JPH0456799A - Plating solution circulating device for continuous electroplating device - Google Patents
Plating solution circulating device for continuous electroplating deviceInfo
- Publication number
- JPH0456799A JPH0456799A JP16277790A JP16277790A JPH0456799A JP H0456799 A JPH0456799 A JP H0456799A JP 16277790 A JP16277790 A JP 16277790A JP 16277790 A JP16277790 A JP 16277790A JP H0456799 A JPH0456799 A JP H0456799A
- Authority
- JP
- Japan
- Prior art keywords
- plating solution
- return pipe
- control valve
- plating
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007747 plating Methods 0.000 title claims abstract description 128
- 238000009713 electroplating Methods 0.000 title claims description 6
- 230000006835 compression Effects 0.000 claims description 11
- 238000007906 compression Methods 0.000 claims description 11
- 238000007598 dipping method Methods 0.000 abstract 1
- 239000007788 liquid Substances 0.000 description 47
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 11
- 229910052742 iron Inorganic materials 0.000 description 5
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- -1 iron ions Chemical class 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910001335 Galvanized steel Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000008397 galvanized steel Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electroplating Methods And Accessories (AREA)
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
本発明は、表面処理液、特に電気めっき液等をめっき槽
とめっき・液循環槽との間を循環して使用する際の復路
におけるめっき液の劣化を防止した連続電気めっき装置
におけるめっき液循環装置に関するものである。[Detailed Description of the Invention] <Industrial Application Field> The present invention is applicable to plating on the return trip when a surface treatment solution, especially an electroplating solution, etc. is circulated between a plating tank and a plating/liquid circulation tank. The present invention relates to a plating solution circulation device in a continuous electroplating apparatus that prevents deterioration of the solution.
〈従来の技術〉
めっき液を循環させる典型的な例は特開昭57−198
298号公報にも示されているように第9図のようなも
のである。第9図において、鋼板1は対をなす通電ロー
ル5とバンクアップロール6間を通過するときに通電さ
れ、ダムロール7を介してめっき液槽2内に配設された
電極4間を通電する間に電気めっきを施される。めっき
液は、下部めっき液i原種8より送液管IO上に配設し
た循環ポンプ9によってめっき装置のめっき液槽2に供
給され、めっき液槽2からオーバフローしためっき液1
2は、−旦上部めっき液受は槽3に溜められた後、めっ
き液戻り管11を流下し、下部の循環タンク8に集めら
れる。<Prior art> A typical example of circulating a plating solution is disclosed in Japanese Patent Application Laid-open No. 57-198.
As shown in Japanese Patent No. 298, it is as shown in FIG. In FIG. 9, the steel plate 1 is energized when passing between a pair of current-carrying rolls 5 and bank-up rolls 6, and electricity is being applied between the electrodes 4 disposed in the plating solution tank 2 via the dam rolls 7. is electroplated. The plating solution is supplied from the lower plating solution i source 8 to the plating solution tank 2 of the plating apparatus by a circulation pump 9 disposed on the liquid supply pipe IO, and the plating solution 1 overflowing from the plating solution tank 2 is
2, - After the upper plating solution reservoir is stored in the tank 3, it flows down the plating solution return pipe 11 and is collected in the lower circulation tank 8.
このようにめっき液12を循環させる目的は、めっ゛き
に供する金属イオンをめっき装置に供給するためで、め
っき液循環槽8には、図示していない金属イオン供給装
置によりめっきに供する金属イオンが補給されるように
なっており、めっき液12を循環することによって常に
フレンシュなめっき液をめっき装置に供給するようにな
っている。The purpose of circulating the plating solution 12 in this way is to supply metal ions for plating to the plating apparatus. Ions are replenished, and by circulating the plating solution 12, a fresh plating solution is constantly supplied to the plating apparatus.
ところで、近年、塗装性向上のために亜鉛めっき等を施
しためっき鋼板1に対して鉄系の金属を電気めっきする
ことが多くなってきているが、第9図に示しためっき液
循環装置では次のような不具合が生している。すなわち
、めっき液12中に含まれているめっきに供する鉄イオ
ン(Fe”)がめつき液循環中に酸化され、Fe”に変
わることにより、[e2゛供給のために余分の薬剤を必
要とするばかりか、p e 3 +が増加することによ
って外観不良等のめっき品質の劣化を招くことになる。By the way, in recent years, galvanized steel sheets 1 have been increasingly electroplated with iron-based metals to improve paintability, but the plating solution circulation system shown in FIG. The following problems occur. That is, the iron ions (Fe") contained in the plating solution 12 and used for plating are oxidized during the circulation of the plating solution and changed to Fe", which requires extra chemicals to supply [e2]. Moreover, an increase in p e 3 + leads to deterioration in plating quality such as poor appearance.
現状では、Fe”をFe”に還元するために、電解還元
装置等の高価な設備を設けて対応しているのが実状であ
る。この主たる原因としては、めっき液循環中に鉄イオ
ンが空気と接触し酸化を招いていることが挙げられる。At present, in order to reduce Fe'' to Fe'', expensive equipment such as an electrolytic reduction device is provided. The main reason for this is that iron ions come into contact with air during the circulation of the plating solution, causing oxidation.
特に、循環槽8への戻り管11においては、めっき液1
2がめつき装置よりグラビテイ (重力)で循環タンク
8に戻るために戻り管11の垂直管部分において多量の
空気巻き込みが発生しており、その際に著しい酸化の発
生が避Uられないという問題点がある。In particular, in the return pipe 11 to the circulation tank 8, the plating solution 1
2 is returned to the circulation tank 8 by gravity from the plating device, so a large amount of air is entrained in the vertical pipe portion of the return pipe 11, and at this time, the problem is that significant oxidation is unavoidable. There is.
〈発明が解決しようとする課題〉
本発明の目的は、めっき液循環式連続電気めっき装置に
おいて、戻り管を流れるめっき液の空気巻き込みを防止
しひいてはめっき液中の鉄イオンの酸化を防止する装置
を擢案するものである。<Problems to be Solved by the Invention> An object of the present invention is to provide a device for preventing air entrainment in the plating solution flowing through the return pipe, and thereby preventing oxidation of iron ions in the plating solution, in a plating solution circulation type continuous electroplating device. This is what we propose.
〈課題を解決するための手段〉
本発明は戻り管内にめっき液を充満させて空気の巻き込
みを防止するのが有効であるとの着想のもとに種々検討
を重ねた結果により達成されたものであり、その要旨と
するところは下記の通りである。<Means for Solving the Problems> The present invention was achieved as a result of various studies based on the idea that it is effective to fill the return pipe with plating solution to prevent air entrainment. The gist of this is as follows.
本発明はめっき液槽からオーバフローしためっき液を受
ける上部めっき液受は槽と、前記めっき液槽に供給する
めっき液を貯蔵する下部めっき液循環槽とを該めっき液
が循環可能なようにめっき液戻り管にて連結した連続め
っき装置におけるめっき液循環装置であって、前記めっ
き液戻り管をその下端部が前記めっき液循環槽内のめっ
き液に浸漬するように設けると共に、該めっき液戻り管
の下端部に前記上部めっき液受は槽のめっき液レベルに
よって開閉される流量制御弁を設け、前記めっき液戻り
管内にめっき液を常に充満させることができるようにし
たことを特徴とする連続電気めっき装置におけるめっき
液循環装置である。In the present invention, the upper plating solution receiver that receives the plating solution overflowing from the plating solution tank is arranged so that the plating solution can be circulated between the tank and the lower plating solution circulation tank that stores the plating solution to be supplied to the plating solution tank. A plating solution circulation device in a continuous plating apparatus connected by a solution return pipe, wherein the plating solution return pipe is provided so that its lower end is immersed in the plating solution in the plating solution circulation tank, and the plating solution return pipe is connected by a plating solution return pipe. The upper plating solution receiver is provided at the lower end of the pipe with a flow control valve that is opened and closed depending on the plating solution level in the tank, so that the plating solution return pipe can always be filled with the plating solution. This is a plating solution circulation device in an electroplating device.
本発明のめっき液循環装置番こおいては、めっき液戻り
管の下端部にオリフィス弁座を設ける一方、上方に案内
ガイドが連結されると共に小孔を有するオリフィス流量
制御弁を設け、該流量制御弁を前記オリフィス弁座と東
向ガイドとの間に配置した圧縮コイルばねで前記オリフ
ィス弁座の下方から密着可能に設けるか、または、めっ
き液戻り管の下端部に小孔を設けたオリフィス弁座を設
ける重力、上部めっき液受は槽内に配置したフロートと
流量制御弁とをチエンで連結し、該流量制御弁を前記オ
リフィス弁座の上方から密着可能に設けるようにするの
が好適である。In the plating solution circulation device of the present invention, an orifice valve seat is provided at the lower end of the plating solution return pipe, and an orifice flow rate control valve connected to a guide and having a small hole is provided above. The control valve is provided so that it can be tightly contacted from below the orifice valve seat with a compression coil spring placed between the orifice valve seat and the eastward guide, or the orifice valve is provided with a small hole in the lower end of the plating solution return pipe. It is preferable that the upper plating liquid receiver is connected by a chain to a float placed in the tank and that the flow rate control valve is provided so as to be able to come in close contact with it from above the orifice valve seat. be.
〈作用〉
めっき液戻り管の下端部に設けた流量制御弁を上部めっ
き液受は槽のめっき液レベルによって開閉制御するので
、めっき液戻り管内には常にめっき液が充満した状態に
保持される。その結果、戻り管の垂直部分における空気
の巻き込みが防止されめっき液中の鉄イオンの酸化を解
消することができる。<Function> The flow control valve installed at the lower end of the plating solution return pipe opens and closes the upper plating solution receiver depending on the plating solution level in the tank, so the plating solution return pipe is always kept full of plating solution. . As a result, entrainment of air in the vertical portion of the return pipe is prevented, and oxidation of iron ions in the plating solution can be eliminated.
