JPH0455457B2 - - Google Patents
Info
- Publication number
- JPH0455457B2 JPH0455457B2 JP60012620A JP1262085A JPH0455457B2 JP H0455457 B2 JPH0455457 B2 JP H0455457B2 JP 60012620 A JP60012620 A JP 60012620A JP 1262085 A JP1262085 A JP 1262085A JP H0455457 B2 JPH0455457 B2 JP H0455457B2
- Authority
- JP
- Japan
- Prior art keywords
- polyimide resin
- soluble polyimide
- group
- diisocyanate
- formula
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229920001721 polyimide Polymers 0.000 claims description 46
- 239000009719 polyimide resin Substances 0.000 claims description 44
- -1 silane compound Chemical class 0.000 claims description 24
- 229910000077 silane Inorganic materials 0.000 claims description 20
- 239000000203 mixture Substances 0.000 claims description 18
- 125000004432 carbon atom Chemical group C* 0.000 claims description 7
- 125000000217 alkyl group Chemical group 0.000 claims description 5
- 125000000962 organic group Chemical group 0.000 claims description 5
- 125000004453 alkoxycarbonyl group Chemical group 0.000 claims description 3
- 125000003545 alkoxy group Chemical group 0.000 claims description 2
- 125000001183 hydrocarbyl group Chemical group 0.000 claims 1
- 239000011248 coating agent Substances 0.000 description 30
- 238000000576 coating method Methods 0.000 description 29
- 230000000052 comparative effect Effects 0.000 description 24
- 239000010408 film Substances 0.000 description 21
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 19
- 239000000758 substrate Substances 0.000 description 16
- 125000003118 aryl group Chemical group 0.000 description 12
- 229920005575 poly(amic acid) Polymers 0.000 description 11
- 239000011521 glass Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 239000002904 solvent Substances 0.000 description 8
- 239000003960 organic solvent Substances 0.000 description 7
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 6
- WFDIJRYMOXRFFG-UHFFFAOYSA-N Acetic anhydride Chemical compound CC(=O)OC(C)=O WFDIJRYMOXRFFG-UHFFFAOYSA-N 0.000 description 6
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- 150000004985 diamines Chemical class 0.000 description 6
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 4
- 125000002723 alicyclic group Chemical group 0.000 description 4
- 125000001931 aliphatic group Chemical group 0.000 description 4
- 125000005442 diisocyanate group Chemical group 0.000 description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- HLBLWEWZXPIGSM-UHFFFAOYSA-N 4-Aminophenyl ether Chemical compound C1=CC(N)=CC=C1OC1=CC=C(N)C=C1 HLBLWEWZXPIGSM-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 150000002430 hydrocarbons Chemical group 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 3
- 238000006798 ring closing metathesis reaction Methods 0.000 description 3
- 150000004756 silanes Chemical class 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- RFFLAFLAYFXFSW-UHFFFAOYSA-N 1,2-dichlorobenzene Chemical compound ClC1=CC=CC=C1Cl RFFLAFLAYFXFSW-UHFFFAOYSA-N 0.000 description 2
- HECLRDQVFMWTQS-RGOKHQFPSA-N 1755-01-7 Chemical compound C1[C@H]2[C@@H]3CC=C[C@@H]3[C@@H]1C=C2 HECLRDQVFMWTQS-RGOKHQFPSA-N 0.000 description 2
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 2
- RHRNYXVSZLSRRP-UHFFFAOYSA-N 3-(carboxymethyl)cyclopentane-1,2,4-tricarboxylic acid Chemical compound OC(=O)CC1C(C(O)=O)CC(C(O)=O)C1C(O)=O RHRNYXVSZLSRRP-UHFFFAOYSA-N 0.000 description 2
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 2
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 2
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 2
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 2
- VHRGRCVQAFMJIZ-UHFFFAOYSA-N cadaverine Chemical compound NCCCCCN VHRGRCVQAFMJIZ-UHFFFAOYSA-N 0.000 description 2
- MVPPADPHJFYWMZ-UHFFFAOYSA-N chlorobenzene Chemical compound ClC1=CC=CC=C1 MVPPADPHJFYWMZ-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 230000018044 dehydration Effects 0.000 description 2
- 238000006297 dehydration reaction Methods 0.000 description 2
- 239000012776 electronic material Substances 0.000 description 2
- 235000019441 ethanol Nutrition 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- NAQMVNRVTILPCV-UHFFFAOYSA-N hexane-1,6-diamine Chemical compound NCCCCCCN NAQMVNRVTILPCV-UHFFFAOYSA-N 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- RLSSMJSEOOYNOY-UHFFFAOYSA-N m-cresol Chemical compound CC1=CC=CC(O)=C1 RLSSMJSEOOYNOY-UHFFFAOYSA-N 0.000 description 2
- 125000000325 methylidene group Chemical group [H]C([H])=* 0.000 description 2
- 150000002989 phenols Chemical class 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- KIDHWZJUCRJVML-UHFFFAOYSA-N putrescine Chemical compound NCCCCN KIDHWZJUCRJVML-UHFFFAOYSA-N 0.000 description 2
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 2
- 125000006158 tetracarboxylic acid group Chemical group 0.000 description 2
- XFNJVJPLKCPIBV-UHFFFAOYSA-N trimethylenediamine Chemical compound NCCCN XFNJVJPLKCPIBV-UHFFFAOYSA-N 0.000 description 2
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 1
- AVQQQNCBBIEMEU-UHFFFAOYSA-N 1,1,3,3-tetramethylurea Chemical compound CN(C)C(=O)N(C)C AVQQQNCBBIEMEU-UHFFFAOYSA-N 0.000 description 1
- FDYWJVHETVDSRA-UHFFFAOYSA-N 1,1-diisocyanatobutane Chemical compound CCCC(N=C=O)N=C=O FDYWJVHETVDSRA-UHFFFAOYSA-N 0.000 description 1
