JPH0449090A - Write-once type optical recording member - Google Patents

Write-once type optical recording member

Info

Publication number
JPH0449090A
JPH0449090A JP2160477A JP16047790A JPH0449090A JP H0449090 A JPH0449090 A JP H0449090A JP 2160477 A JP2160477 A JP 2160477A JP 16047790 A JP16047790 A JP 16047790A JP H0449090 A JPH0449090 A JP H0449090A
Authority
JP
Japan
Prior art keywords
plasma
recording
fcb
recording medium
write
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2160477A
Other languages
Japanese (ja)
Inventor
Satoshi Taguchi
敏 田口
Hiroshi Shinagawa
品川 宏
Akio Omae
大前 昭雄
Tomoyuki Takada
朋幸 高田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Chemical Co Ltd
Original Assignee
Sumitomo Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Chemical Co Ltd filed Critical Sumitomo Chemical Co Ltd
Priority to JP2160477A priority Critical patent/JPH0449090A/en
Publication of JPH0449090A publication Critical patent/JPH0449090A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain the title recording material having good recording and reproducing properties and excellent in environment resistance by forming a recording medium from a plasma polymerization film of Te and octafluorocyclobutane and forming an undercoat layer and a protective layer from a plasma polymerization film of FCB. CONSTITUTION:An undercoat layer composed of a plasma polymerization film of FCB is formed to a substrate. Plasma polymerization is carried out by supplying FCB into a vacuum tank held to 10<-5> - 10<-1> Torr in a gaseous state and carrying out discharge by a high frequency power supply to bring FCB to plasma state to deposit the same on the substrate as a polymerization film. Subsequently, a recording medium composed of a plasma polymer or Te and FCB is formed to the substrate on which the undercoat layer of the FCB plasma polymerization film is formed. The recording medium can be formed by carrying out the vacuum vapor deposition of Te while the plasma polymerization of FCB is performed.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 本発明は高感度で、キャリア対ノイズ比(以下、C/N
と記す)が高(、かつ耐環境性に優れた追記型光記録部
材に関する。
[Detailed Description of the Invention] <Industrial Application Field> The present invention has high sensitivity and a carrier-to-noise ratio (hereinafter referred to as C/N
The present invention relates to a write-once optical recording member that has a high environmental resistance (denoted as ) and has excellent environmental resistance.

〈従来の技術〉 近年、光ディスク等の光記録部材は高密度記録およびラ
ンダムアクセスが可能であり、しかも可搬であるという
磁気ディスク、磁気テープ等の従来の情報記録用部材に
はない記録部材としてコンビニ−ター、ビデオ等の情報
記録の分野で注目されている。
<Prior art> In recent years, optical recording materials such as optical disks are capable of high-density recording and random access, and are also portable, which is not the case with conventional information recording materials such as magnetic disks and magnetic tapes. It is attracting attention in the field of information recording for convenience stores, videos, etc.

光ディスクはその記録・再生の特徴から、再生専用型、
追記型、消去可能型に大まかに分類できる。
Due to its recording and playback characteristics, optical discs are read-only type,
They can be roughly classified into write-once type and erasable type.

この中で追記型光ディスクとは、1回のみ記録が可能で
あるものを指す。この型の光ディスクは、−度配録した
情報の消去はできないが、逆に長期間の保存が必要であ
ったり、消去すると困る情報等の配録の分野での使用が
期待されている。
Among these, the write-once optical disc refers to one on which recording is possible only once. Although this type of optical disk cannot erase recorded information, it is expected to be used in the field of recording information that needs to be stored for a long period of time or that is difficult to erase.

追記型光ディスクでは書き込みレーザーパルス照射部分
の記録媒体の昇華・融解により、小孔を形成せしめ、記
録部分と非記録部分との反射率や透過率の違いから、情
報の読み出しを行う小孔形成型光ディスクがよく知られ
ている。
In write-once optical discs, small holes are formed by sublimation and melting of the recording medium in the area irradiated with the writing laser pulse, and information is read out based on the difference in reflectance and transmittance between recorded and non-recorded areas. Optical discs are well known.