〈実施例〉
以下、本発明の構成および作用を実施例に基いて詳細に
説明する。<Examples> Hereinafter, the structure and operation of the present invention will be explained in detail based on examples.
本発明の一実施例を第1図乃至第3図に基いて説明する
と、本発明の特徴は、めっき液戻り管11の下端部を下
部めっき液循環タンク8内の液中に浸漬させ、その先端
にめっき液戻り管11内の液充満高さに応じて戻り液量
を自動調節する流量制御弁16を取付けることにより、
常に戻り管11内にめっき液を充満させるようにしたこ
とにある。An embodiment of the present invention will be described based on FIGS. 1 to 3. The feature of the present invention is that the lower end of the plating solution return pipe 11 is immersed in the solution in the lower plating solution circulation tank 8. By installing a flow control valve 16 at the tip of the plating solution return pipe 11, which automatically adjusts the amount of the return liquid according to the liquid filling height in the plating solution return pipe 11,
This is because the return pipe 11 is always filled with plating solution.
13は、流量制御I弁16のケースで、戻り管11の一
部をなすもので戻り管11とはフランジ接続される。Reference numeral 13 denotes a case of a flow rate control I valve 16, which forms a part of the return pipe 11 and is connected to the return pipe 11 by a flange.
流量制御弁16は、ケース13の下端に設けたオリフィ
ス弁座18との組合せにより円錐座と弁を構成する。ち
なみに、流量制御弁16に設けられている小穴20は液
排出孔で液循環停止時に戻り管11内に残る液を排出す
るためのものである。15は、流量制御弁16を垂直に
作動させるための案内ガイドである。その平面形状は、
第3図に示すような形状をしており、案内ガイド15は
“’A1″なる受圧面積を有している。14は、流量制
御弁16と案内ガイド15を接続するためのボルトであ
る。The flow control valve 16 is combined with an orifice valve seat 18 provided at the lower end of the case 13 to form a conical seat and a valve. Incidentally, the small hole 20 provided in the flow rate control valve 16 is a liquid discharge hole for draining the liquid remaining in the return pipe 11 when the liquid circulation is stopped. 15 is a guide for operating the flow control valve 16 vertically. Its planar shape is
The guide 15 has a shape as shown in FIG. 3, and has a pressure receiving area of "'A1". 14 is a bolt for connecting the flow control valve 16 and the guide 15.
また、17は、圧縮コイルばねで、オリフィス弁座18
と案内ガイド15との間にセットされ、調整ナラ目9に
より初期セット荷重(Wc)が変えられるようになって
おり、流量制御弁16に作用する液圧が初期セット荷重
(Wc)に至るまで流量制御弁16をオリフィス弁座1
8に下方から密着させる作用をなす。第4図に、圧縮コ
イルばねの荷重Wとたわみ(δ)との特性を示す。Further, 17 is a compression coil spring, and the orifice valve seat 18
and the guiding guide 15, and the initial set load (Wc) can be changed by the adjustment slot 9, until the hydraulic pressure acting on the flow control valve 16 reaches the initial set load (Wc). The flow control valve 16 is connected to the orifice valve seat 1.
8 from below. FIG. 4 shows the characteristics of the load W and deflection (δ) of the compression coil spring.
次に、本発明による装置の作用について説明する。Next, the operation of the device according to the present invention will be explained.
めっき液12の循環時に戻り管11においてめっき81
2を充満させるということは、下部循環タンク8内の液
面と戻り管内11の液面にレベル差を設けるということ
であるから、そのレベル差に見合うだけの背圧が作用す
るようにすればよい。本発明は、この点に着目したもの
で、先にも述べたように、戻り管11の下端部に流量制
御弁16を取り付けることによって目的を達成しようと
するものである。Plating 81 occurs in the return pipe 11 during circulation of the plating solution 12.
Filling the tank 2 means creating a level difference between the liquid level in the lower circulation tank 8 and the liquid level in the return pipe 11, so if a back pressure corresponding to the level difference is applied, good. The present invention focuses on this point, and as described above, attempts to achieve the objective by attaching the flow control valve 16 to the lower end of the return pipe 11.
まず戻り管ll内に液が充満していない状態では、流量
制御弁16は、圧縮フィルばね17の反力によって、オ
リフィス弁座18と下方から密着するようになっており
、循環タンク8へ戻る流量は、小穴20を通過する液量
のみである。この小穴20を通過する流量は、戻り管1
1内に液が充満した状態(すなわち、水頭差が大きく、
最も排出流量が多い状態)においても循環ポンプ9によ
る循環流量と比べると非常に少ない量である。First, when the return pipe ll is not filled with liquid, the flow rate control valve 16 comes into close contact with the orifice valve seat 18 from below due to the reaction force of the compressed fill spring 17, and returns to the circulation tank 8. The flow rate is only the amount of liquid passing through the small hole 20. The flow rate passing through this small hole 20 is
1 is filled with liquid (i.e., the water head difference is large,
Even in the state where the discharge flow rate is the highest, the amount is very small compared to the circulation flow rate by the circulation pump 9.
したがって、流量制御弁16が閉の状態では、循環流量
のすべてを排出する能力が無いことから、戻り管11内
においては、徐々に液面が上昇していくことになる。そ
れに従い、流量制御弁16の受圧力は大きくなり、圧縮
コイルばね17の初期セット荷重(Wc)を越えると流
量制御弁16は開きはじめる。流量制御弁16が開くと
案内ガイド15との間のケース13内圧力は、Wi環タ
ンク8内の液位により加わる圧力と等しくなるわけであ
るが、それにかわって、案内ガイド15の上面面積”A
I”が受圧面となり、その受圧力が作用することによっ
て圧縮コイルばね17の圧縮量が増加するため、戻り管
11内の液位が上昇するにしたがい流量制御弁16の開
度(L)は段々大きくなる。また、それに伴い、排出さ
れる液量(Q)も多くなる。その関係式は次の通りであ
る。Therefore, when the flow rate control valve 16 is closed, there is no ability to discharge all of the circulating flow rate, so the liquid level in the return pipe 11 gradually rises. Accordingly, the pressure received by the flow control valve 16 increases, and when the initial set load (Wc) of the compression coil spring 17 is exceeded, the flow control valve 16 begins to open. When the flow rate control valve 16 opens, the internal pressure of the case 13 between it and the guide guide 15 becomes equal to the pressure applied by the liquid level in the Wi ring tank 8, but instead, the upper surface area of the guide guide 15 increases. A
I" becomes a pressure receiving surface, and the amount of compression of the compression coil spring 17 increases due to the receiving pressure, so as the liquid level in the return pipe 11 rises, the opening degree (L) of the flow rate control valve 16 increases. It gradually becomes larger. In addition, the amount of liquid discharged (Q) also increases accordingly. The relational expression is as follows.
Q=CπDL (2gH)”
C;流量係数
D;オリフィスプレート穴径
L;弁開度(リフ目1
g;重力加速度
H、液充満高さ
第5図に、この流量制御弁16によるめっき液12の液
充満高さ(H)とめっき液12の排液流量(Q)との関
係を示す。第5図において、Hcは、流量制御弁16が
開き始める液充満高さを示す、また、Hl、H2は、通
常のめっき液循環時における液充満高さの上限、および
下限を示す(第1図参照)。すなわち液充満高さがHc
に至るまでは流量制御弁16が閉止しているため流量制
御弁16に設けられている小穴20より排出されるだけ
であるが、Hcを越えると流量制御弁16が開いてくる
ため、上式に示す流量Qが排出され、急激にめっき液1
2の排液量は多くなる。この排液流量特性は1.流量制
御弁1Gの開度L、すなわち圧縮コイルばね17のばね
特性により決定される。いま、循環流量のばらつきがわ
かっているとすると液充満高さの上限H1をめっき受は
槽3より循環液がオーバーフローしない高さ、下限H2
を戻り管にめっき液が充満する高さとなるよう圧縮コイ
ルばねの特性を考慮すれば戻り管11内には常にめっき
液12が充満した状態に保持することができる。Q=CπDL (2gH)” C; Flow coefficient D; Orifice plate hole diameter L; Valve opening degree (lift 1 g; gravitational acceleration H, liquid filling height. 5 shows the relationship between the liquid filling height (H) of the plating solution 12 and the draining liquid flow rate (Q) of the plating solution 12. In FIG. , H2 indicate the upper and lower limits of the liquid filling height during normal plating solution circulation (see Figure 1).That is, the liquid filling height is Hc.
Until Hc is reached, the flow control valve 16 is closed, so the discharge is only through the small hole 20 provided in the flow control valve 16, but when Hc is exceeded, the flow control valve 16 opens, so the above equation The flow rate Q shown in is discharged, and suddenly plating solution 1
The amount of drained fluid in case 2 will be large. This drainage flow rate characteristic is 1. It is determined by the opening degree L of the flow control valve 1G, that is, the spring characteristics of the compression coil spring 17. Now, assuming that the variation in the circulating flow rate is known, the upper limit H1 of the liquid filling height is the height at which the plating receiver does not overflow the circulating liquid from tank 3, and the lower limit H2.
If the characteristics of the compression coil spring are taken into account so that the height of the return pipe is such that the return pipe is filled with the plating solution, the return pipe 11 can be kept filled with the plating solution 12 at all times.
次に本発明の他の一実施例を図面に基いて説明すると第
6図および第7図に示すように戻り管11に流量制御弁
16’を設け、めっき液循環中において、上部めっき受
は槽3内の液面レベルを一定に保つようコントロールす
ることにより、常に戻り管ll内にめっき液を充満させ
るようにしたことにある。Next, another embodiment of the present invention will be described based on the drawings. As shown in FIGS. 6 and 7, a flow rate control valve 16' is provided in the return pipe 11, and during the circulation of the plating solution, the upper plating receiver is By controlling the liquid level in the tank 3 to keep it constant, the return pipe 11 is always filled with the plating solution.
