JPH0453059U - - Google Patents

Info

Publication number
JPH0453059U
JPH0453059U JP9361790U JP9361790U JPH0453059U JP H0453059 U JPH0453059 U JP H0453059U JP 9361790 U JP9361790 U JP 9361790U JP 9361790 U JP9361790 U JP 9361790U JP H0453059 U JPH0453059 U JP H0453059U
Authority
JP
Japan
Prior art keywords
vacuum
tank
evaporation
rotary
vapor deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9361790U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9361790U priority Critical patent/JPH0453059U/ja
Publication of JPH0453059U publication Critical patent/JPH0453059U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9361790U 1990-09-07 1990-09-07 Pending JPH0453059U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9361790U JPH0453059U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-09-07 1990-09-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9361790U JPH0453059U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-09-07 1990-09-07

Publications (1)

Publication Number Publication Date
JPH0453059U true JPH0453059U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-05-06

Family

ID=31830967

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9361790U Pending JPH0453059U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-09-07 1990-09-07

Country Status (1)

Country Link
JP (1) JPH0453059U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0288765A (ja) * 1988-09-26 1990-03-28 Tokuda Seisakusho Ltd 真空処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0288765A (ja) * 1988-09-26 1990-03-28 Tokuda Seisakusho Ltd 真空処理装置

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