JPH0453061U - - Google Patents
Info
- Publication number
- JPH0453061U JPH0453061U JP9692490U JP9692490U JPH0453061U JP H0453061 U JPH0453061 U JP H0453061U JP 9692490 U JP9692490 U JP 9692490U JP 9692490 U JP9692490 U JP 9692490U JP H0453061 U JPH0453061 U JP H0453061U
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- target
- workpiece
- conveyance
- conveyance means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図及び第２図はこの考案の第１実施例に係
るスパツタリング装置を示し、第１図は全体の概
略平面図、第２図は第１図における−線断面
図である。第３図は支持手段を変更した第２実施
例を示す縦断側面図である。
１……真空槽、２……搬送手段、４……ワーク
、７……カソード、８……ターゲツト、９……支
持手段。
1 and 2 show a sputtering apparatus according to a first embodiment of the invention, with FIG. 1 being a schematic plan view of the entire device, and FIG. 2 being a sectional view taken along the line -- in FIG. FIG. 3 is a longitudinal sectional side view showing a second embodiment in which the supporting means is changed. DESCRIPTION OF SYMBOLS 1...Vacuum chamber, 2...Transporting means, 4...Work, 7...Cathode, 8...Target, 9...Supporting means.
Claims (1)
する搬送手段が設けられ、 成膜物質を面状に放射するターゲツトが前記搬
送手段に沿つて複数個設けられており、 ターゲツトが装着されるカソードを支持手段で
変向可能に支持し、 ターゲツトの放射方向がワークの搬送面に対し
て交差方向へ変向設定できるよう構成されている
スパツタリング装置。[Scope of Claim for Utility Model Registration] A conveyance means is provided inside a vacuum chamber to transport the workpiece in one direction, and a plurality of targets are provided along the conveyance means for emitting a film-forming substance in a planar manner. A sputtering device comprising: a cathode on which a target is mounted; and a support means that supports the cathode so that the direction thereof can be changed, so that the radial direction of the target can be set to be perpendicular to the conveyance surface of the workpiece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9692490U JPH0453061U (en) | 1990-09-13 | 1990-09-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9692490U JPH0453061U (en) | 1990-09-13 | 1990-09-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0453061U true JPH0453061U (en) | 1992-05-06 |
Family
ID=31836858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9692490U Pending JPH0453061U (en) | 1990-09-13 | 1990-09-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0453061U (en) |
-
1990
- 1990-09-13 JP JP9692490U patent/JPH0453061U/ja active Pending
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