21は、フロートで、その下部にチエン22を介して流
量制御弁16′を釣り下げる形で接続している。21 is a float, and a flow control valve 16' is connected to the lower part of the float via a chain 22 in a hanging manner.
流量制御弁16’は、オリフィス弁座18′との組合わ
せにより円錐座と弁を構成している。ちなみに、オリフ
ィス弁座1B’に設けられている複数の小穴20’は液
排出孔で、その作用については後述する。The flow control valve 16' constitutes a conical seat and valve in combination with an orifice valve seat 18'. Incidentally, the plurality of small holes 20' provided in the orifice valve seat 1B' are liquid discharge holes, and the function thereof will be described later.
15′は、流量制御弁16′を垂直に作動させるための
案内ガイドである。15' is a guide for vertically operating the flow control valve 16'.
次に、本発明による装置の作用について説明する。めっ
き液循環時に戻り管11において液を充満させるという
ことは、循環タンク8内の液面と戻り管ll内のめっき
液液面に一定のレベル差を維持しながら循環液量が排出
できるようにすればよいということである。本発明は、
この点に着目したもので、簡単な装置を戻り管11に具
備することによってその目的を達成しようとするもので
ある6戻り管ll内にめっき液12が充満していない状
態では、フロート21は、めっき液受は槽3に着地した
状態となり、それに伴い、流量制御弁16は、自重によ
ってオリフィス弁座18′と上方から密着するようにな
っており、循環タンク8へ戻る液量は、小穴20′を通
過する液量のみである。この小穴20′の径、および個
数は、次のように決定される。すなわち、小穴20′に
よる排出流量(Q6)は、めっき液受は槽3内の液面レ
ベルと循環タンク8内との液面レベル差(H)によって
次式により決まるのは前述実施例と同様である。Next, the operation of the device according to the present invention will be explained. Filling the return pipe 11 with liquid during circulation of the plating solution means that the amount of circulating liquid can be discharged while maintaining a constant level difference between the liquid level in the circulation tank 8 and the plating liquid level in the return pipe ll. That means you can do it. The present invention
Focusing on this point, the purpose is to be achieved by equipping the return pipe 11 with a simple device.6 When the return pipe 11 is not filled with the plating solution 12, the float 21 is , the plating liquid receiver is in a state where it has landed in the tank 3, and accordingly, the flow rate control valve 16 comes into close contact with the orifice valve seat 18' from above due to its own weight, and the amount of liquid returning to the circulation tank 8 is controlled by the small hole. 20'. The diameter and number of the small holes 20' are determined as follows. That is, the discharge flow rate (Q6) through the small hole 20' is determined by the following formula based on the difference (H) between the liquid level in the tank 3 and the circulation tank 8 in the plating liquid receiver, as in the previous embodiment. It is.
Qa =Ca ’ A++ ’ (2・g−H)
0・’Cd ;流量係数
A4 i小穴断面積台1↑−π/4・d”−n(n;
小穴個数)
g;重力加速度
H;液充満高さ
ここで、本発明による装置では、Q4が循環ポンプ9に
よる循環流量に対して若干小さい流量となるように小穴
断面積合計(A4)を決定している。これは、循環流量
の大部分をこの小穴20′より排出させ、フロート式の
流量制御弁16′の開閉による流量調整範囲を小さくす
ることにより、流量制御弁16′の8環流量変動に対す
る追従性を良くすることを目的としている。また、当8
亥めっき液v8環装置において異種のめっき液を取り扱
う場合、互いの液が混入すると品質上の問題を生じるこ
とがあるため、液循環停止時に戻り管内に残る液をすべ
て排出する作用もなす。Qa = Ca 'A++' (2・g−H)
0・'Cd; Flow coefficient A4 i Small hole cross-sectional area table 1↑−π/4・d”−n(n;
(number of small holes) g; gravitational acceleration H; liquid filling height Here, in the device according to the present invention, the total cross-sectional area of the small holes (A4) is determined so that Q4 is a slightly smaller flow rate than the circulation flow rate by the circulation pump 9. ing. By discharging most of the circulating flow through this small hole 20' and reducing the flow rate adjustment range by opening and closing the float-type flow control valve 16', the flow control valve 16' is able to follow the 8-ring flow rate fluctuation. The purpose is to improve. Also, the 8th
When handling different types of plating solutions in the Plating Solution V8 ring device, quality problems may occur if the solutions mix with each other, so it also serves to drain all the solution remaining in the return pipe when the solution circulation is stopped.
したがって、流量制御弁16’が閉の状態では、循環流
量のすべてを排出する能力が無いことから、戻り管ll
内においては、徐々に液面が上昇していくことになる。Therefore, when the flow rate control valve 16' is closed, there is no ability to discharge all of the circulating flow rate, so the return pipe ll
Inside, the liquid level will gradually rise.