- WSLDOOZREJYCGB-UHFFFAOYSA-N 1,2-Dichloroethane Chemical compound ClCCCl WSLDOOZREJYCGB-UHFFFAOYSA-N 0.000 description 1
- FKTHNVSLHLHISI-UHFFFAOYSA-N 1,2-bis(isocyanatomethyl)benzene Chemical compound O=C=NCC1=CC=CC=C1CN=C=O FKTHNVSLHLHISI-UHFFFAOYSA-N 0.000 description 1
- VGHSXKTVMPXHNG-UHFFFAOYSA-N 1,3-diisocyanatobenzene Chemical compound O=C=NC1=CC=CC(N=C=O)=C1 VGHSXKTVMPXHNG-UHFFFAOYSA-N 0.000 description 1
- WZCQRUWWHSTZEM-UHFFFAOYSA-N 1,3-phenylenediamine Chemical compound NC1=CC=CC(N)=C1 WZCQRUWWHSTZEM-UHFFFAOYSA-N 0.000 description 1
- OHLKMGYGBHFODF-UHFFFAOYSA-N 1,4-bis(isocyanatomethyl)benzene Chemical compound O=C=NCC1=CC=C(CN=C=O)C=C1 OHLKMGYGBHFODF-UHFFFAOYSA-N 0.000 description 1
- KJDRSWPQXHESDQ-UHFFFAOYSA-N 1,4-dichlorobutane Chemical compound ClCCCCCl KJDRSWPQXHESDQ-UHFFFAOYSA-N 0.000 description 1
- ALQLPWJFHRMHIU-UHFFFAOYSA-N 1,4-diisocyanatobenzene Chemical compound O=C=NC1=CC=C(N=C=O)C=C1 ALQLPWJFHRMHIU-UHFFFAOYSA-N 0.000 description 1
- CBCKQZAAMUWICA-UHFFFAOYSA-N 1,4-phenylenediamine Chemical compound NC1=CC=C(N)C=C1 CBCKQZAAMUWICA-UHFFFAOYSA-N 0.000 description 1
- SBJCUZQNHOLYMD-UHFFFAOYSA-N 1,5-Naphthalene diisocyanate Chemical compound C1=CC=C2C(N=C=O)=CC=CC2=C1N=C=O SBJCUZQNHOLYMD-UHFFFAOYSA-N 0.000 description 1
- VZXPHDGHQXLXJC-UHFFFAOYSA-N 1,6-diisocyanato-5,6-dimethylheptane Chemical compound O=C=NC(C)(C)C(C)CCCCN=C=O VZXPHDGHQXLXJC-UHFFFAOYSA-N 0.000 description 1
- PWGJDPKCLMLPJW-UHFFFAOYSA-N 1,8-diaminooctane Chemical compound NCCCCCCCCN PWGJDPKCLMLPJW-UHFFFAOYSA-N 0.000 description 1
- QUPKOUOXSNGVLB-UHFFFAOYSA-N 1,8-diisocyanatooctane Chemical compound O=C=NCCCCCCCCN=C=O QUPKOUOXSNGVLB-UHFFFAOYSA-N 0.000 description 1
- RQBUVIFBALZGPC-UHFFFAOYSA-N 1-isocyanato-4-(4-isocyanatophenyl)benzene Chemical compound C1=CC(N=C=O)=CC=C1C1=CC=C(N=C=O)C=C1 RQBUVIFBALZGPC-UHFFFAOYSA-N 0.000 description 1
- LTMRRSWNXVJMBA-UHFFFAOYSA-L 2,2-diethylpropanedioate Chemical compound CCC(CC)(C([O-])=O)C([O-])=O LTMRRSWNXVJMBA-UHFFFAOYSA-L 0.000 description 1
- GLUOGZCHYVWCAK-UHFFFAOYSA-N 2-[2-(3-triethoxysilylpropylamino)ethylamino]ethyl acetate Chemical compound CCO[Si](OCC)(OCC)CCCNCCNCCOC(C)=O GLUOGZCHYVWCAK-UHFFFAOYSA-N 0.000 description 1
- CYPTUSHYKRVMKI-UHFFFAOYSA-N 2-[2-(3-trimethoxysilylpropylamino)ethylamino]ethyl acetate Chemical compound CO[Si](OC)(OC)CCCNCCNCCOC(C)=O CYPTUSHYKRVMKI-UHFFFAOYSA-N 0.000 description 1
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 1
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- HCGFUIQPSOCUHI-UHFFFAOYSA-N 2-propan-2-yloxyethanol Chemical compound CC(C)OCCO HCGFUIQPSOCUHI-UHFFFAOYSA-N 0.000 description 1
- YEYKMVJDLWJFOA-UHFFFAOYSA-N 2-propoxyethanol Chemical compound CCCOCCO YEYKMVJDLWJFOA-UHFFFAOYSA-N 0.000 description 1
- NUIURNJTPRWVAP-UHFFFAOYSA-N 3,3'-Dimethylbenzidine Chemical group C1=C(N)C(C)=CC(C=2C=C(C)C(N)=CC=2)=C1 NUIURNJTPRWVAP-UHFFFAOYSA-N 0.000 description 1
- ZBMISJGHVWNWTE-UHFFFAOYSA-N 3-(4-aminophenoxy)aniline Chemical compound C1=CC(N)=CC=C1OC1=CC=CC(N)=C1 ZBMISJGHVWNWTE-UHFFFAOYSA-N 0.000 description 1
- SJECZPVISLOESU-UHFFFAOYSA-N 3-trimethoxysilylpropan-1-amine Chemical compound CO[Si](OC)(OC)CCCN SJECZPVISLOESU-UHFFFAOYSA-N 0.000 description 1
- UUEWCQRISZBELL-UHFFFAOYSA-N 3-trimethoxysilylpropane-1-thiol Chemical compound CO[Si](OC)(OC)CCCS UUEWCQRISZBELL-UHFFFAOYSA-N 0.000 description 1
- XDLMVUHYZWKMMD-UHFFFAOYSA-N 3-trimethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C(C)=C XDLMVUHYZWKMMD-UHFFFAOYSA-N 0.000 description 1
- UPMLOUAZCHDJJD-UHFFFAOYSA-N 4,4'-Diphenylmethane Diisocyanate Chemical compound C1=CC(N=C=O)=CC=C1CC1=CC=C(N=C=O)C=C1 UPMLOUAZCHDJJD-UHFFFAOYSA-N 0.000 description 1
- ICNFHJVPAJKPHW-UHFFFAOYSA-N 4,4'-Thiodianiline Chemical compound C1=CC(N)=CC=C1SC1=CC=C(N)C=C1 ICNFHJVPAJKPHW-UHFFFAOYSA-N 0.000 description 1
- YBRVSVVVWCFQMG-UHFFFAOYSA-N 4,4'-diaminodiphenylmethane Chemical compound C1=CC(N)=CC=C1CC1=CC=C(N)C=C1 YBRVSVVVWCFQMG-UHFFFAOYSA-N 0.000 description 1
- HSBOCPVKJMBWTF-UHFFFAOYSA-N 4-[1-(4-aminophenyl)ethyl]aniline Chemical compound C=1C=C(N)C=CC=1C(C)C1=CC=C(N)C=C1 HSBOCPVKJMBWTF-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- 229920000298 Cellophane Polymers 0.000 description 1
- MQJKPEGWNLWLTK-UHFFFAOYSA-N Dapsone Chemical compound C1=CC(N)=CC=C1S(=O)(=O)C1=CC=C(N)C=C1 MQJKPEGWNLWLTK-UHFFFAOYSA-N 0.000 description 1
- 239000005057 Hexamethylene diisocyanate Substances 0.000 description 1
- 239000005058 Isophorone diisocyanate Substances 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 1
- FDLQZKYLHJJBHD-UHFFFAOYSA-N [3-(aminomethyl)phenyl]methanamine Chemical compound NCC1=CC=CC(CN)=C1 FDLQZKYLHJJBHD-UHFFFAOYSA-N 0.000 description 1
- ISKQADXMHQSTHK-UHFFFAOYSA-N [4-(aminomethyl)phenyl]methanamine Chemical compound NCC1=CC=C(CN)C=C1 ISKQADXMHQSTHK-UHFFFAOYSA-N 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 125000000218 acetic acid group Chemical group C(C)(=O)* 0.000 description 1
- KXKVLQRXCPHEJC-UHFFFAOYSA-N acetic acid trimethyl ester Natural products COC(C)=O KXKVLQRXCPHEJC-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 230000005260 alpha ray Effects 0.000 description 1
- 150000004984 aromatic diamines Chemical class 0.000 description 1
- 125000000732 arylene group Chemical group 0.000 description 1
- HFACYLZERDEVSX-UHFFFAOYSA-N benzidine Chemical compound C1=CC(N)=CC=C1C1=CC=C(N)C=C1 HFACYLZERDEVSX-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229930188620 butyrolactone Natural products 0.000 description 1
