JPH0453446U - - Google Patents
Info
- Publication number
- JPH0453446U JPH0453446U JP9665690U JP9665690U JPH0453446U JP H0453446 U JPH0453446 U JP H0453446U JP 9665690 U JP9665690 U JP 9665690U JP 9665690 U JP9665690 U JP 9665690U JP H0453446 U JPH0453446 U JP H0453446U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum container
- wall
- corrugation
- valleys
- trapezoid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9665690U JPH0453446U (uk) | 1990-09-14 | 1990-09-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9665690U JPH0453446U (uk) | 1990-09-14 | 1990-09-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0453446U true JPH0453446U (uk) | 1992-05-07 |
Family
ID=31836364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9665690U Pending JPH0453446U (uk) | 1990-09-14 | 1990-09-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0453446U (uk) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10216500A (ja) * | 1997-02-10 | 1998-08-18 | Shibaura Eng Works Co Ltd | 真空容器及びこれを用いた成膜装置 |
-
1990
- 1990-09-14 JP JP9665690U patent/JPH0453446U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10216500A (ja) * | 1997-02-10 | 1998-08-18 | Shibaura Eng Works Co Ltd | 真空容器及びこれを用いた成膜装置 |