そして、ついには戻り管11の上端部を越え、めっき液
受は槽3の下部に液が滞留することになる。それに従い
、液面レベル差”H″による液圧が作用することによっ
て、流量制御弁16′上面の受圧力は大きくなっていく
が、一方、フロート21についてみれば、徐々に液中に
埋没することになり、流量制御弁16′を持ち上げよう
とする浮力を生じることになる。そして、その浮力が下
方向の荷重、すなわち、流量制御弁16′に対する受圧
力とチエン22、案内ガイド15′、流量制御弁16′
およびフロート21の自重の和より大きくなるとフロー
ト21は浮き上がり、流量制御弁16’が持ち上げられ
てオリフィス弁座18′に設けられたオリフィス穴23
より液が排出されることになる。Finally, the liquid exceeds the upper end of the return pipe 11 and the plating liquid receptacle accumulates in the lower part of the tank 3. Accordingly, the pressure received by the upper surface of the flow control valve 16' increases due to the hydraulic pressure caused by the liquid level difference "H", but on the other hand, the float 21 gradually becomes submerged in the liquid. This results in a buoyant force that tends to lift the flow control valve 16'. The buoyant force is the downward load, that is, the receiving pressure on the flow control valve 16', the chain 22, the guide 15', and the flow control valve 16'.
When the weight exceeds the sum of the weight of the float 21 and the weight of the float 21, the float 21 floats up, and the flow control valve 16' is lifted up to open the orifice hole 23 provided in the orifice valve seat 18'.
More liquid will be drained.
その後、めっき受は槽3の液位が上昇するにしたがい弁
体16の開度(L)は段々大きくなり、それに伴い、排
出される流量(Q、)も多くなる。その関係式は次の通
りである。Thereafter, as the liquid level in the tank 3 rises, the opening degree (L) of the valve body 16 gradually increases, and the discharged flow rate (Q,) increases accordingly. The relational expression is as follows.
Q、=c、 ・π・D・L・ (2・g、H)o、s
co ;流量係数
D;オリフィス弁座穴径
L;弁開度(リフト量)
g;重力加速度
H;液充満高さ
旧式をみて明らかなように、排出される流量(Ql )
は、流量制御弁16′の弁開度(L)に比例するため、
弁開度が大きいほど、すなわちフロート21が上方に浮
き上がるほど排出流量(Q、)は大きくなるが、排出流
量(Q、)が(wI環流量Q、)よりも大きくなると戻
り管11内の液量が減っていくことから、めっき液充満
高さ(H)が徐々に下がることになるため、それに伴い
、弁開度(L)も小さくなり、排出流量(Qゎ)も減少
していく。このことから、弁開度(L)は、排出流量(
Q、)と(循環流量−Q4)とがバランスする開度で安
定することになる。すなわち、本発明による装置によれ
ば、めっき液循環中において、常に戻り管内に液を充満
させながら循環流量を排出することが可能となる。Q, = c, ・π・D・L・ (2・g, H) o, s
co; flow coefficient D; orifice valve seat hole diameter L; valve opening degree (lift amount) g; gravitational acceleration H; liquid filling height As is clear from the old model, the discharged flow rate (Ql)
is proportional to the valve opening (L) of the flow control valve 16',
The larger the valve opening degree is, that is, the higher the float 21 floats, the larger the discharge flow rate (Q,) becomes. However, when the discharge flow rate (Q,) becomes larger than the (wI recirculation flow rate Q,), the liquid in the return pipe 11 Since the amount decreases, the plating solution filling height (H) gradually decreases, and accordingly, the valve opening degree (L) also decreases and the discharge flow rate (Qゎ) also decreases. From this, the valve opening degree (L) is determined by the discharge flow rate (
The opening is stabilized at a balance between Q, ) and (circulation flow rate -Q4). That is, according to the apparatus according to the present invention, during the circulation of the plating solution, it is possible to discharge the circulating flow rate while always filling the return pipe with the solution.
ここで、循環流量が多い場合には、スペース的な制約等
により小穴20′のサイズを大きくとれず、排出する流
量を所要流量にできない場合もあるが、その場合には、
第8図に示すような複数の戻り管11、 llaを設け
、循環流量の大部分をもう一本の戻り管より排出するよ
うにすることもできる。Here, if the circulating flow rate is large, the size of the small hole 20' cannot be made large due to space constraints, etc., and the discharged flow rate may not be able to reach the required flow rate.
It is also possible to provide a plurality of return pipes 11, lla as shown in FIG. 8 and to discharge most of the circulating flow through the other return pipe.