- 150000001244 carboxylic acid anhydrides Chemical class 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 229930003836 cresol Natural products 0.000 description 1
- 125000002993 cycloalkylene group Chemical group 0.000 description 1
- VKIRRGRTJUUZHS-UHFFFAOYSA-N cyclohexane-1,4-diamine Chemical compound NC1CCC(N)CC1 VKIRRGRTJUUZHS-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- WYACBZDAHNBPPB-UHFFFAOYSA-N diethyl oxalate Chemical compound CCOC(=O)C(=O)OCC WYACBZDAHNBPPB-UHFFFAOYSA-N 0.000 description 1
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 1
- USIUVYZYUHIAEV-UHFFFAOYSA-N diphenyl ether Natural products C=1C=CC=CC=1OC1=CC=CC=C1 USIUVYZYUHIAEV-UHFFFAOYSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- FWDBOZPQNFPOLF-UHFFFAOYSA-N ethenyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C=C FWDBOZPQNFPOLF-UHFFFAOYSA-N 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- PWSKHLMYTZNYKO-UHFFFAOYSA-N heptane-1,7-diamine Chemical compound NCCCCCCCN PWSKHLMYTZNYKO-UHFFFAOYSA-N 0.000 description 1
- RRAMGCGOFNQTLD-UHFFFAOYSA-N hexamethylene diisocyanate Chemical compound O=C=NCCCCCCN=C=O RRAMGCGOFNQTLD-UHFFFAOYSA-N 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-M hexanoate Chemical compound CCCCCC([O-])=O FUZZWVXGSFPDMH-UHFFFAOYSA-M 0.000 description 1
- 230000000887 hydrating effect Effects 0.000 description 1
- 150000003949 imides Chemical class 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000012948 isocyanate Substances 0.000 description 1
- 150000002513 isocyanates Chemical class 0.000 description 1
- NIMLQBUJDJZYEJ-UHFFFAOYSA-N isophorone diisocyanate Chemical compound CC1(C)CC(N=C=O)CC(C)(CN=C=O)C1 NIMLQBUJDJZYEJ-UHFFFAOYSA-N 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 150000002596 lactones Chemical class 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- AYLRODJJLADBOB-QMMMGPOBSA-N methyl (2s)-2,6-diisocyanatohexanoate Chemical compound COC(=O)[C@@H](N=C=O)CCCCN=C=O AYLRODJJLADBOB-QMMMGPOBSA-N 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- PHQOGHDTIVQXHL-UHFFFAOYSA-N n'-(3-trimethoxysilylpropyl)ethane-1,2-diamine Chemical compound CO[Si](OC)(OC)CCCNCCN PHQOGHDTIVQXHL-UHFFFAOYSA-N 0.000 description 1
- NHBRUUFBSBSTHM-UHFFFAOYSA-N n'-[2-(3-trimethoxysilylpropylamino)ethyl]ethane-1,2-diamine Chemical compound CO[Si](OC)(OC)CCCNCCNCCN NHBRUUFBSBSTHM-UHFFFAOYSA-N 0.000 description 1
- KQSABULTKYLFEV-UHFFFAOYSA-N naphthalene-1,5-diamine Chemical compound C1=CC=C2C(N)=CC=CC2=C1N KQSABULTKYLFEV-UHFFFAOYSA-N 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- SXJVFQLYZSNZBT-UHFFFAOYSA-N nonane-1,9-diamine Chemical compound NCCCCCCCCCN SXJVFQLYZSNZBT-UHFFFAOYSA-N 0.000 description 1
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000005949 ozonolysis reaction Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 239000002798 polar solvent Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011342 resin composition Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 1
- RUELTTOHQODFPA-UHFFFAOYSA-N toluene 2,6-diisocyanate Chemical compound CC1=C(N=C=O)C=CC=C1N=C=O RUELTTOHQODFPA-UHFFFAOYSA-N 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- PZJJKWKADRNWSW-UHFFFAOYSA-N trimethoxysilicon Chemical compound CO[Si](OC)OC PZJJKWKADRNWSW-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 125000002256 xylenyl group Chemical class C1(C(C=CC=C1)C)(C)* 0.000 description 1
Description
産業上の利用分野
本発明は、繰り返し単位中の酸成分がトリカル
ボキシシクロペンチル酢酸構造である可溶性ポリ
イミド樹脂組成物に関する。
従来の技術
一般にポリイミド樹脂は、優れた耐熱性、機械
的性質および電気的性質を有しているため、特に
電子産業部門において、フイルム用素材、コーテ
イング用素材などとして利用されている。
従来のポリイミド樹脂としては、
芳香族テトラカルボン酸二無水物と芳香族ジ
アミンとを反応させて芳香族ポリアミツク酸を
得、このポリアミツク酸の溶液を適当な濃度で
基材に塗布し、その後脱水、閉環を行い、イミ
ド化することにより得られる耐熱性の優れた不
溶性芳香族ポリイミド樹脂、
脂肪族または脂環族テトラカルボン酸二無水
物とジアミンとを反応させてポリアミツク酸を
得、このポリアミツク酸を溶媒中で脱水、閉環
してイミド化を行うことにより得られる可溶性
ポリイミド樹脂、
などに大別することができる。
発明が解決しようとする問題点
しかしながら、前記の不溶性芳香族ポリイミ
ド樹脂は、その前駆体である芳香族ポリアミツク
酸の安定性が悪く、室温で長時間保存すると溶液
の粘度が低下したり、一部が脱水、閉環してポリ
イミドとなり、不溶化して白濁を生じるなどの欠
点を有しているため、低温で保存する必要があ
り、保存安定性に問題があつた。
また、芳香族ポリアミツク酸から芳香族ポリイ
ミド樹脂への転換(以下、単に「転換」という)
に際しては、通常、300℃以上の高温が必要であ
り、耐熱性が劣る基材を用いた場合、転換は事実
上不可能になるなどの問題があり、用いる基材の
材料に制限があつた。
これに対し、前記の可溶性ポリイミド樹脂
は、有機溶媒に可溶性であるため、その濃度や粘
度を調整することによつて基材上に一定の厚みで
塗布することができ、単に溶媒を加熱除去するだ
けで均一な塗膜を形成させることができ、しかも
耐熱性は不溶性芳香族ポリイミド樹脂に対して若
干劣るものの、機械的性質、電気的性質、耐薬品
性などに優れたものである。
しかしながら、かかる可溶性ポリイミド樹脂を
コーテイング剤として、特に電子材料用途、例え
ば集積回路、トランジスタ、磁気ヘツドなどの層
間絶縁膜、太陽電池用絶縁膜、液晶表示素子の配
向膜、薄膜感熱ヘツドの絶縁膜、パツシベーシヨ
ン膜、ジヤンクシヨンコート膜、防湿膜、バツフ
アーコート膜、気密封止型集積回路、樹脂封止型
集積回路などのα線遮蔽膜などの表面保護膜な
ど、多様な種類の基材上へコーテイングする場
合、用いられる基材に対しては必ずしも接着性が
満足するものではないという問題を有し、塗膜と
基材との接着性が不足すると、組み込まれる電子
機器の高度の耐久性、信頼性に問題を生起するこ
とになる。
本発明は、かかる従来の技術的課題を背景にな
されたもので、耐熱性、機械的性質、電気的性
質、耐薬品性、溶液状態の安定性などに優れ、か
つ接着性の優れた可溶性ポリイミド樹脂組成物を
提供するものである。
問題点を解決するための手段
即ち、本発明は、下記一般式()で示される
繰り返し単位を有する可溶性ポリイミド樹脂と下
記一般式()で示される官能性シラン化合物と
からなることを特徴とする可溶性ポリイミド樹脂
組成物を提供するものである。
(式中、Rは、2価の芳香族基、脂肪族基、脂
環族基などの有機基を示す。)
YR1SiR2 3-nXn ……()
〔式中、YはCH3COOC2H4NH−基を有する
有機基、R1は炭素数1〜10の2価の炭化水素基、
R2は炭素数1〜5のアルキル基、XはOR3で示
されるアルコキシ基またはOCOR4で示されるア
ルコキシカルボニル基(ここでR3およびR4は、
炭素数1〜10のアルキル基である)を示し、mは
1〜3の整数を示す。〕
かかる可溶性ポリイミド樹脂は、例えば
2,3,5−トリカルボキシシクロペンチル
酢酸二無水物とジアミンとから得られるポリア
ミツク酸を有機溶媒溶液で有機カルボン酸無水
物の存在下にイミド化反応させるか(特開昭59
−199720号公報)、
2,3,5−トリカルボキシシクロペンチル
酢酸二無水物とジイソシアネートを有機溶媒中
で反応させる(特願昭59−109239号明細書)こ
とによつて製造される。
ここで2,3,5−トリカルボキシシクロペン
チル酢酸(以下「TCA」という)は、例えばジ
シクロペンタジエンをオゾン分解し、過酸化水素
で酸化する方法〔英国特許第872355号明細書、J.
