JPH044819Y2 - - Google Patents
Info
- Publication number
- JPH044819Y2 JPH044819Y2 JP1986179464U JP17946486U JPH044819Y2 JP H044819 Y2 JPH044819 Y2 JP H044819Y2 JP 1986179464 U JP1986179464 U JP 1986179464U JP 17946486 U JP17946486 U JP 17946486U JP H044819 Y2 JPH044819 Y2 JP H044819Y2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- air
- humidity
- constant temperature
- thermocouples
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 8
- 238000005192 partition Methods 0.000 claims description 4
- 239000011810 insulating material Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005057 refrigeration Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Devices For Use In Laboratory Experiments (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Description
【考案の詳細な説明】
産業上の利用分野
本考案は、半導体等の電子部品の温度環境試験
を行なう恒温恒湿装置に関するもので、試験室内
の温度状態により冷凍装置及びヒータ等の装置の
作動を制御できるように構成されたものである。[Detailed description of the invention] Industrial application field The invention relates to a constant temperature and humidity apparatus for performing temperature environment tests on electronic components such as semiconductors. It is configured so that it can be controlled.
従来技術
従来の恒温恒湿装置としては第２図に示される
ように、断熱材で覆われた恒温室１内を仕切板２
を介して試験室３と恒温恒湿空気供給室４とに区
画し、恒温恒湿空気供給室４内にそれぞれ加湿器
５、冷凍サイクルの蒸発器６及びヒータ７並びに
空気循環用のブロワー８が配置され、試験室３と
空気供給室４とを連通させる空気吹出口９及び空
気吸込口１０付近に温湿度検出端１１ａ，１１ｂ
設置されたものがある。Prior Art As shown in Fig. 2, a conventional constant temperature and humidity device uses a partition plate 2 to divide the inside of a constant temperature chamber 1 covered with a heat insulating material.
It is divided into a test chamber 3 and a constant temperature and humidity air supply chamber 4, and a humidifier 5, a refrigeration cycle evaporator 6 and a heater 7, and a blower 8 for air circulation are respectively installed in the constant temperature and humidity air supply chamber 4. Temperature and humidity detection ends 11a and 11b are arranged near the air outlet 9 and air inlet 10 that communicate the test chamber 3 and the air supply chamber 4.
There is something installed.
そして試料１２の代表点Ｏと各温度検出端１１
ａ，１１ｂの距離l1，l2を予め測定しておき、温
湿度検出端１１ａ，１１ｂで検出された温度T1，
T2、湿度H1，H2から代表点における温度及び湿
度を次のように算出し、温湿度制御するようにし
たものが知られている（特開昭60−134130）。 Then, the representative point O of the sample 12 and each temperature detection end 11
The distances l 1 and l 2 between a and 11b are measured in advance, and the temperatures T 1 and 2 detected at the temperature and humidity detection ends 11a and 11b are
It is known that the temperature and humidity at a representative point are calculated from T 2 and humidity H 1 and H 2 as follows, and the temperature and humidity are controlled (Japanese Patent Application Laid-Open No. 134130/1983).
尚１３は温度調節器、１４は演算回路である。 Note that 13 is a temperature controller, and 14 is an arithmetic circuit.
Tn＝（T1l2＋T2l1）／（l1＋l2）
Hn＝（H1l2＋H2l1）／（l1＋l2）
考案が解決しようとする問題点
しかしながらかかる従来の温度湿度の制御方式
の場合には、試験室内の温度分布が均一であるよ
うなときに温度制御がうまくいくが、実際はブロ
ワー等で試験室内に気流を発生させていること、
試験品等が障害物となつて乱流が発生し、必ずし
も温度分布が均一にならず正確な温湿度制御がで
きないといつた不都合があつた。 T n = (T 1 l 2 + T 2 l 1 ) / (l 1 + l 2 ) H n = (H 1 l 2 + H 2 l 1 ) / (l 1 + l 2 ) The problem that the invention attempts to solve However, it takes In the case of conventional temperature and humidity control methods, temperature control is successful when the temperature distribution in the test chamber is uniform, but in reality, airflow is generated within the test chamber using a blower, etc.
There were disadvantages such as turbulent flow caused by test items etc. that became obstacles, and the temperature distribution not necessarily being uniform and accurate temperature and humidity control not being possible.
さらに代表温度及び湿度の算出させるには別個
に演算回路を温度検出器に設置する必要があり、
製造コスト高の要因となつていた。 Furthermore, in order to calculate the representative temperature and humidity, it is necessary to install a separate calculation circuit in the temperature sensor.
This was a factor in high manufacturing costs.
問題点を解決するための手段
そこで本考案は、かかる従来技術の欠点に鑑
み、極めて簡単な構造で、代表点の温度検出する
ことが可能で、且つ制作作業が簡単な装置を提供
するすることを目的とする。Means for Solving the Problems Therefore, in view of the drawbacks of the prior art, the present invention provides an apparatus that has an extremely simple structure, is capable of detecting the temperature at a representative point, and is easy to manufacture. With the goal.
