JPH0448262U - - Google Patents
Info
- Publication number
- JPH0448262U JPH0448262U JP9134590U JP9134590U JPH0448262U JP H0448262 U JPH0448262 U JP H0448262U JP 9134590 U JP9134590 U JP 9134590U JP 9134590 U JP9134590 U JP 9134590U JP H0448262 U JPH0448262 U JP H0448262U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- holder
- holding
- hole
- holding hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 27
- 230000002093 peripheral effect Effects 0.000 claims 8
- 229910001285 shape-memory alloy Inorganic materials 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9134590U JPH0448262U (cs) | 1990-08-30 | 1990-08-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9134590U JPH0448262U (cs) | 1990-08-30 | 1990-08-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0448262U true JPH0448262U (cs) | 1992-04-23 |
Family
ID=31826876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9134590U Pending JPH0448262U (cs) | 1990-08-30 | 1990-08-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0448262U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007213730A (ja) * | 2006-02-10 | 2007-08-23 | Tdk Corp | 基板保持装置及び磁気記録媒体の製造方法 |
-
1990
- 1990-08-30 JP JP9134590U patent/JPH0448262U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007213730A (ja) * | 2006-02-10 | 2007-08-23 | Tdk Corp | 基板保持装置及び磁気記録媒体の製造方法 |
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