Org.Chem.、28、2537(1963)〕またはジシクロペ
ンタジエンを水和して得られるヒドロキシジシク
ロペンタジエンを硝酸酸化する方法(西独特許第
1078120号明細書)などによつて製造することが
でき、このTCAを脱水することにより2,3,
5−トリカルボキシシクロペンチル酢酸二無水物
(以下「TCA・AH」という)を製造することが
できる。
また、前記TCA・AHと反応させるジアミン
またはTCA・AHと反応させるジイソシアネー
トは、一般式:H2N−R−NH2、または一般
式:OCNRNCOで示される化合物(Rは、一般
式()と同じであり、2価の芳香族基、脂肪族
基または脂環族基を示す)である。
前記一般式における好ましいRとしては、例え
ば、
INDUSTRIAL APPLICATION FIELD The present invention relates to a soluble polyimide resin composition in which the acid component in the repeating unit has a tricarboxycyclopentyl acetic acid structure. BACKGROUND ART Polyimide resins generally have excellent heat resistance, mechanical properties, and electrical properties, and are therefore used as film materials, coating materials, etc., particularly in the electronic industry sector. Conventional polyimide resins are produced by reacting aromatic tetracarboxylic dianhydride and aromatic diamine to obtain aromatic polyamic acid, applying a solution of this polyamic acid to a base material at an appropriate concentration, and then dehydrating it. An insoluble aromatic polyimide resin with excellent heat resistance obtained by ring closure and imidization, a polyamic acid obtained by reacting an aliphatic or alicyclic tetracarboxylic dianhydride with a diamine, and this polyamic acid They can be broadly classified into soluble polyimide resins obtained by dehydration, ring closure, and imidization in a solvent. Problems to be Solved by the Invention However, in the above-mentioned insoluble aromatic polyimide resin, its precursor, aromatic polyamic acid, has poor stability, and when stored for a long time at room temperature, the viscosity of the solution decreases, and some However, it has disadvantages such as dehydration and ring closure to form polyimide, which becomes insolubilized and becomes cloudy, so it needs to be stored at low temperature, which poses a problem in storage stability. In addition, conversion from aromatic polyamic acid to aromatic polyimide resin (hereinafter simply referred to as "conversion")
In this case, high temperatures of 300℃ or higher are usually required, and if a base material with poor heat resistance is used, conversion becomes virtually impossible.There are restrictions on the materials that can be used for the base material. . On the other hand, the above-mentioned soluble polyimide resin is soluble in organic solvents, so by adjusting its concentration and viscosity, it can be applied to a substrate at a constant thickness, and the solvent can be simply removed by heating. It is possible to form a uniform coating film by itself, and although its heat resistance is slightly inferior to that of insoluble aromatic polyimide resins, it has excellent mechanical properties, electrical properties, chemical resistance, etc. However, such soluble polyimide resins can be used as coating agents, especially for electronic material applications, such as interlayer insulating films for integrated circuits, transistors, magnetic heads, etc., insulating films for solar cells, alignment films for liquid crystal display elements, insulating films for thin film thermal heads, etc. On various types of substrates, such as passivation film, juncture coat film, moisture-proof film, buffer coat film, α-ray shielding film and other surface protection films for hermetically sealed integrated circuits, resin-sealed integrated circuits, etc. When coating, there is a problem that the adhesion to the base material used is not necessarily satisfactory, and if the adhesion between the coating film and the base material is insufficient, the high durability of the electronic equipment to be incorporated may be affected. This will cause reliability problems. The present invention was made against the background of such conventional technical problems, and it is a soluble polyimide that has excellent heat resistance, mechanical properties, electrical properties, chemical resistance, stability in solution state, etc., and has excellent adhesive properties. A resin composition is provided. Means for Solving the Problems That is, the present invention is characterized by comprising a soluble polyimide resin having a repeating unit represented by the following general formula () and a functional silane compound represented by the following general formula (). A soluble polyimide resin composition is provided. (In the formula, R represents an organic group such as a divalent aromatic group, aliphatic group, or alicyclic group.) YR 1 SiR 2 3-n X n ... () [In the formula, Y is CH 3 COOC 2 H 4 An organic group having an NH- group, R 1 is a divalent hydrocarbon group having 1 to 10 carbon atoms,
R 2 is an alkyl group having 1 to 5 carbon atoms, X is an alkoxy group represented by OR 3 or an alkoxycarbonyl group represented by OCOR 4 (here, R 3 and R 4 are
is an alkyl group having 1 to 10 carbon atoms), and m represents an integer of 1 to 3. ] Such a soluble polyimide resin can be produced by, for example, imidizing polyamic acid obtained from 2,3,5-tricarboxycyclopentyl acetic dianhydride and a diamine in the presence of an organic carboxylic acid anhydride in an organic solvent solution (in particular, 1977
-199720), and by reacting 2,3,5-tricarboxycyclopentyl acetic dianhydride with a diisocyanate in an organic solvent (Japanese Patent Application No. 109239/1982). Here, 2,3,5-tricarboxycyclopentyl acetic acid (hereinafter referred to as "TCA") can be obtained by, for example, ozonolysis of dicyclopentadiene and oxidation with hydrogen peroxide [British Patent No. 872355, J.
Org.Chem., 28 , 2537 (1963)] or a method of oxidizing hydroxydicyclopentadiene obtained by hydrating dicyclopentadiene with nitric acid (West German Patent No.
1078120), and by dehydrating this TCA, 2,3,
5-Tricarboxycyclopentyl acetic acid dianhydride (hereinafter referred to as "TCA・AH") can be produced. In addition, the diamine to be reacted with TCA/AH or the diisocyanate to be reacted with TCA/AH is a compound represented by the general formula: H 2 NR-NH 2 or the general formula: OCNRNCO (R is a compound represented by the general formula ()). are the same and represent a divalent aromatic group, aliphatic group, or alicyclic group). Preferred R in the general formula is, for example,