〈発明の効果〉
以上示したように、本発明によれば簡単な構造の液排出
弁を戻り管の末端に取り付けることにより、戻り管内に
液を充満させることができ、空気巻き込みの発生を防止
できる。したがって、空気巻き込みによるめっき液の酸
化が防止でき、めっき液の薬剤投入量が低減できるばか
りでなく、めっき品質9を維持するためのFe’°還元
装置の能力も小さなもので対応でき、設備費の大幅な削
減が可能となる。<Effects of the Invention> As described above, according to the present invention, by attaching a liquid discharge valve with a simple structure to the end of the return pipe, the return pipe can be filled with liquid, and air entrainment can be prevented. can. Therefore, oxidation of the plating solution due to air entrainment can be prevented, and the amount of chemicals input into the plating solution can be reduced.In addition, the capacity of the Fe'° reduction device to maintain plating quality 9 can be reduced, making it possible to reduce equipment costs. It is possible to significantly reduce the
第1図は本発明の一実施例に係る装置の全体を示す概略
断面図、第2図は第1図のA部を示す部分拡大図、第3
図は第2図のB−B矢視を示す平面図、第4図は圧縮コ
イルばねの荷重とたわみの関係を示すグラフ、第5図は
本発明に係る流量制御弁によるめっき液充満高さと、め
っき液排液流量との関係を示すグラフ、第6図は本発明
の他の一実施例に係る装置の全体を示す概略断面図、第
7図は第6図のA部を示す部分拡大図、第8図は第6図
の変形例に係る装置の全体を示す概略断面図、第9図は
従来例に係る装置の全体を示す概略断面図である。
1・・・綱板、 2・・・めっき液槽、3・・
・めっき液受は槽、4・・・電極、5・・・通電ロール
、 6・・・バックアップロール、7・・・ダムロー
ル、 8・・・めっき液循環タンク、9・・・めっ
き液循環ポンプ、lO・・・送液管、11・・・戻り管
、 12・・・めっき液、13・・・ケース、
14・・・ボルト、15・・・案内ガイド、
16−・・流量制御弁、17・・・圧縮コイルバネ、
18・・・オリフィス弁座、19・・・調整ナツト、
20・・・小孔、21・・・フロート、 22
・・・チェ7.23・・・オリフィス穴・FIG. 1 is a schematic sectional view showing the entire device according to an embodiment of the present invention, FIG. 2 is a partially enlarged view showing part A in FIG. 1, and FIG.
The figure is a plan view taken along arrow B-B in Fig. 2, Fig. 4 is a graph showing the relationship between the load and deflection of the compression coil spring, and Fig. 5 is a graph showing the relationship between the plating solution filling height and the flow rate control valve according to the present invention. , a graph showing the relationship with the plating solution drainage flow rate, FIG. 6 is a schematic sectional view showing the entire apparatus according to another embodiment of the present invention, and FIG. 7 is a partial enlarged view showing part A in FIG. 6. 8 are schematic cross-sectional views showing the entire apparatus according to a modification of FIG. 6, and FIG. 9 is a schematic cross-sectional view showing the entire apparatus according to the conventional example. 1... Steel plate, 2... Plating solution tank, 3...
- Plating solution receiver is tank, 4... electrode, 5... energizing roll, 6... backup roll, 7... dam roll, 8... plating solution circulation tank, 9... plating solution circulation pump , lO...Liquid sending pipe, 11...Return pipe, 12...Plating solution, 13...Case,
14... Bolt, 15... Guidance guide,
16-...Flow control valve, 17...Compression coil spring,
18... Orifice valve seat, 19... Adjustment nut,
20...Small hole, 21...Float, 22
...Che7.23...Orifice hole・
Claims (1)
上部めっき液受け槽と、前記めっき液槽に供給するめっ
き液を貯蔵する下部めっき液循環槽とを該めっき液が循
環可能なようにめっき液戻り管にて連結した連続めっき
装置におけるめっき液循環装置であって、前記めっき液
戻り管をその下端部が前記めっき液循環槽内のめっき液
に浸漬するように設けると共に、該めっき液戻り管の下
端部に前記上部めっき液受け槽のめっき液レベルによっ
て開閉される流量制御弁を設け、前記めっき液戻り管内
にめっき液を常に充満させることができるようにしたこ
とを特徴とする連続電気めっき装置におけるめっき液循
環装置。 2、めっき液戻り管の下端部にオリフィス弁座を設ける
一方、上方に案内ガイドが連結されると共に小孔を有す
るオリフィス流量制御弁を設け、該流量制御弁を前記オ
リフィス弁座と案内ガイドとの間に配置した圧縮コイル
ばねで前記オリフィス弁座の下方から密着可能に設けて
なる請求項1記載のめっき液循環装置。 3、めっき液戻り管の下端部に小孔を設けたオリフィス
弁座を設ける一方、上部めっき液受け槽内に配置したフ
ロートと流量制御弁とをチエンで連結し、該流量制御弁
を前記オリフィス弁座の上方から密着可能に設けてなる
請求項1記載のめっき液循環装置。[Claims] 1. The plating solution can be circulated between an upper plating solution receiving tank that receives plating solution overflowing from the plating solution tank and a lower plating solution circulation tank that stores the plating solution supplied to the plating solution tank. A plating solution circulation device in a continuous plating apparatus connected by a plating solution return pipe as described above, wherein the plating solution return pipe is provided so that its lower end is immersed in the plating solution in the plating solution circulation tank, A flow control valve that is opened and closed depending on the plating solution level in the upper plating solution receiving tank is provided at the lower end of the plating solution return pipe, so that the plating solution return pipe can always be filled with plating solution. Plating solution circulation device in continuous electroplating equipment. 2. An orifice valve seat is provided at the lower end of the plating solution return pipe, and an orifice flow control valve connected to the guide guide and having a small hole is provided above, and the flow control valve is connected to the orifice valve seat and the guide guide. 2. The plating solution circulation device according to claim 1, wherein said orifice valve seat is provided in close contact with said orifice valve seat from below by a compression coil spring disposed between said orifice valve seats. 3. An orifice valve seat with a small hole is provided at the lower end of the plating solution return pipe, and a chain connects the float placed in the upper plating solution receiving tank to the flow control valve, and the flow control valve is connected to the orifice. The plating solution circulation device according to claim 1, wherein the plating solution circulation device is provided so as to be able to come into close contact with the valve seat from above.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16277790A JPH0456799A (en) | 1990-06-22 | 1990-06-22 | Plating solution circulating device for continuous electroplating device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16277790A JPH0456799A (en) | 1990-06-22 | 1990-06-22 | Plating solution circulating device for continuous electroplating device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0456799A true JPH0456799A (en) | 1992-02-24 |
Family
ID=15761021
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16277790A Pending JPH0456799A (en) | 1990-06-22 | 1990-06-22 | Plating solution circulating device for continuous electroplating device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0456799A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05331686A (en) * | 1992-06-01 | 1993-12-14 | Kawasaki Steel Corp | High-speed electrolytic treatment device for metallic strip |
WO2004033763A1 (en) * | 2002-10-11 | 2004-04-22 | Electroplating Engineers Of Japan Limited | Cup type plating equipment |
JP2010121185A (en) * | 2008-11-20 | 2010-06-03 | C Uyemura & Co Ltd | Method of controlling treating liquid by treating liquid apparatus |
KR20140075637A (en) * | 2012-12-11 | 2014-06-19 | 램 리써치 코포레이션 | Bubble and foam solutions using a completely immersed air-free feedback flow control valve |
KR20150084780A (en) * | 2012-11-16 | 2015-07-22 | 아토테크더치랜드게엠베하 | Device and method for the treatment of flat material to be treated |
US11585007B2 (en) | 2018-11-19 | 2023-02-21 | Lam Research Corporation | Cross flow conduit for foaming prevention in high convection plating cells |
-
1990
- 1990-06-22 JP JP16277790A patent/JPH0456799A/en active Pending
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05331686A (en) * | 1992-06-01 | 1993-12-14 | Kawasaki Steel Corp | High-speed electrolytic treatment device for metallic strip |
WO2004033763A1 (en) * | 2002-10-11 | 2004-04-22 | Electroplating Engineers Of Japan Limited | Cup type plating equipment |
US7179359B2 (en) * | 2002-10-11 | 2007-02-20 | Electroplating Engineers Of Japan, Ltd | Cup-shaped plating apparatus |
JP2010121185A (en) * | 2008-11-20 | 2010-06-03 | C Uyemura & Co Ltd | Method of controlling treating liquid by treating liquid apparatus |
KR20150084780A (en) * | 2012-11-16 | 2015-07-22 | 아토테크더치랜드게엠베하 | Device and method for the treatment of flat material to be treated |
JP2015535038A (en) * | 2012-11-16 | 2015-12-07 | アトーテヒ ドイッチュラント ゲゼルシャフト ミット ベシュレンクテル ハフツング | Apparatus and method for processing flat workpieces |
US9394622B2 (en) | 2012-11-16 | 2016-07-19 | Atotech Deutschland Gmbh | Device and method for the treatment of flat material to be treated |
JP2014132115A (en) * | 2012-12-11 | 2014-07-17 | Lam Research Corporation | Bubble and foam solution method using completely immersed air-free feedback flow control valve |
KR20140075637A (en) * | 2012-12-11 | 2014-06-19 | 램 리써치 코포레이션 | Bubble and foam solutions using a completely immersed air-free feedback flow control valve |
US10208395B2 (en) | 2012-12-11 | 2019-02-19 | Lam Research Corporation | Bubble and foam solutions using a completely immersed air-free feedback flow control valve |
JP2019031736A (en) * | 2012-12-11 | 2019-02-28 | ラム リサーチ コーポレーションLam Research Corporation | Bubble and foam solutions using a completely immersed air-free feedback flow control valve |
KR20210011469A (en) * | 2012-12-11 | 2021-02-01 | 램 리써치 코포레이션 | Bubble and foam solutions using a completely immersed air-free feedback flow control valve |
US11585007B2 (en) | 2018-11-19 | 2023-02-21 | Lam Research Corporation | Cross flow conduit for foaming prevention in high convection plating cells |
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