すなわち、本考案は断熱材で覆われた恒温室内
を仕切板を介して試験室と恒温恒湿空気供給室と
に区画し、恒温恒湿空気供給室内に配置したブロ
ワーを介して上部から恒温空気を吹き出し、下方
から空気を吸引するように構成された装置におい
て、空気吹出口及び空気吸込口に温度検出用の熱
電対を配置し、該熱電対を並列接続で温度調節器
に接続した温度制御装置付き恒温恒湿装置により
本目的を達成する。 In other words, the present invention divides the inside of a constant temperature chamber covered with heat insulating material into a test chamber and a constant temperature and constant humidity air supply chamber through a partition plate, and supplies constant temperature air from above through a blower placed in the constant temperature and constant humidity air supply chamber. In a device configured to blow out air and suck air from below, thermocouples for temperature detection are placed at the air outlet and air intake, and the thermocouples are connected in parallel to a temperature controller. This purpose is achieved using a constant temperature and humidity device.
作 用
本考案にかかる装置では、温度検出手段である
熱電対を空気吹出口及び吸込口に設置しているた
めに、各点においてそれぞれ温度（例えばt1，
t2）で検出される。温度調節器と熱電対との接続
が並列接続であるために温度調節器で検出される
温度はt1とt2の相加平均となる。Effect In the device according to the present invention, thermocouples serving as temperature detection means are installed at the air outlet and the air intake, so the temperature at each point (for example, t 1 ,
t 2 ). Since the temperature controller and thermocouple are connected in parallel, the temperature detected by the temperature controller is the arithmetic average of t 1 and t 2 .
この検出温度に基づいて温度調節器は冷凍サイ
クル及びヒータの作動を制御する。 Based on this detected temperature, the temperature regulator controls the operation of the refrigeration cycle and heater.
実施例
以下に本考案を第１図に示された一実施例に従
つて詳述に説明する。Embodiment Hereinafter, the present invention will be explained in detail according to an embodiment shown in FIG.
図において符号の１〜１０，１２までは前述の
従来技術のものと同じであるため、その説明を省
略する。 In the figure, the reference numerals 1 to 10 and 12 are the same as those of the prior art described above, so their explanation will be omitted.
２０ａ，２０ｂはそれぞれ空気吹出口９及び空
気吸込口１０付近に設置した熱電対であり、これ
ら熱電対２０ａ，２０ｂの端子は並列接続で温度
調節器２１と接続されている。 Thermocouples 20a and 20b are installed near the air outlet 9 and air inlet 10, respectively, and the terminals of these thermocouples 20a and 20b are connected in parallel to the temperature controller 21.
従つて、各熱電対２０ａ，２０ｂで検出された
温度は、起電力として温度調節器２１に入力され
る。このとき熱電対２０ａ，２０ｂが並列に接続
されているので、温度調節器２１へは平均された
値として入力される。すなわち、検出温度をt1と
t2としたときには、温度調節器２１への検出温度
tnは、
tn＝（t1＋t2）／２
となる。 Therefore, the temperature detected by each thermocouple 20a, 20b is input to the temperature controller 21 as an electromotive force. At this time, since the thermocouples 20a and 20b are connected in parallel, the averaged value is input to the temperature controller 21. In other words, if the detected temperature is t 1
When t 2 , the detected temperature to the temperature controller 21
t n is t n =(t 1 +t 2 )/2.
尚本実施例では、検出手段として熱電対を空気
吹出口及び吸込口の２箇所に設置するように構成
したが、それに限定されるものではなく、例えば
前記吹出口及び吸込口から一番離れた位置に別の
熱電対を設置し、該熱電対の他の熱電対と並列に
接続するように構成してもよい。 In this embodiment, thermocouples are installed as detection means at two locations, the air outlet and the suction port, but the present invention is not limited thereto. Another thermocouple may be installed at the location and configured to be connected in parallel with the other thermocouples.
また熱電対の替わりに側温抵抗体を使用するこ
とも可能であり、該側温抵抗体を使用するときに
は、熱電対とは逆に直列に接続するとよい。 Moreover, it is also possible to use a side temperature resistor instead of a thermocouple, and when using the side temperature resistor, it is preferable to connect it in series, contrary to the thermocouple.
効 果
以上説明したように本考案にかかる装置は、従
来のものに比較して極めて簡単な構造で、試験品
の温度を検出することができると共に、従来のよ
うに演算回路を必要としないので、製造が簡単で
あり、コストを低減することが可能である。Effects As explained above, the device according to the present invention has an extremely simple structure compared to conventional devices, can detect the temperature of the test item, and does not require an arithmetic circuit unlike conventional devices. , it is easy to manufacture and it is possible to reduce costs.