【式】【formula】
(式中、X1,X2,X3およびX4は、同一でも異
なつてもよく、−H,−CH3または−OCH3、Y0は
−CH2−,−C2H4−,−O−,−S−、 (In the formula, X 1 , X 2 , X 3 and X 4 may be the same or different, -H, -CH 3 or -OCH 3 , Y 0 is -CH 2 -, -C 2 H 4 -, -O-, -S-,
【式】【formula】
【式】−SO2−または−CONH−を示し、n
は0または1を示す。)で示される芳香族基、−
(CH2)n−(n=2〜20)、
[Formula] represents -SO 2 - or -CONH-, and n represents 0 or 1. ), an aromatic group represented by -
( CH2 )n-(n=2-20),
で示される炭素数2〜20の脂肪族基または脂環族
基などが挙げられる。
なお、本発明の可溶性ポリイミド樹脂組成物の
耐熱性を更に向上させるためには、Rが芳香族基
であることが好ましい。
前記ジアミンの具体例としては、パラフエニレ
ンジアミン、メタフエニレンジアミン、4,4′−
ジアミノジフエニルメタン、4,4′−ジアミノジ
フエニルエタン、ベンジジン、4,4′−ジアミノ
ジフエニルスルフイド、4,4′−ジアミノジフエ
ニルスルホン、4,4′−ジアミノジフエニルエー
テル、1,5−ジアミノナフタレン、3,3′−ジ
メチル−4,4′−ジアミノビフエニル、3,4′−
ジアミノベンズアリニド、3,4′−ジアミノジフ
エニルエーテル、メタキシリレンジアミン、パラ
キシリレンジアミン、エチレンジアミン、1,3
−プロパンジアミン、テトラメチレンジアミン、
ペンタメチレンジアミン、ヘキサメチレンジアミ
ン、ヘプタメチレンジアミン、オクタメチレンジ
アミン、ノナメチレンジアミン、4,4′−ジメチ
ルヘプタメチレンジアミン、1,4−ジアミノシ
クロヘキサン、テトラヒドロジシクロペンタジエ
ニレンジアミン、ヘキサヒドロ−4,7−メタノ
インダニレンジメチレンジアミン、トリシクロ
〔6,2,1,02,7〕−ウンデシレンジメチルジア
ミンなどを挙げることができる。
これらは単独または混合して用いることができ
る。
また、前記ジイソシアネートの具体例として
は、2,4−トリレンジイソシアネート、2,6
−トリレンジイソシアネート、p−フエニレンジ
イソシアネート、m−フエニレンジイソシアネー
ト、4,4′−ジフエニルメタンジイソシアネー
ト、4,4′−ジフエニルエーテルジイソシアネー
ト、4,4′−ジフエニルスルホンジイソシアネー
ト、4,4′−ジフエニルスルフイドジイソシアネ
ート、1,5−ナフタレンジイソシアネート、
2,6−ナフタレンジイソシアネート、トリジン
イソシアネート、4,4′−ビフエニルジイソシア
ネート、p−キシリレンジイソシアネート、m−
キシリレンジイソシアネートなどの芳香族ジイソ
シアネート化合物、イソホロンジイソシアネー
ト、1,3−ビス(イソシアネートメチル)シク
ロヘキサン、1,4−ビス(イソシアネートメチ
ル)シクロヘキサン、4,4′−ジシクロヘキシル
メタンジイソシアネート、4,4′−ジシクロヘキ
シルエーテルジイソシアネートなどの脂環族ジイ
ソシアネート化合物、ブタンジイソシアネート、
ヘキサメチレンジイソシアネート、オクタメチレ
ンジイソシアネート、リジンジイソシアネート、
トリメチルヘキサメチレンジイソシアネートなど
の脂肪族ジイソシアネート化合物を挙げることが
できる。これらは単独または混合して用いること
ができる。
本発明に用いられる可溶性ポリイミド樹脂の固
有粘度(ηinh=nηrel/c,c=0.5g/dl、30
℃、ジメチルホルムアミド中)は、好ましくは
0.05dl/g以上、特に好ましくは0.05〜5dl/g
であり、前記一般式()で示される繰り返し単
位が好ましく50重量%以上、特に好ましくは75重
量%以上有する可溶性ポリイミド樹脂である。
本発明に用いられるポリイミド樹脂は、有機溶
媒に溶け易く、かつ溶液状態でも非常に安定で、
長期の保存に対しても白濁したり、粘度が変化す
る現象はみられない。
かかる可溶性ポリイミド樹脂の有機溶媒として
は、N−メチル−2−ピロリドン、N,N−ジメ
チルアセトアミド、N,N−ジメチルホルムアミ
ド、ジメチルスルホキシド、γ−ブチロラクト
ン、テトラメチル尿素などの非プロトン系極性溶
媒、クレゾール、キシレノール、ハロゲン化フエ
ノールなどのフエノール系溶媒を挙げることがで
きるが、このうち吸水性が小さいこと、また吸水
しても塗膜が白濁化しないことなどの理由によ
り、γ−ブチロラクトンが好ましい。
本発明では、このような可溶性ポリイミド樹脂
に前記一般式()で示される官能性シラン化合
物を配合する。
前記一般式()におけるYとしては、例えば
CH3COOC2H4NH−を挙げることができる。本
発明の可溶性ポリイミド樹脂組成物の基板に対す
る接着性および溶液状態の安定性をさらに高める
ために、前記一般式()におけるYとしては、
CH3COOC2H4NH−基を有する有機基であるこ
とが必要である。
またR1としては、−(CH2)−(は1〜10の
整数を示す)で示される直鎖状メチレンまたはそ
の分岐状異性体、 Examples thereof include aliphatic groups or alicyclic groups having 2 to 20 carbon atoms. In addition, in order to further improve the heat resistance of the soluble polyimide resin composition of the present invention, it is preferable that R is an aromatic group. Specific examples of the diamine include paraphenylenediamine, metaphenylenediamine, 4,4'-
Diaminodiphenylmethane, 4,4'-diaminodiphenyl ethane, benzidine, 4,4'-diaminodiphenyl sulfide, 4,4'-diaminodiphenyl sulfone, 4,4'-diaminodiphenyl ether, 1 , 5-diaminonaphthalene, 3,3'-dimethyl-4,4'-diaminobiphenyl, 3,4'-
Diaminobenzarinide, 3,4'-diaminodiphenyl ether, metaxylylene diamine, paraxylylene diamine, ethylenediamine, 1,3
-propanediamine, tetramethylenediamine,
Pentamethylene diamine, hexamethylene diamine, heptamethylene diamine, octamethylene diamine, nonamethylene diamine, 4,4'-dimethylheptamethylene diamine, 1,4-diaminocyclohexane, tetrahydrodicyclopentadienylene diamine, hexahydro-4, Examples include 7-methanoindanilene dimethylene diamine, tricyclo[6,2,1,0 2,7 ]-undecylene dimethyl diamine, and the like. These can be used alone or in combination. Further, specific examples of the diisocyanate include 2,4-tolylene diisocyanate, 2,6-tolylene diisocyanate,
-tolylene diisocyanate, p-phenylene diisocyanate, m-phenylene diisocyanate, 4,4'-diphenylmethane diisocyanate, 4,4'-diphenyl ether diisocyanate, 4,4'-diphenyl sulfone diisocyanate, 4,4 '-diphenyl sulfide diisocyanate, 1,5-naphthalene diisocyanate,
2,6-naphthalene diisocyanate, tolidine isocyanate, 4,4'-biphenyl diisocyanate, p-xylylene diisocyanate, m-
Aromatic diisocyanate compounds such as xylylene diisocyanate, isophorone diisocyanate, 1,3-bis(isocyanatemethyl)cyclohexane, 1,4-bis(isocyanatemethyl)cyclohexane, 4,4'-dicyclohexylmethane diisocyanate, 4,4'-dicyclohexyl Alicyclic diisocyanate compounds such as ether diisocyanate, butane diisocyanate,
Hexamethylene diisocyanate, octamethylene diisocyanate, lysine diisocyanate,
Mention may be made of aliphatic diisocyanate compounds such as trimethylhexamethylene diisocyanate. These can be used alone or in combination. Intrinsic viscosity of the soluble polyimide resin used in the present invention (ηinh=nηrel/c, c=0.5g/dl, 30
°C in dimethylformamide) is preferably
0.05 dl/g or more, particularly preferably 0.05 to 5 dl/g
It is a soluble polyimide resin having preferably 50% by weight or more, particularly preferably 75% by weight or more of repeating units represented by the general formula (). The polyimide resin used in the present invention is easily soluble in organic solvents and is very stable even in a solution state.
No clouding or change in viscosity was observed even after long-term storage. Examples of the organic solvent for the soluble polyimide resin include aprotic polar solvents such as N-methyl-2-pyrrolidone, N,N-dimethylacetamide, N,N-dimethylformamide, dimethylsulfoxide, γ-butyrolactone, and tetramethylurea; Examples include phenolic solvents such as cresol, xylenol, and halogenated phenols, but among these, γ-butyrolactone is preferred because it has low water absorption and does not cause the coating film to become cloudy even when it absorbs water. In the present invention, a functional silane compound represented by the above general formula () is blended into such a soluble polyimide resin. As Y in the general formula (), for example,
CH3COOC2H4NH- may be mentioned. In order to further improve the adhesion to the substrate and the stability of the solution state of the soluble polyimide resin composition of the present invention, Y in the general formula () is as follows:
It is necessary to be an organic group having a CH 3 COOC 2 H 4 NH- group. In addition, R 1 is a linear methylene represented by -(CH 2 )- (represents an integer of 1 to 10) or a branched isomer thereof;
