U JP H0457279U
- Authority
- JP
- Japan
- Prior art keywords
- coating device
- hood
- coating
- exterior
- exhaust hood
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 10
- 238000000576 coating method Methods 0.000 claims description 10
- 239000007788 liquid Substances 0.000 claims 2
- 238000004528 spin coating Methods 0.000 claims 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Thermal Transfer Or Thermal Recording In General (AREA)
- Coating Apparatus (AREA)
- Manufacturing Optical Record Carriers (AREA)
Description
第１図は本考案にかかるコーテイング装置の一
実施例を示す一部破断した斜視図、第２図は前記
装置の＃２−＃２線に沿つた端面図である。
１０……外装フード、１２……ターンテーブル
、１４……駆動モータ、１６……回転軸、１８…
…デイスク（対象物）、２０……開口、２２……
デイスペンサ、２４，３８……排出口、２６……
排気口、２８……排気フード、３０……隙間（通
口部）、３２，３４……テーパ部、３６……側面
部。
FIG. 1 is a partially cutaway perspective view showing an embodiment of the coating device according to the present invention, and FIG. 2 is an end view of the device taken along line #2-#2. 10... Exterior hood, 12... Turntable, 14... Drive motor, 16... Rotating shaft, 18...
...Disc (object), 20...Opening, 22...
Dispenser, 24, 38...Discharge port, 26...
Exhaust port, 28...exhaust hood, 30...gap (ventilation part), 32, 34...tapered part, 36...side surface part.
Claims (1)
内で回転してスピンコートが行なわれるコーテイ
ング装置において、 外装フードとの間に所定以下の大きさの通口部
を形成するとともに、不要なコート液の回収フー
ドを兼ねた排気フードを、回転の円周方向に沿つ
て対称となるように、前記外装フードと対象物と
の上下の間に設けたことを特徴とするコーテイン
グ装置。 (2) 前記排気フードは、前記対象物の方向に傾
斜したテーパ部を上下端部に備えたことを特徴と
する請求項１記載のコーテイング装置。 (3) 前記排気フードは、垂直方向に対して傾斜
した側部を備えたことを特徴とする請求項１又は
２記載のコーテイング装置。 (4) 前記通口部は、厚さ１０数ミリ以下の円周
状隙間であることを特徴とする請求項１乃至３の
いずれかに記載のコーテイング装置。 (5) 前記通口部は、直径が１０数ミリ以下の穴
を多数配置した構成であることを特徴とする請求
項１乃至３のいずれかに記載のコーテイング装置
。[Scope of Claim for Utility Model Registration] (1) In a coating device in which spin coating is performed by rotating an object onto which a coating liquid has been dripped within an exterior hood, there is a passage with a size smaller than a specified size between the coating device and the exterior hood. An exhaust hood that forms a part and also serves as a collection hood for unnecessary coating liquid is provided between the exterior hood and the top and bottom of the object so as to be symmetrical along the circumferential direction of rotation. Characteristic coating equipment. (2) The coating device according to claim 1, wherein the exhaust hood has tapered portions at upper and lower ends thereof inclined toward the object. (3) The coating device according to claim 1 or 2, wherein the exhaust hood includes a side portion that is inclined with respect to the vertical direction. (4) The coating device according to any one of claims 1 to 3, wherein the opening portion is a circumferential gap having a thickness of 10-odd millimeters or less. (5) The coating device according to any one of claims 1 to 3, wherein the opening portion has a configuration in which a large number of holes each having a diameter of 10-odd millimeters or less are arranged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10116190U JPH0457279U (en) | 1990-09-27 | 1990-09-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10116190U JPH0457279U (en) | 1990-09-27 | 1990-09-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0457279U true JPH0457279U (en) | 1992-05-15 |
Family
ID=31844381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10116190U Pending JPH0457279U (en) | 1990-09-27 | 1990-09-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0457279U (en) |
-
1990
- 1990-09-27 JP JP10116190U patent/JPH0457279U/ja active Pending
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