JPH04522B2 - - Google Patents

Info

Publication number
JPH04522B2
JPH04522B2 JP60076712A JP7671285A JPH04522B2 JP H04522 B2 JPH04522 B2 JP H04522B2 JP 60076712 A JP60076712 A JP 60076712A JP 7671285 A JP7671285 A JP 7671285A JP H04522 B2 JPH04522 B2 JP H04522B2
Authority
JP
Japan
Prior art keywords
light
parallel
film thickness
lens
optical fibers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60076712A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61235707A (ja
Inventor
Chikayasu Yamazaki
Mutsumi Hayashi
Ichiro Kumo
Jun Torikai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Priority to JP60076712A priority Critical patent/JPS61235707A/ja
Publication of JPS61235707A publication Critical patent/JPS61235707A/ja
Publication of JPH04522B2 publication Critical patent/JPH04522B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
JP60076712A 1985-04-12 1985-04-12 膜厚測定装置 Granted JPS61235707A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60076712A JPS61235707A (ja) 1985-04-12 1985-04-12 膜厚測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60076712A JPS61235707A (ja) 1985-04-12 1985-04-12 膜厚測定装置

Publications (2)

Publication Number Publication Date
JPS61235707A JPS61235707A (ja) 1986-10-21
JPH04522B2 true JPH04522B2 (fr) 1992-01-07

Family

ID=13613153

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60076712A Granted JPS61235707A (ja) 1985-04-12 1985-04-12 膜厚測定装置

Country Status (1)

Country Link
JP (1) JPS61235707A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1987942A2 (fr) 2000-09-21 2008-11-05 Toray Industries Inc. Feuille obtenue par l'extrusion et le moulage d'une matière première

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5227861A (en) * 1989-09-25 1993-07-13 Mitsubishi Denki Kabushiki Kaisha Apparatus for and method of evaluating multilayer thin film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1987942A2 (fr) 2000-09-21 2008-11-05 Toray Industries Inc. Feuille obtenue par l'extrusion et le moulage d'une matière première

Also Published As

Publication number Publication date
JPS61235707A (ja) 1986-10-21

Similar Documents

Publication Publication Date Title
US5608530A (en) Inspection device for measuring a geometric dimension of a part
US7298468B2 (en) Method and measuring device for contactless measurement of angles or angle changes on objects
US4919535A (en) Reflectance measuring apparatus for making contactless measurements
KR100521616B1 (ko) 분광 반사율 측정 장치 및 분광 반사율 측정 방법
JP2003515738A (ja) 特に不透明液滴といったような実質的に球形の粒子のサイズを回折によって測定するための装置
US4728196A (en) Arrangement for determining a surface structure, especially for roughness
US20080137061A1 (en) Displacement Measurement Sensor Using the Confocal Principle
CN110736721A (zh) 基于衍射光栅的玻璃平板折射率均匀性检测装置及检测方法
CN110836642A (zh) 一种基于三角测量法的彩色三角位移传感器及其测量方法
JPS61292043A (ja) 分光測色計の光検出プロ−ブ
US20050062964A1 (en) Real-time goniospectrophotometer
US4792695A (en) Contact-free measuring apparatus having an F-theta-corrected, catadioptric objective and method for using the same
US3602596A (en) Roughness testing meters
US6597451B1 (en) Spectrometry measuring apparatus
JP2001512821A (ja) マイクロ偏光計
US5440383A (en) Phase detection deflectometer-type optical device having a large measuring range
KR840002359B1 (ko) 적외선 필름 두께 측정기
JP2008026049A (ja) フランジ焦点距離測定装置
JPH04522B2 (fr)
JPH0364816B2 (fr)
JP2003050109A (ja) 面形状測定装置および面形状測定方法
JP3871415B2 (ja) 分光透過率測定装置
CN210833435U (zh) 一种基于三角测量法的彩色三角位移传感器
US20080130014A1 (en) Displacement Measurement Sensor Using the Confocal Principle with an Optical Fiber
US20070242267A1 (en) Optical Focusing Devices

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees