JPH0453446U - - Google Patents
Info
- Publication number
- JPH0453446U JPH0453446U JP9665690U JP9665690U JPH0453446U JP H0453446 U JPH0453446 U JP H0453446U JP 9665690 U JP9665690 U JP 9665690U JP 9665690 U JP9665690 U JP 9665690U JP H0453446 U JPH0453446 U JP H0453446U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum container
- wall
- corrugation
- valleys
- trapezoid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Physical Vapour Deposition (AREA)
Description
図面は本考案の実施例を示し、第１図は側壁の
拡大断面図、第２図は真空容器の正面図、第３図
は同横断面図、第４図は要部の拡大断面図、第５
図は変形例の側壁の拡大断面図である。
１……真空容器、５ａ，５ｂ……側壁、１１…
…内壁、１２，２１……外壁。
The drawings show an embodiment of the present invention; FIG. 1 is an enlarged sectional view of the side wall, FIG. 2 is a front view of the vacuum container, FIG. 3 is a cross-sectional view thereof, and FIG. 4 is an enlarged sectional view of the main part. Fifth
The figure is an enlarged sectional view of a side wall of a modified example. 1... Vacuum container, 5a, 5b... Side wall, 11...
...Inner wall, 12,21...Outer wall.
Claims (1)
、 上記真空容器が、内壁と連続する波形または台
形状の外壁とを、波形または台形の谷において溶
着した二重壁構造の側壁を備え、アルミニウムで
形成されている ことを特徴とする真空容器。[Claims for Utility Model Registration] A vacuum container for use in producing thin films, wherein the vacuum container has a double wall structure in which an inner wall and a continuous corrugated or trapezoidal outer wall are welded at the valleys of the corrugation or trapezoid. A vacuum container characterized in that it has a side wall of 1 and is made of aluminum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9665690U JPH0453446U (en) | 1990-09-14 | 1990-09-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9665690U JPH0453446U (en) | 1990-09-14 | 1990-09-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0453446U true JPH0453446U (en) | 1992-05-07 |
Family
ID=31836364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9665690U Pending JPH0453446U (en) | 1990-09-14 | 1990-09-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0453446U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10216500A (en) * | 1997-02-10 | 1998-08-18 | Shibaura Eng Works Co Ltd | Vacuum vessel and film forming device using same |
-
1990
- 1990-09-14 JP JP9665690U patent/JPH0453446U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10216500A (en) * | 1997-02-10 | 1998-08-18 | Shibaura Eng Works Co Ltd | Vacuum vessel and film forming device using same |