【式】【formula】
【式】などで示されるアリレン基、An arylene group represented by [Formula] etc.,
【式】など
で示されるシクロアルキレン基、
R2としては、−CH3,−C2H5,
−C3H7,−C4H9,−C10H21で示される直鎖状ま
たは分岐状アルキル基を挙げることができる。
更にXとしては、−OCH3,−OC2H5,
−OC3H7,−OC4H9,−OC5H11,
−OC6H13,−OC7H15,−OC8H17,
−OC9H19,−OC10H21などで示される直鎖状また
は分岐状アルコキシ基、−OCOCH3,
−OCOC2H5,−OCOC3H7,
−OCOC4H9,−OCOC5H11,
−OCOC6H13,−OCOC7H15,
−OCOC8H17,−OCOC9H19,
−OCOC10H21などで示される直鎖状または分岐
状アルコキシカルボニル基などを挙げることがで
きる。
これら一般式()で示される官能性シラン化
合物の具体例としては、9−トリメトキシシリル
−3,6−ジアザノニルアセテート、9−トリエ
トキシシリル−3,6−ジアザノニルアセテート
などを挙げることができ、これらは併用すること
もできる。
前記可溶性ポリイミド樹脂に対する官能性シラ
ン化合物の混合割合は、前者100重量部に対し、
後者が好ましくは0.05〜30重量部、特に好ましく
は0.1〜20重量部であり、0.05重量部未満では可
溶性ポリイミド樹脂組成物の基材に対する接着性
向上が充分でなく、一方20重量部を越えると可溶
性ポリイミド樹脂組成物を溶液として塗布する際
に塗膜の表面特性が大きく変化したり、過剰の官
能性シラン化合物のマイグレーシヨンが生起す
る。
本発明の可溶性ポリイミド樹脂組成物は、通
常、溶液として基板に塗布される。可溶性ポリイ
ミド樹脂組成物溶液を調製する際に使用される溶
媒は、可溶性ポリイミド樹脂を溶解し、官能性シ
ラン化合物と反応して沈殿を生じたり、濁りの生
じないものであればよく、前記可溶性ポリイミド
樹脂を溶解させる溶媒が最も好ましく、その他一
般的有機溶媒であるアルコール類、フエノール
類、ケトン類、エステル類、ラクトン類、エーテ
ル類、ハロゲン化、炭化水素類、炭化水素類、例
えばメチルアルコール、エチルアルコール、イソ
プロピルアルコール、エチレングリコール、プロ
ピレングリコール、1,4−ブタンジオール、ト
リエチレングリコール、エチレングリコールモノ
メチルエーテル、フエノール、m−クレゾール、
アセトン、メチルエチルケトン、メチルイソブチ
ルケトン、シクロヘキサノン、酢酸メチル、酢酸
エチル、酢酸ブチル、蓚酸ジエチル、マロン酸ジ
エチル、ジエチルエーテル、エチレングリコール
メチルエーテル、エチレングリコールエチルエー
テル、エチレングリコールn−プロピルエーテ
ル、エチレングリコールiso−プロピルエーテル、
エチレングリコールn−ブチルエーテル、エチレ
ングリコールジメチルエーテル、エチレングリコ
ールエチルエーテルアセテート、ジエチレングリ
コールジメチルエーテル、テトラヒドロフラン、
ジクロルメタン、1,2−ジクロルエタン、1,
4−ジクロルブタン、トリクロルエタン、クロル
ベンゼン、o−ジクロルベンゼン、ヘキサン、ヘ
プタン、オクタン、ベンゼン、トルエン、キシレ
ンなども前記可溶性ポリイミド樹脂を溶解させる
溶媒に該可溶性ポリイミド樹脂を析出させない程
度混合して用いることができる。
本発明の可溶性ポリイミド樹脂組成物の溶液を
調製するに際しては、通常、可溶性ポリイミド樹
脂の有機溶媒溶液中に官能性シラン化合物を添加
するか、沈殿が生じない限度で該溶液に他の一般
的有機溶媒に溶解した官能性シラン化合物の溶液
を混合し、固形分濃度0.1〜30重量%、好ましく
は0.5〜15重量%の溶液を調製する。
このようにして調製される本発明の可溶性ポリ
イミド樹脂組成物溶液は、基材にロールコーター
法、スピンナー法、印刷法などで塗布し、次いで
例えば80〜250℃,5〜180分乾燥することによつ
て可溶性ポリイミド樹脂組成物の塗膜を形成する
ことができる。
発明の効果
本発明の可溶性ポリイミ樹脂組成物は、耐熱
性、機械的性質、電気的性質、耐薬品性、溶液状
態の安定性などに優れ、かつ基板との接着性に優
れたものであり、電子産業部門において前記電子
材料用途に好適に用いることができ、例えばポリ
エステルなどの有機高分子材料、ガラスシリコン
ウエハー、ITO透明電極のコーテイング用素材と
して特に優れた性能を発揮するものである。
実施例
以下、実施例を挙げ本発明を更に具体的に説明
するが、本発明はこれらの実施例に制限されるも
のではない。
参考例 1
ジアミノジフエニルエーテル(DDE)
20.48g(0.102モル)を、N,N−ジメチルホル
ムアミド(DMF)247.5gに溶解した後、
TCA・AH23.15g(0.103モル)を粉末のまま加
えて攪拌しながら25℃で反応させた。24時間後に
この反応液を少量サンプリングし、ポリアミツク
酸が0.5g/100mlの濃度になるようにDMFを加
えて固有粘度(30℃)を測定した。得られたポリ
アミツク酸のηinhは0.99dl/gであつた。
次いで、前記反応液に更にDMFを加えてポリ
アミツク酸濃度を6.1重量%とした溶液30gを100
mlのフラスコに移し、この溶液に無水酢酸1.32g
およびピリジン1.02gを順次加えて混合、攪拌し
た後、135℃で2時間反応させた。
次いで反応生成物を大量のメタノールに注いで
可溶性ポリイミド樹脂を凝固し回収した後、80℃
で一晩乾燥した。得られた可溶性ポリイミド樹脂
のDMF中、30℃の粘度ηinhは0.79dl/gであつ
た。
この可溶性ポリイミド樹脂を再度DMFに溶解
し、ガラス板上に流延し乾燥した後、フイルムを
剥離し赤外線吸収スペクトルを測定した結果、
1740cm-1および1690cm-1にイミドのC=0伸縮振
動に基づく吸収が認められた。
これにより、無水酢酸とピリジンの存在下でポ
リアミツク酸溶液を加熱反応させることにより、
可溶性ポリイミド樹脂が得られることが分かる。
実施例 1
参考例1で得られた可溶性ポリイミド樹脂をγ
−ブチロラクトンに溶解し、5重量%溶液とな
し、これに9−トリメトキシリル−3,6−ジア
ザノニルアセテートを2.5phr混合し、可溶性ポリ
イミド樹脂組成物溶液を調製した後、孔径0.22μ
mのメンブランフイルターで濾過し、不溶分を除
去した。この溶液をガラス基板上にスピンナーを
用いて塗布した。
塗布後、150℃で1時間乾燥させた。得られた
可溶性ポリイミド樹脂組成物の塗膜の厚さは
0.20μmであつた。
得られた塗膜にカツターナイフで巾1mm、縦11
本、横11本の切り込みを入れ、10×10個の碁盤目
を作つた。この碁盤目にセロテープを貼りつけ、
剥離離試験を行つた。剥がれた碁盤目の数は0で
あつた。
また、得られた塗膜に同様の10×10個の碁盤目
の切り込みを入れ、沸騰水中で5時間煮沸した。
乾燥後、室温に冷却して碁盤目にセロテープを貼
りつけ、剥離実験を行つた。剥がれた碁盤目の数
は0であつた。
なお、得られた可溶性ポリイミド樹脂組成物
は、室温において1ケ月放置した後も粘度変化は
なく、溶液状態の安定性に優れていた。
実施例 2
実施例1で用いた官能性シラン化合物の添加量
を5phrに変え、実施例1と同様に塗布試験を行
つた。結果を表1に示す。
実施例 3
実施例1で用いた官能性シラン化合物の添加量
を10phrに変え、実施例1と同様に塗布試験を行
つた。結果を表1に示す。
比較例 1
参考例1で得られた可溶性ポリイミド樹脂を
N,N−ジメチルアセトアミドに溶解し、5重量
%溶液とし、これに官能性シラン化合物として3
−アミノプロピルトリメトキシシラン2.5phrを用
い、実施例1と同様の塗布試験を行つた。
結果を表1に示す。
比較例 2
比較例1で用いた官能性シラン化合物の代わり
にN−(2−アミノエチル)−3−アミノプロピル
トリメトキシシランを用い、実施例1と同様の塗
布試験を行つた。結果を表1に示す。
比較例 3
比較例1で用いた官能性シラン化合物の代わり
に3−アミノプロピルトリメトキシシランを用
い、実施例1と同様の塗布試験を行つた。
結果を表1に示す。
比較例 4
比較例1で用いた官能性シラン化合物の代わり
に10−トリメトキシシリル−1,4,7−トリア
ザデカンを用い、実施例1と同様の塗布試験を行
つた。結果を表1に示す。
比較例 5
実施例1において、官能性シラン化合物を用い
ない以外は、実施例1と同様に塗布試験を行つ
た。
結果を表1に示す。
比較例 6
実施例1で用いた官能性シラン化合物の代わり
に3−イソシアネートプロピルトリエトキシシラ
ンを用い、実施例1と同様の塗布試験を行つた。
結果を表1に示す。
比較例 7
実施例1で用いた官能性シラン化合物の代わり
に3−グリシドキシルプロピルトリメトキシシラ
ンを用い、実施例1と同様の塗布試験を行つた。
結果を表1に示す。
比較例 8
実施例1で用いた官能性シラン化合物の代わり
にビニルトリエトキシシランを用い、実施例1と
同様の塗布試験を行つた。結果を表1に示す。
比較例 9
実施例1で用いた官能性シラン化合物の代わり
に3−メタクリロキシプロピルトリメトキシシラ
ンを用い、実施例1と同様の塗布試験を行つた。
結果を表1に示す。
比較例 10
実施例1で用いた官能性シラン化合物の代わり
に2−(3,4−エポキシシクロヘキシル)トリ
メトキシシランを用い、実施例1と同様の塗布試
験を行つた。結果を表1に示す。
比較例 11
実施例1で用いた官能性シラン化合物の代わり
に3−メルカプトプロピルトリメトキシシランを
用い、実施例1と同様の塗布試験を行つた。
結果を表1に示す。
実施例 4
実施例2で用いたガラス基板の代わりにITO透
明電極を蒸着したガラス基板を用い、実施例2と
同様の塗布試験を行つた。結果を表1に示す。
比較例 12
比較例5で用いたガラス基板の代わりに実施例
4で用いたITO透明電極を蒸着したガラス基板を
用い、比較例5と同様に塗布試験を行つた。
結果を表1に示す。
比較例 13
比較例2で用いたガラス基板の代わりにシリコ
ンウエハー基板を用い、比較例2と同様に塗布試
験を行つた。結果を表1に示す。
比較例 14
比較例5で用いたガラス基板の代わりに比較例
13で用いたシリコンウエハー基板を用い、比較例
5と同様に塗布試験を行つた。
結果を表1に示す。In the cycloalkylene group represented by [ Formula ] etc., R 2 is a linear or Mention may be made of branched alkyl groups. Furthermore , as X , -OCH3 , -OC2H5 , -OC3H7 , -OC4H9 , -OC5H11 , -OC6H13 , -OC7H15 , -OC8H17 , -OC9H19 , -OC10H21 , etc. , -OCOCH3 , -OCOC2H5 , -OCOC3H7 , -OCOC4H9 , -OCOC5 Examples include linear or branched alkoxycarbonyl groups represented by H 11 , -OCOC 6 H 13 , -OCOC 7 H 15 , -OCOC 8 H 17 , -OCOC 9 H 19 , -OCOC 10 H 21 , etc. can. Specific examples of the functional silane compounds represented by the general formula () include 9-trimethoxysilyl-3,6-diazanonyl acetate and 9-triethoxysilyl-3,6-diazanonyl acetate. These can also be used in combination. The mixing ratio of the functional silane compound to the soluble polyimide resin is 100 parts by weight of the former,
The latter is preferably 0.05 to 30 parts by weight, particularly preferably 0.1 to 20 parts by weight; if it is less than 0.05 parts by weight, the adhesion of the soluble polyimide resin composition to the substrate will not be sufficiently improved; on the other hand, if it exceeds 20 parts by weight, When a soluble polyimide resin composition is applied as a solution, the surface properties of the coating film change significantly and migration of excess functional silane compounds occurs. The soluble polyimide resin composition of the present invention is usually applied to a substrate as a solution. The solvent used when preparing the soluble polyimide resin composition solution may be any solvent as long as it dissolves the soluble polyimide resin and does not react with the functional silane compound to cause precipitation or turbidity. Solvents that dissolve the resin are most preferred, and other common organic solvents such as alcohols, phenols, ketones, esters, lactones, ethers, halogenated, hydrocarbons, hydrocarbons such as methyl alcohol, ethyl Alcohol, isopropyl alcohol, ethylene glycol, propylene glycol, 1,4-butanediol, triethylene glycol, ethylene glycol monomethyl ether, phenol, m-cresol,
Acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, methyl acetate, ethyl acetate, butyl acetate, diethyl oxalate, diethyl malonate, diethyl ether, ethylene glycol methyl ether, ethylene glycol ethyl ether, ethylene glycol n-propyl ether, ethylene glycol iso- propyl ether,
Ethylene glycol n-butyl ether, ethylene glycol dimethyl ether, ethylene glycol ethyl ether acetate, diethylene glycol dimethyl ether, tetrahydrofuran,
dichloromethane, 1,2-dichloroethane, 1,
4-dichlorobutane, trichloroethane, chlorobenzene, o-dichlorobenzene, hexane, heptane, octane, benzene, toluene, xylene, etc. may also be mixed with the solvent in which the soluble polyimide resin is dissolved to an extent that the soluble polyimide resin will not be precipitated. be able to. When preparing a solution of the soluble polyimide resin composition of the present invention, a functional silane compound is usually added to a solution of the soluble polyimide resin in an organic solvent, or other common organic silane compounds are added to the solution to the extent that precipitation does not occur. A solution of a functional silane compound dissolved in a solvent is mixed to prepare a solution having a solid content concentration of 0.1 to 30% by weight, preferably 0.5 to 15% by weight. The soluble polyimide resin composition solution of the present invention prepared in this manner is applied to a substrate by a roll coater method, a spinner method, a printing method, etc., and then dried at, for example, 80 to 250°C for 5 to 180 minutes. Thus, a coating film of the soluble polyimide resin composition can be formed. Effects of the Invention The soluble polyimide resin composition of the present invention has excellent heat resistance, mechanical properties, electrical properties, chemical resistance, stability in a solution state, etc., and has excellent adhesiveness to a substrate. It can be suitably used in the above-mentioned electronic material applications in the electronic industry sector, and exhibits particularly excellent performance as a coating material for organic polymer materials such as polyester, glass silicon wafers, and ITO transparent electrodes. Examples Hereinafter, the present invention will be described in more detail with reference to Examples, but the present invention is not limited to these Examples. Reference Example 1 After dissolving 20.48 g (0.102 mol) of diaminodiphenyl ether (DDE) in 247.5 g of N,N-dimethylformamide (DMF),
23.15 g (0.103 mol) of TCA.AH was added as a powder and reacted at 25° C. with stirring. After 24 hours, a small amount of this reaction solution was sampled, and DMF was added so that the concentration of polyamic acid was 0.5 g/100 ml, and the intrinsic viscosity (30° C.) was measured. The obtained polyamic acid had an ηinh of 0.99 dl/g. Next, 30 g of a solution made by adding DMF to the reaction solution to make the polyamic acid concentration 6.1% by weight was added to 100% of the solution.
ml flask and add 1.32 g of acetic anhydride to this solution.
and 1.02 g of pyridine were sequentially added, mixed and stirred, and then reacted at 135°C for 2 hours. Next, the reaction product was poured into a large amount of methanol to solidify and collect the soluble polyimide resin, and then heated at 80°C.
and dried overnight. The viscosity ηinh of the obtained soluble polyimide resin in DMF at 30°C was 0.79 dl/g. This soluble polyimide resin was dissolved in DMF again, cast on a glass plate, dried, the film was peeled off, and the infrared absorption spectrum was measured.
Absorption based on C=0 stretching vibration of imide was observed at 1740 cm -1 and 1690 cm -1 . As a result, by heating and reacting polyamic acid solution in the presence of acetic anhydride and pyridine,
It can be seen that a soluble polyimide resin is obtained. Example 1 The soluble polyimide resin obtained in Reference Example 1 was
-Dissolve in butyrolactone to make a 5% by weight solution, and mix 2.5 phr of 9-trimethoxylyl-3,6-diazanonyl acetate to prepare a soluble polyimide resin composition solution, with a pore size of 0.22μ
The mixture was filtered through a No. m membrane filter to remove insoluble matter. This solution was applied onto a glass substrate using a spinner. After coating, it was dried at 150°C for 1 hour. The thickness of the coating film of the obtained soluble polyimide resin composition is
It was 0.20 μm. Cut the resulting coating film with a cutter knife to a width of 1 mm and a length of 11 mm.
I made 11 horizontal cuts in the book, creating a 10 x 10 grid. Paste sellotape on this grid,
A peel test was conducted. The number of peeled off grids was 0. In addition, similar 10 x 10 grid cuts were made in the resulting coating film, and the film was boiled in boiling water for 5 hours.
After drying, it was cooled to room temperature, cellophane tape was applied in a grid pattern, and a peeling experiment was performed. The number of peeled off grids was 0. Note that the obtained soluble polyimide resin composition showed no change in viscosity even after being left at room temperature for one month, and had excellent stability in the solution state. Example 2 A coating test was conducted in the same manner as in Example 1, except that the amount of the functional silane compound used in Example 1 was changed to 5 phr. The results are shown in Table 1. Example 3 A coating test was conducted in the same manner as in Example 1 except that the amount of the functional silane compound used in Example 1 was changed to 10 phr. The results are shown in Table 1. Comparative Example 1 The soluble polyimide resin obtained in Reference Example 1 was dissolved in N,N-dimethylacetamide to make a 5% by weight solution, and 3% as a functional silane compound was added to this.
A coating test similar to that in Example 1 was conducted using 2.5 phr of -aminopropyltrimethoxysilane. The results are shown in Table 1. Comparative Example 2 A coating test similar to that in Example 1 was conducted using N-(2-aminoethyl)-3-aminopropyltrimethoxysilane instead of the functional silane compound used in Comparative Example 1. The results are shown in Table 1. Comparative Example 3 A coating test similar to Example 1 was conducted using 3-aminopropyltrimethoxysilane instead of the functional silane compound used in Comparative Example 1. The results are shown in Table 1. Comparative Example 4 A coating test similar to Example 1 was conducted using 10-trimethoxysilyl-1,4,7-triazadecane instead of the functional silane compound used in Comparative Example 1. The results are shown in Table 1. Comparative Example 5 A coating test was conducted in the same manner as in Example 1, except that the functional silane compound was not used. The results are shown in Table 1. Comparative Example 6 A coating test similar to that in Example 1 was conducted using 3-isocyanatepropyltriethoxysilane instead of the functional silane compound used in Example 1. The results are shown in Table 1. Comparative Example 7 A coating test similar to that in Example 1 was conducted using 3-glycidoxylpropyltrimethoxysilane instead of the functional silane compound used in Example 1. The results are shown in Table 1. Comparative Example 8 A coating test similar to that in Example 1 was conducted using vinyltriethoxysilane instead of the functional silane compound used in Example 1. The results are shown in Table 1. Comparative Example 9 A coating test similar to that in Example 1 was conducted using 3-methacryloxypropyltrimethoxysilane instead of the functional silane compound used in Example 1. The results are shown in Table 1. Comparative Example 10 A coating test similar to that in Example 1 was conducted using 2-(3,4-epoxycyclohexyl)trimethoxysilane instead of the functional silane compound used in Example 1. The results are shown in Table 1. Comparative Example 11 A coating test similar to that in Example 1 was conducted using 3-mercaptopropyltrimethoxysilane instead of the functional silane compound used in Example 1. The results are shown in Table 1. Example 4 A coating test similar to that in Example 2 was conducted using a glass substrate on which an ITO transparent electrode was deposited instead of the glass substrate used in Example 2. The results are shown in Table 1. Comparative Example 12 A coating test was conducted in the same manner as in Comparative Example 5, using instead of the glass substrate used in Comparative Example 5 the glass substrate on which the ITO transparent electrode used in Example 4 was deposited. The results are shown in Table 1. Comparative Example 13 A coating test was conducted in the same manner as in Comparative Example 2, using a silicon wafer substrate instead of the glass substrate used in Comparative Example 2. The results are shown in Table 1. Comparative Example 14 Comparative Example instead of the glass substrate used in Comparative Example 5
A coating test was conducted in the same manner as in Comparative Example 5 using the silicon wafer substrate used in Example 13. The results are shown in Table 1.
【表】【table】
Claims (1)
有する可溶性ポリイミド樹脂と下記一般式()
で示される官能性シラン化合物とからなることを
特徴とする可溶性ポリイミド樹脂組成物。 (式中、Rは、2価の有機基を示す。) YR1SiR2 3-nXn ……() 〔式中、YはCH3COOC2H4NH−基を有する
有機基、R1は炭素数1〜10の2価の炭化水素基、
R2は炭素数1〜5のアルキル基、XはOR3で示
されるアルコキシ基またはOCOR4で示されるア
ルコキシカルボニル基(ここで、R3およびR4は、
炭素数1〜10のアルキル基である)を示し、mは
1〜3の整数を示す。〕[Claims] 1. A soluble polyimide resin having a repeating unit represented by the following general formula () and the following general formula ()
A soluble polyimide resin composition comprising a functional silane compound represented by: (In the formula, R represents a divalent organic group.) YR 1 SiR 2 3-n X n ... () [In the formula, Y is an organic group having a CH 3 COOC 2 H 4 NH- group, R 1 is a divalent hydrocarbon group having 1 to 10 carbon atoms,
R 2 is an alkyl group having 1 to 5 carbon atoms, X is an alkoxy group represented by OR 3 or an alkoxycarbonyl group represented by OCOR 4 (here, R 3 and R 4 are
is an alkyl group having 1 to 10 carbon atoms), and m represents an integer of 1 to 3. ]
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1262085A JPS61171762A (en) | 1985-01-28 | 1985-01-28 | Soluble polyimide resin composition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1262085A JPS61171762A (en) | 1985-01-28 | 1985-01-28 | Soluble polyimide resin composition |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61171762A JPS61171762A (en) | 1986-08-02 |
JPH0455457B2 true JPH0455457B2 (en) | 1992-09-03 |
Family
ID=11810421
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1262085A Granted JPS61171762A (en) | 1985-01-28 | 1985-01-28 | Soluble polyimide resin composition |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61171762A (en) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0304022A3 (en) * | 1987-08-21 | 1990-12-19 | E.I. Du Pont De Nemours And Company | Polyimide coating composition |
JP2631878B2 (en) * | 1988-09-27 | 1997-07-16 | 宇部興産株式会社 | Polyimide siloxane composition and film |
JP2658632B2 (en) * | 1991-06-12 | 1997-09-30 | 信越化学工業株式会社 | Primer composition for bonding epoxy resin molding materials for semiconductor encapsulation |
JP5130866B2 (en) * | 2007-10-23 | 2013-01-30 | Jsr株式会社 | Resin composition |
JP4991943B2 (en) | 2010-02-26 | 2012-08-08 | キヤノン株式会社 | Optical member, polyimide, and manufacturing method thereof |
JP5932222B2 (en) | 2011-01-19 | 2016-06-08 | キヤノン株式会社 | Optical member and manufacturing method thereof |
TWI649411B (en) | 2013-02-01 | 2019-02-01 | 日產化學工業股份有限公司 | Liquid crystal alignment treatment agent, liquid crystal alignment film, and liquid crystal display element |
CN105359032B (en) | 2013-05-01 | 2017-09-05 | 日产化学工业株式会社 | Aligning agent for liquid crystal, liquid crystal orientation film and liquid crystal represent element |
KR102135493B1 (en) | 2013-05-01 | 2020-08-26 | 닛산 가가쿠 가부시키가이샤 | Liquid crystal alignment agent, liquid crystal alignment film, and liquid crystal display element |
TWI635122B (en) | 2014-11-13 | 2018-09-11 | 日商日產化學工業股份有限公司 | Liquid crystal alignment treatment agent, liquid crystal alignment film and liquid crystal display element |
JP6683955B2 (en) | 2014-11-13 | 2020-04-22 | 日産化学株式会社 | Liquid crystal alignment treatment agent, liquid crystal alignment film and liquid crystal display element |
JP6572911B2 (en) | 2014-12-25 | 2019-09-11 | 日産化学株式会社 | Liquid crystal alignment agent, liquid crystal alignment film, and liquid crystal display element |
KR20210108962A (en) | 2018-12-27 | 2021-09-03 | 닛산 가가쿠 가부시키가이샤 | Liquid crystal aligning agent, liquid crystal aligning film, and liquid crystal display element |
KR20210108963A (en) | 2018-12-27 | 2021-09-03 | 닛산 가가쿠 가부시키가이샤 | Liquid crystal aligning agent, liquid crystal aligning film, and liquid crystal display element |
WO2020184424A1 (en) | 2019-03-08 | 2020-09-17 | 日産化学株式会社 | Liquid crystal aligning agent, liquid crystal alignment film, and liquid crystal display element |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59179650A (en) * | 1983-03-31 | 1984-10-12 | Nitto Electric Ind Co Ltd | Heat-resistant, electrically conductive paste composition |
JPS59179651A (en) * | 1983-03-31 | 1984-10-12 | Nitto Electric Ind Co Ltd | Heat-resistant, electrically conductive paste composition |
JPS59199720A (en) * | 1983-04-28 | 1984-11-12 | Japan Synthetic Rubber Co Ltd | Preparation of soluble polyimide compound |
JPS59232149A (en) * | 1983-06-16 | 1984-12-26 | Japan Synthetic Rubber Co Ltd | Heat-resistant paint |
JPS601257A (en) * | 1983-06-20 | 1985-01-07 | Japan Synthetic Rubber Co Ltd | Polyamic acid solution |
-
1985
- 1985-01-28 JP JP1262085A patent/JPS61171762A/en active Granted
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59179650A (en) * | 1983-03-31 | 1984-10-12 | Nitto Electric Ind Co Ltd | Heat-resistant, electrically conductive paste composition |
JPS59179651A (en) * | 1983-03-31 | 1984-10-12 | Nitto Electric Ind Co Ltd | Heat-resistant, electrically conductive paste composition |
JPS59199720A (en) * | 1983-04-28 | 1984-11-12 | Japan Synthetic Rubber Co Ltd | Preparation of soluble polyimide compound |
JPS59232149A (en) * | 1983-06-16 | 1984-12-26 | Japan Synthetic Rubber Co Ltd | Heat-resistant paint |
JPS601257A (en) * | 1983-06-20 | 1985-01-07 | Japan Synthetic Rubber Co Ltd | Polyamic acid solution |
Also Published As
Publication number | Publication date |
---|---|
JPS61171762A (en) | 1986-08-02 |
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