JPH0456749U - - Google Patents
Info
- Publication number
- JPH0456749U JPH0456749U JP10037490U JP10037490U JPH0456749U JP H0456749 U JPH0456749 U JP H0456749U JP 10037490 U JP10037490 U JP 10037490U JP 10037490 U JP10037490 U JP 10037490U JP H0456749 U JPH0456749 U JP H0456749U
- Authority
- JP
- Japan
- Prior art keywords
- suction head
- substrate
- holding device
- substrate holding
- detachment ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 230000005611 electricity Effects 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 230000003068 static effect Effects 0.000 claims 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10037490U JPH0726360Y2 (ja) | 1990-09-25 | 1990-09-25 | 基板保持装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10037490U JPH0726360Y2 (ja) | 1990-09-25 | 1990-09-25 | 基板保持装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0456749U true JPH0456749U (OSRAM) | 1992-05-15 |
| JPH0726360Y2 JPH0726360Y2 (ja) | 1995-06-14 |
Family
ID=31842979
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10037490U Expired - Lifetime JPH0726360Y2 (ja) | 1990-09-25 | 1990-09-25 | 基板保持装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0726360Y2 (OSRAM) |
-
1990
- 1990-09-25 JP JP10037490U patent/JPH0726360Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0726360Y2 (ja) | 1995-06-14 |