小孔形成型の光ディスクの記録媒体としてはA1、B1
、Te、Pb、Mo等の金属、半金属、半導体の単体の
薄膜が使用可能であることが知られている。しかし、こ
れらの金属、半金属、半導体の単体の薄膜では記録再生
特性が不充分なた給、C/Nが低かったり、低感度であ
ったり、また耐環境性に問題があったりし、これらの特
性を改良するために種々検討が行われてきた。
A1 and B1 are used as recording media for small hole-forming optical discs.
It is known that single thin films of metals, semimetals, and semiconductors such as , Te, Pb, and Mo can be used. However, single thin films of these metals, metalloids, and semiconductors have insufficient recording/reproducing characteristics, low C/N, low sensitivity, and problems with environmental resistance. Various studies have been conducted to improve the characteristics of

特開昭57−98394号等には、記録層としてTe等
の半金属とC52等の有機物のプラズマ重合物との複合
膜を用いることにより、経時安定性が向上でき、良好な
記録再生特性が得られることが示されている。
JP-A No. 57-98394 and others disclose that by using a composite film of semimetal such as Te and plasma polymer of organic substance such as C52 as a recording layer, stability over time can be improved and good recording and reproducing characteristics can be obtained. It has been shown that it can be obtained.

特開昭59−90246号には、下地層にテトラフルオ
ロエチレン等の不飽和フッ化カーボンのプラズマ重合膜
を用いることにより、高感度の追記型光記録部材が得ら
れることが示されている。
JP-A-59-90246 discloses that a highly sensitive write-once optical recording member can be obtained by using a plasma polymerized film of unsaturated fluorinated carbon such as tetrafluoroethylene as the underlayer.

特開昭63−166045号には、メタン、エチレン、
メタノール、アセトン、ベンゼン、二硫化炭素、右よび
ピリジン等の有機化合物のプラズマ重合膜を保護層に用
いることが示めされている。
JP-A-63-166045 describes methane, ethylene,
It has been shown that plasma polymerized films of organic compounds such as methanol, acetone, benzene, carbon disulfide, and pyridine can be used as protective layers.

〈発明が解決しようとする課題〉 従来の方法による記録・再生特性の改良では耐環境性が
不充分であったり、近年の高転送レートを有する、高速
回転ドライブに用いるには未だ感度やC/Nが低く必ず
しも満足な記録・再生特性は得られていない。
<Problems to be Solved by the Invention> Improvements in recording/playback characteristics using conventional methods may not have sufficient environmental resistance, or may still have insufficient sensitivity or C/C ratio to be used in high-speed rotation drives with high transfer rates in recent years. Since N is low, satisfactory recording/reproducing characteristics are not necessarily obtained.

本発明の目的は高感度、高C/Nという良好な記録再生
特性を有すし、かつ耐環境性に優れた追記型光記録部材
を提供することにある。
An object of the present invention is to provide a write-once optical recording member that has good recording and reproducing characteristics such as high sensitivity and high C/N, and has excellent environmental resistance.

本発明者らは、従来用いられていなかった飽和フッ化カ
ーボンに着目し、鋭意検討を重ねた結果、飽和フッ化カ
ーボンの中でも環状のPCBがプラズマ重合により均等
な膜を形成し、追記型光記録部材の記録層、下地層およ
び保護層に用いることにより上記の目的を達成できるこ
とを見い出し本発明に至った。
The present inventors focused on saturated fluorinated carbon, which had not been used in the past, and as a result of intensive studies, they found that even among saturated fluorinated carbons, cyclic PCB forms a uniform film through plasma polymerization, and a write-once optical The inventors have discovered that the above objects can be achieved by using the composition in the recording layer, underlayer and protective layer of a recording member, leading to the present invention.

〈課題を解決するための手段〉 すなわち本発明は、記録媒体、該記録媒体と基板との間
に下地層および該記録媒体の上に保護層を有する追記型
光記録部材において、記録媒体がTeとオクタフルオロ
シクロブタン(以下、PCBと記す)のプラズマ重合膜
とからなり、下地層および保護層がPCBのプラズマ重
合膜からなる追記型光記録部材である。
<Means for Solving the Problem> That is, the present invention provides a write-once optical recording member having a recording medium, an underlayer between the recording medium and a substrate, and a protective layer on the recording medium, in which the recording medium is made of Te. and a plasma-polymerized film of octafluorocyclobutane (hereinafter referred to as PCB), and the base layer and the protective layer are made of the plasma-polymerized film of PCB.

本発明に用いられる基板としては、ポリカーボネートや
ポリメチルメタクリレートを成形したものや、ガラスや
ポリカーボネート上に紫外線硬化樹脂を2P法でグルー
プやフォーマット形成した、いわゆる2P基板等、−船
釣に光ディスクに用いられる基板を挙げることができる
Substrates used in the present invention include those molded from polycarbonate or polymethyl methacrylate, and so-called 2P substrates in which groups and formats are formed on glass or polycarbonate using the 2P method. Examples of substrates that can be used include:

上記基板上にPCBのプラズマ重合膜の下地層を形成す
る。プラズマ重合は10−S〜1O−1Torrの真空
槽内にPCBをガス状で供給し、高周波電源により放電
を行うことにより、PCBをプラズマ状態とし基板上に
重合膜として堆積させる。印加する電力は50〜500
Wが一般に用いられる。また下地層としてのPCBプラ
ズマ重合膜は通常約10〜300人の膜厚で堆積させる
A base layer of a plasma polymerized PCB film is formed on the substrate. In plasma polymerization, PCB is supplied in a gaseous state into a vacuum chamber of 10 -S to 10 -1 Torr, and discharge is performed using a high frequency power source, thereby converting the PCB into a plasma state and depositing it as a polymer film on the substrate. The applied power is 50 to 500
W is commonly used. Further, the PCB plasma polymerized film as an underlayer is usually deposited to a thickness of about 10 to 300 layers.

PCBプラズマ重合膜の下地層を形成させた基板に、次
いでTeとPCBのプラズマ重合物とからなる記録媒体
を形成する。これらの記録媒体はPCBのプラズマ重合
を行いながらTeの真空蒸着を行うことにより形成する
ことができる。
Next, a recording medium made of a plasma polymer of Te and PCB is formed on the substrate on which a base layer of a PCB plasma polymer film is formed. These recording media can be formed by performing vacuum evaporation of Te while performing plasma polymerization of PCB.

基板上に下地層、記録媒体を形成したのち、PCBプラ
ズマ重合膜の保護層を形成する。形成方法は前記のF’
CBプラズマ膜の下地層と同様に行われる。保護層の膜
厚は数〜100Aが適当である。
After forming a base layer and a recording medium on a substrate, a protective layer of a PCB plasma polymerized film is formed. The formation method is the above-mentioned F'
This is done in the same way as the base layer of the CB plasma film. The appropriate thickness of the protective layer is several to 100 Å.

また記録媒体の記録・再生特性を安定化させるための前
記の成膜を行った後、約50〜100℃でTeの結晶化
を行う。
Further, after the above-described film formation for stabilizing the recording/reproducing characteristics of the recording medium is performed, Te is crystallized at about 50 to 100°C.

〈発明の効果〉 本発明によれば、従来の追記型光記録部材に比較して、
高感度、高C/Nでかつ耐H#境性に優れた追記型光記
録部材が提供される。
<Effects of the Invention> According to the present invention, compared to conventional write-once type optical recording members,
A write-once optical recording member having high sensitivity, high C/N, and excellent H# boundary resistance is provided.

また、同一のプラズマ重合膜だけを用いるので、異なる
プラズマ重合膜を用いる場合に比べて切り替え時のプラ
ズマの不安定性がなく効率良く成膜することができる。
Furthermore, since only the same plasma polymerized film is used, there is no plasma instability during switching compared to the case where different plasma polymerized films are used, and the film can be formed efficiently.

〈実施例〉 以下、実施例により本発明をより具体的に説明するが、
本発明はこれらに限定されるものではない。
<Example> The present invention will be explained in more detail with reference to Examples below.
The present invention is not limited to these.

実施例1 130M−φのプリグループ付基板を真空蒸着装置内に
セットし、PCBガスを導入し高周波コイルに200W
の電力を印加し、PCBのプラズマ重合膜を基板上に約
40人形成した。
Example 1 A 130M-φ substrate with a pregroup was set in a vacuum evaporation device, PCB gas was introduced, and a high frequency coil was powered at 200W.
A plasma polymerized film of PCB was formed on the substrate by about 40 people.

更にプラズマ重合を続けながら、Teを抵抗加熱方式の
ボードより蒸発させ、Te−PCB複合記録媒体を約2
00人形成した。ただし、複合膜形成時の高周波電力は
100Wとした。
Further, while plasma polymerization continues, Te is evaporated from the resistance heating board, and the Te-PCB composite recording medium is heated to about 2
00 people formed. However, the high frequency power at the time of forming the composite film was 100W.

次にTeの蒸着を停止し、高周波電力200Wを印加し
、PCBプラズマ重合重合的20人形成し、保護層とし
た。
Next, the vapor deposition of Te was stopped, a high frequency power of 200 W was applied, and a PCB was formed by plasma polymerization to form a protective layer.

こうして得られた追記型光記録部材(以下、ディスク単
板と称する)を真空蒸着装置から取り出し、相対湿度4
0%以下のオープンに入れて70℃で2時間Teの結晶
化を行った。
The write-once optical recording member thus obtained (hereinafter referred to as a single disk) was taken out of the vacuum deposition apparatus, and the relative humidity was 4.
Te was crystallized at 70° C. for 2 hours in an open state of 0% or less.

得られたディスク単板の記録・再生特性を839nmの
レーザー光を用い、再生時のレーザーパワーをQogm
Wとし、記録時のレーザーパワーを変化させて測定した
The recording and playback characteristics of the obtained single disk were measured using an 839nm laser beam, and the laser power during playback was determined by Qogm.
The measurement was performed using W and changing the laser power during recording.

なお、記録位置は半径40鮒、回転数180Qrpm、
周波数5MHzでレーザー照射パルスは50nsであっ
た。
In addition, the recording position is a radius of 40 carp, a rotation speed of 180 Qrpm,
The laser irradiation pulse was 50 ns at a frequency of 5 MHz.

その結果C/Nは52dBであり、感度(キャリヤーが
最高値から6dB下となる記録パワー値)は5.4mW
であり、高C/N、高感度を示した。
As a result, the C/N was 52 dB, and the sensitivity (recording power value at which the carrier was 6 dB below the highest value) was 5.4 mW.
It showed high C/N and high sensitivity.

実施例2〜5 下地層、保護層の膜厚を変化させたほかは実施例1と同
様にしてPCBプラズマ重合下地層、Te−PCB複合
記録媒体、PCBプラズマ重合保護層を有する追記型光
記録部材を作製したのち、Teの結晶化を行った。
Examples 2 to 5 Write-once optical recording having a PCB plasma-polymerized underlayer, a Te-PCB composite recording medium, and a PCB plasma-polymerized protective layer in the same manner as in Example 1 except that the thicknesses of the underlayer and the protective layer were changed. After producing the member, Te was crystallized.

得られた追記型光記録部材の初期配録・再生特性を第1
表に示した。いずれも高感度、高C/Nを示した。
The initial recording and reproduction characteristics of the obtained write-once optical recording member were
Shown in the table. All exhibited high sensitivity and high C/N.

第1表 比較例1 プラズマ重合を行う有機化合物を6弗化プロピレン(以
下、6FPと記す)とし、6FPプラズマ重合下地層、
Te・6FP複合記録媒体、6FFプラズマ重合保護層
よりなる追記型光記録部材を作製した。各層の膜厚は下
地層約40人、記録媒体約200人、保護層約20人で
あった。実施例1と同様にしてTeの結晶化を行った後
、初期記録特性を測定したところ、感度は5.QmWと
高かったが、C/Nは45dBと低かった。
Table 1 Comparative Example 1 The organic compound to be subjected to plasma polymerization was hexafluoropropylene (hereinafter referred to as 6FP), and the 6FP plasma polymerization base layer,
A write-once optical recording member consisting of a Te/6FP composite recording medium and a 6FF plasma polymerized protective layer was produced. The film thickness of each layer was approximately 40 layers for the base layer, approximately 200 layers for the recording medium, and approximately 20 layers for the protective layer. After crystallizing Te in the same manner as in Example 1, the initial recording characteristics were measured, and the sensitivity was 5. Although the QmW was high, the C/N was low at 45 dB.

比較例2 プラズマ重合を行う有機化合物を二硫化炭素(以下、C
32と記す)とし、C82プラズマ重合下地層、Te−
C32複合記録媒体、C8゜プラズマ重合保護層よりな
る追記型光記録部材を作製したのち、Teの結晶化を行
った。各層の膜厚は下地層約40人、記録媒体約200
人、保護層vJ30人であった。実施例1と同様にして
Teの結晶化を行った後、初期記録特性を測定したとこ
ろ、C/Nは52dBと高かったが、感度は5.4mW
と低かった。
Comparative Example 2 The organic compound to be subjected to plasma polymerization was carbon disulfide (hereinafter referred to as C
32), C82 plasma polymerized underlayer, Te-
After producing a write-once optical recording member consisting of a C32 composite recording medium and a C8° plasma polymerized protective layer, Te was crystallized. The film thickness of each layer is approximately 40 layers for the base layer and approximately 200 layers for the recording medium.
There were 30 people in the protective layer vJ. After crystallizing Te in the same manner as in Example 1, the initial recording characteristics were measured, and the C/N was as high as 52 dB, but the sensitivity was 5.4 mW.
It was low.

比較例3 下地層として約40人の6FPプラズマ重合膜、配録媒
体としてTe−C52複合記録媒体の2層からなる追記
型光配録部材を作製したのち、Teの結晶化を行った。
Comparative Example 3 After preparing a write-once optical recording member consisting of two layers: about 40 6FP plasma polymerized films as a base layer and a Te-C52 composite recording medium as a recording medium, Te was crystallized.

初期記録特性はC/Nが52dB、感度は4.3mWで
あり、高感度、高C/N媒体であった。
The initial recording characteristics were a C/N of 52 dB and a sensitivity of 4.3 mW, making it a high-sensitivity, high-C/N medium.

ただし、耐環境試験結果に示すように耐環境性が劣る。However, as shown in the environmental resistance test results, the environmental resistance is poor.

(耐環境試験) 実施例1〜5および比較例1〜3のディスク単板を80
℃、80%RHの環境試験槽に500時間投入し、反射
率の変化を調べた。結果を反射率比(初期の反射率に対
する500時間後の反射率の比率)として第2表に示す
(Environmental resistance test) The disk veneers of Examples 1 to 5 and Comparative Examples 1 to 3 were
The sample was placed in an environmental test tank at 80% RH for 500 hours to examine changes in reflectance. The results are shown in Table 2 as a reflectance ratio (ratio of reflectance after 500 hours to initial reflectance).

本実施例によるものが反射率変化が小さく、耐環境性に
優れていた。
The one according to this example had a small change in reflectance and was excellent in environmental resistance.

第2表Table 2

Claims (1)

【特許請求の範囲】[Claims] 1、記録媒体、該記録媒体と基板との間に下地層および
該記録媒体の上に保護層を有する追記型光記録部材にお
いて、記録媒体がTeとオクタフルオロシクロブタンの
プラズマ重合膜とからなり、下地層および保護層がオク
タフルオロシクロブタンのプラズマ重合膜からなる追記
型光記録部材。
1. A write-once optical recording member having a recording medium, an underlayer between the recording medium and the substrate, and a protective layer on the recording medium, wherein the recording medium is made of a plasma polymerized film of Te and octafluorocyclobutane, A write-once optical recording member in which a base layer and a protective layer are made of a plasma polymerized film of octafluorocyclobutane.
JP2160477A 1990-06-18 1990-06-18 Write-once type optical recording member Pending JPH0449090A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2160477A JPH0449090A (en) 1990-06-18 1990-06-18 Write-once type optical recording member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2160477A JPH0449090A (en) 1990-06-18 1990-06-18 Write-once type optical recording member

Publications (1)

Publication Number Publication Date
JPH0449090A true JPH0449090A (en) 1992-02-18

Family

ID=15715803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2160477A Pending JPH0449090A (en) 1990-06-18 1990-06-18 Write-once type optical recording member

Country Status (1)

Country Link
JP (1) JPH0449090A (en)

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