JPH0448262U - - Google Patents

Info

Publication number
JPH0448262U
JPH0448262U JP9134590U JP9134590U JPH0448262U JP H0448262 U JPH0448262 U JP H0448262U JP 9134590 U JP9134590 U JP 9134590U JP 9134590 U JP9134590 U JP 9134590U JP H0448262 U JPH0448262 U JP H0448262U
Authority
JP
Japan
Prior art keywords
substrate
holder
holding
hole
holding hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9134590U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9134590U priority Critical patent/JPH0448262U/ja
Publication of JPH0448262U publication Critical patent/JPH0448262U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9134590U 1990-08-30 1990-08-30 Pending JPH0448262U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9134590U JPH0448262U (enrdf_load_stackoverflow) 1990-08-30 1990-08-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9134590U JPH0448262U (enrdf_load_stackoverflow) 1990-08-30 1990-08-30

Publications (1)

Publication Number Publication Date
JPH0448262U true JPH0448262U (enrdf_load_stackoverflow) 1992-04-23

Family

ID=31826876

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9134590U Pending JPH0448262U (enrdf_load_stackoverflow) 1990-08-30 1990-08-30

Country Status (1)

Country Link
JP (1) JPH0448262U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007213730A (ja) * 2006-02-10 2007-08-23 Tdk Corp 基板保持装置及び磁気記録媒体の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007213730A (ja) * 2006-02-10 2007-08-23 Tdk Corp 基板保持装置及び磁気記録媒体の製造方法

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