JPH0456331U - - Google Patents
Info
- Publication number
- JPH0456331U JPH0456331U JP9998690U JP9998690U JPH0456331U JP H0456331 U JPH0456331 U JP H0456331U JP 9998690 U JP9998690 U JP 9998690U JP 9998690 U JP9998690 U JP 9998690U JP H0456331 U JPH0456331 U JP H0456331U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- etching
- stage
- etching stage
- dry etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 6
- 238000001312 dry etching Methods 0.000 claims 2
- 239000007795 chemical reaction product Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9998690U JPH0456331U (is) | 1990-09-25 | 1990-09-25 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9998690U JPH0456331U (is) | 1990-09-25 | 1990-09-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0456331U true JPH0456331U (is) | 1992-05-14 |
Family
ID=31842299
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9998690U Pending JPH0456331U (is) | 1990-09-25 | 1990-09-25 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0456331U (is) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61236137A (ja) * | 1985-04-12 | 1986-10-21 | Hitachi Hokkai Semiconductor Kk | ウエハ処理装置 |
-
1990
- 1990-09-25 JP JP9998690U patent/JPH0456331U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61236137A (ja) * | 1985-04-12 | 1986-10-21 | Hitachi Hokkai Semiconductor Kk | ウエハ処理装置 |