JPH0453061U - - Google Patents

Info

Publication number
JPH0453061U
JPH0453061U JP9692490U JP9692490U JPH0453061U JP H0453061 U JPH0453061 U JP H0453061U JP 9692490 U JP9692490 U JP 9692490U JP 9692490 U JP9692490 U JP 9692490U JP H0453061 U JPH0453061 U JP H0453061U
Authority
JP
Japan
Prior art keywords
cathode
target
workpiece
conveyance
conveyance means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9692490U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9692490U priority Critical patent/JPH0453061U/ja
Publication of JPH0453061U publication Critical patent/JPH0453061U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9692490U 1990-09-13 1990-09-13 Pending JPH0453061U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9692490U JPH0453061U (OSRAM) 1990-09-13 1990-09-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9692490U JPH0453061U (OSRAM) 1990-09-13 1990-09-13

Publications (1)

Publication Number Publication Date
JPH0453061U true JPH0453061U (OSRAM) 1992-05-06

Family

ID=31836858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9692490U Pending JPH0453061U (OSRAM) 1990-09-13 1990-09-13

Country Status (1)

Country Link
JP (1) JPH0453061U (OSRAM)

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