第１図は本考案にかかる実施例を示す概略図、
第２図は従来技術を示す装置の概略図である。
１……恒温室、２……仕切り板、３……試験
室、４……恒温恒湿空気供給室、５……加湿器、
６……蒸発器、７……ヒータ、８……ブロワー、
９……吹出口、１０……吸込口、１１ａ，１１ｂ
……温湿検出端、１２……試験品、１３……温度
調節器、１４……演算回路、２０ａ，２０ｂ……
熱電対、２１……温度調節器。
FIG. 1 is a schematic diagram showing an embodiment of the present invention;
FIG. 2 is a schematic diagram of a device illustrating the prior art. 1... constant temperature room, 2... partition plate, 3... test room, 4... constant temperature and constant humidity air supply room, 5... humidifier,
6...Evaporator, 7...Heater, 8...Blower,
9...Air outlet, 10...Suction port, 11a, 11b
... Temperature and humidity detection end, 12 ... Test product, 13 ... Temperature controller, 14 ... Arithmetic circuit, 20a, 20b ...
Thermocouple, 21...Temperature controller.
Claims (1)
室と恒温恒湿空気供給室とに区画し、恒温恒湿空
気供給室内に配置したブロワーを介して上部から
恒温空気を吹き出し、下方から空気を吸引するよ
うに構成された装置において、空気吹出口及び空
気吸込口に温度検出用の熱電対を配置し、該熱電
対を並列接続で温度調節器に接続したことを特徴
とする温度制御装置付き恒温恒湿装置。 The temperature controlled room covered with heat insulating material is divided into a test chamber and a constant temperature and humidity air supply chamber through a partition plate, and constant temperature air is blown out from the top through a blower placed in the constant temperature and humidity air supply chamber, and the air is heated from below. 1. A temperature control device configured to suck air, characterized in that thermocouples for temperature detection are arranged at the air outlet and the air suction port, and the thermocouples are connected in parallel to a temperature controller. Constant temperature and humidity device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986179464U JPH044819Y2 (en) | 1986-11-21 | 1986-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986179464U JPH044819Y2 (en) | 1986-11-21 | 1986-11-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6386834U JPS6386834U (en) | 1988-06-06 |
| JPH044819Y2 true JPH044819Y2 (en) | 1992-02-12 |
Family
ID=31122550
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986179464U Expired JPH044819Y2 (en) | 1986-11-21 | 1986-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH044819Y2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5225683A (en) * | 1975-08-21 | 1977-02-25 | Showa Denko Kk | Temperature detecting apparatus |
| JPS60134130A (en) * | 1983-12-23 | 1985-07-17 | Hitachi Ltd | Metod of controlling thermostat and humidistat |
-
1986
- 1986-11-21 JP JP1986179464U patent/JPH044819Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5225683A (en) * | 1975-08-21 | 1977-02-25 | Showa Denko Kk | Temperature detecting apparatus |
| JPS60134130A (en) * | 1983-12-23 | 1985-07-17 | Hitachi Ltd | Metod of controlling thermostat and humidistat |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6386834U (en) | 1988-06-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4579462A (en) | Dew point measuring apparatus | |
| AU2011253568A1 (en) | Laundry dryer with environmental temperature sensor | |
| MY101346A (en) | Air-conditioner | |
| CA1253592A (en) | Heating apparatus with humidity sensor | |
| WO1999038209A2 (en) | Method and apparatus for temperature control of a semiconductor electrical-test contactor assembly | |
| JPH044819Y2 (en) | ||
| JP2010107218A (en) | Method and device for measuring humidity distribution, and environment testing device | |
| KR880014326A (en) | Refrigerant Heated Heating | |
| US5226729A (en) | Averaging temperature probe | |
| JPH0587345A (en) | Cooking device with closable cooking chamber | |
| JP2928151B2 (en) | Water vapor partial pressure conversion type humidity controller | |
| JP2766345B2 (en) | Temperature control method of thermostat for exothermic sample processing | |
| JPS6132246Y2 (en) | ||
| JP2571615B2 (en) | Abnormality detection device for temperature and humidity measurement means | |
| JPS61130739A (en) | Ventilating control equipment | |
| JP2590741B2 (en) | Equipment for evaluating heat dissipation performance of electronic equipment | |
| CN2233584Y (en) | Constant temperature and humidity cabinet | |
| JPH05196280A (en) | Duct type air conditioner | |
| JPS6125171B2 (en) | ||
| LU503061B1 (en) | Online method and system for detecting moisture content of fruits and vegetables by weighing | |
| JP2620950B2 (en) | Ventilation adjustment hot air oven | |
| JPH0694658A (en) | Low-temperature high-humidity detector and low-temperature high-humidity controller | |
| JPS6314248Y2 (en) | ||
| JPH03204585A (en) | Control of hot air temperature in sample grain drying device | |
| KR0125709B1 (en) | Cooking control method of microwave oven |