JPH0453241B2 - - Google Patents

Info

Publication number
JPH0453241B2
JPH0453241B2 JP59206414A JP20641484A JPH0453241B2 JP H0453241 B2 JPH0453241 B2 JP H0453241B2 JP 59206414 A JP59206414 A JP 59206414A JP 20641484 A JP20641484 A JP 20641484A JP H0453241 B2 JPH0453241 B2 JP H0453241B2
Authority
JP
Japan
Prior art keywords
optical system
lens
light beam
light
parallel light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59206414A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6184505A (ja
Inventor
Minokichi Ban
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP59206414A priority Critical patent/JPS6184505A/ja
Publication of JPS6184505A publication Critical patent/JPS6184505A/ja
Publication of JPH0453241B2 publication Critical patent/JPH0453241B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0221—Testing optical properties by determining the optical axis or position of lenses
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP59206414A 1984-10-03 1984-10-03 位置検出装置 Granted JPS6184505A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59206414A JPS6184505A (ja) 1984-10-03 1984-10-03 位置検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59206414A JPS6184505A (ja) 1984-10-03 1984-10-03 位置検出装置

Publications (2)

Publication Number Publication Date
JPS6184505A JPS6184505A (ja) 1986-04-30
JPH0453241B2 true JPH0453241B2 (en, 2012) 1992-08-26

Family

ID=16522970

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59206414A Granted JPS6184505A (ja) 1984-10-03 1984-10-03 位置検出装置

Country Status (1)

Country Link
JP (1) JPS6184505A (en, 2012)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2457253C2 (de) * 1974-12-04 1982-09-02 Krautkrämer, GmbH, 5000 Köln Optisches interferometrisches Verfahren und Vorrichtung zur berührungslosen Messung der durch Ultraschallwellen verursachten Oberflächenauslenkung eines Prüflings
DE2908757C2 (de) * 1979-03-06 1986-10-16 Baumgartner, Viktor, 8028 Taufkirchen Abstandsänderungs-Meßanordnung
JPS59114404A (ja) * 1982-12-22 1984-07-02 Hitachi Ltd 磁気ヘツドの形状および取付姿勢測定方法

Also Published As

Publication number Publication date
JPS6184505A (ja) 1986-04-30

Similar Documents

Publication Publication Date Title
CN107843213B (zh) 共焦自准直中心偏和曲率半径测量方法与装置
CN104568389B (zh) 双边错位差动共焦元件参数测量方法
US4732483A (en) Interferometric surface profiler
CN105758336B (zh) 反射式激光差动共焦曲率半径测量方法与装置
CN102519368A (zh) 法向位移和角度传感光学测头及测量方法
CN102679894B (zh) 反射式差动共焦透镜中心厚度测量方法
CN101226344A (zh) 测量光学系统参数的测量装置及其测量方法
CN102679895A (zh) 反射式共焦透镜中心厚度测量方法
CN109186477B (zh) 后置分光瞳激光差动共焦透镜中心厚度测量方法与装置
US7435941B2 (en) Methods for measuring optical characteristics by differential diffractive scanning
GB2355310A (en) White light interferometer
CN109990732B (zh) 横向相减差动共焦曲率半径测量方法
JP2000241128A (ja) 面間隔測定方法および装置
JP5704150B2 (ja) 白色干渉装置及び白色干渉装置の位置及び変位測定方法
JPS5979104A (ja) 光学装置
Xu et al. Development and verification of a high-precision laser measurement system for straightness and parallelism measurement
CN109931874B (zh) 球型惯性元件配合间隙激光差动共焦精密测量方法
TW201321713A (zh) 三維量測系統
JPS63193003A (ja) 凹部深さ・膜厚測定装置
CN105806237B (zh) 反射式激光共焦曲率半径测量方法与装置
CN103673927A (zh) 反射腔式差动共焦超大曲率半径测量方法
JPH0453241B2 (en, 2012)
JPS6184506A (ja) 光路長測定装置
US7898671B2 (en) Interferometer having a mirror system for measuring a measured object
Fukatsu et al. Development of an optical stylus displacement sensor for surface profiling instruments

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term