JPH0447887B2 - - Google Patents

Info

Publication number
JPH0447887B2
JPH0447887B2 JP59130631A JP13063184A JPH0447887B2 JP H0447887 B2 JPH0447887 B2 JP H0447887B2 JP 59130631 A JP59130631 A JP 59130631A JP 13063184 A JP13063184 A JP 13063184A JP H0447887 B2 JPH0447887 B2 JP H0447887B2
Authority
JP
Japan
Prior art keywords
chip
thin film
head
holder
chip holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59130631A
Other languages
Japanese (ja)
Other versions
JPS619815A (en
Inventor
Shuzo Abiko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Electronics Inc
Original Assignee
Canon Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Electronics Inc filed Critical Canon Electronics Inc
Priority to JP13063184A priority Critical patent/JPS619815A/en
Publication of JPS619815A publication Critical patent/JPS619815A/en
Publication of JPH0447887B2 publication Critical patent/JPH0447887B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/10Structure or manufacture of housings or shields for heads

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)

Description

【発明の詳細な説明】 (技術分野) 本発明は薄膜磁気ヘツドに関し、特に基板に対
して磁性材及び電極材を薄膜堆積法で成膜形成し
てなるヘツドチツプを有する薄膜磁気ヘツドの構
造の改良に関するものである。
Detailed Description of the Invention (Technical Field) The present invention relates to a thin film magnetic head, and in particular to an improvement in the structure of a thin film magnetic head having a head chip formed by forming a magnetic material and an electrode material on a substrate by a thin film deposition method. It is related to.

(従来技術の説明) 一般に薄膜磁気ヘツドは、フエライト等よりな
る基板上にセンダスト、パーマロイ等の磁性材よ
りなる磁性薄膜及びAu、Cu、Al等の導電材より
なる導電膜をスパツタリングや蒸着等の薄膜堆積
法により形成し、これらの薄膜をフオトエツチン
グ等の工程で適宜整形して所定のパターンの磁気
回路及び電気回路を形成してなるものである。
(Description of the prior art) Thin film magnetic heads are generally produced by sputtering, vapor deposition, etc. a magnetic thin film made of a magnetic material such as sendust or permalloy and a conductive film made of a conductive material such as Au, Cu, Al, etc. on a substrate made of ferrite or the like. It is formed by a thin film deposition method, and these thin films are appropriately shaped by a process such as photoetching to form a magnetic circuit and an electric circuit in a predetermined pattern.

この電気回路の電極部分を外部の電極に結線す
るために従来は以下に説明する如き構造がとられ
ていた。
In order to connect the electrode portion of this electric circuit to an external electrode, a structure as described below has conventionally been used.

第1図は一般的な薄膜磁気ヘツドチツプを示す
図である。第1図において2は成膜、膜整形によ
り磁気回路及び電気回路が構成された基板、4は
基板2に貼合された保護板、6は電気回路の電極
部、8は研削、ラツピング等により形成された媒
体摺動面である。
FIG. 1 is a diagram showing a general thin film magnetic head chip. In Fig. 1, 2 is a substrate on which a magnetic circuit and an electric circuit are formed by film formation and film shaping, 4 is a protection plate pasted to the substrate 2, 6 is an electrode part of the electric circuit, and 8 is a substrate formed by grinding, wrapping, etc. This is the formed media sliding surface.

第2図は従来の薄膜磁気ヘツドの構造を示す斜
視図、第3図はその断面図である。第2図におい
て12は第1図にも示したヘツドチツプ10が接
着剤で接着されたチツプホルダ、13はチツプホ
ルダ12に接着されたフレキシブルプリント基板
FPCであり、FPC13上の電極11とヘツドチ
ツプ10上の電極とは同一平面上にて近接して整
列する如く配置されている。
FIG. 2 is a perspective view showing the structure of a conventional thin film magnetic head, and FIG. 3 is a sectional view thereof. In FIG. 2, 12 is a chip holder to which the head chip 10 shown in FIG. 1 is bonded with adhesive, and 13 is a flexible printed circuit board bonded to the chip holder 12.
This is an FPC, and the electrodes 11 on the FPC 13 and the electrodes on the head chip 10 are arranged so as to be closely aligned on the same plane.

これらの両電極6,11間は第3図に示す如く
Al、Au等の細いワイヤ14を超音波ボンデイン
グすることにより結線される。この時図示の如く
電極が複数づつ存在するとワイヤボンデイングは
各電極毎に順次行われる。15はSi樹脂等の弾力
性のある接着剤であり、ワイヤボンデイング部分
を覆つている。FPC13の後部にはゴム状の
FPC押え部材18を挟んで他方のチツプホルダ
16を重ね合わされており、チツプホルダ12、
ヘツドチツプ10及びチツプホルダ16の空隙部
には接着剤17が充填硬化されており、これらを
接合している。
The distance between these two electrodes 6 and 11 is as shown in FIG.
The wires are connected by ultrasonic bonding of thin wires 14 made of Al, Au, etc. At this time, if there are a plurality of electrodes as shown in the figure, wire bonding is performed sequentially for each electrode. 15 is an elastic adhesive such as Si resin, which covers the wire bonding portion. At the rear of FPC13 there is a rubber-like
The other chip holder 16 is overlapped with the FPC holding member 18 in between, and the chip holder 12,
An adhesive 17 is filled and hardened in the gap between the head chip 10 and the chip holder 16 to bond them together.

上述の如き構造の従来の薄膜磁気ヘツドにおい
ては、対となる電極間の結合をワイヤボンデイン
グで行つている。そのため各電極間を一本一本結
線せねばならず非常に多くの工数を必要とした。
また微細な結線を必要とするため顕微鏡を使用し
自動化が困難であつた。またワイヤ14が非常に
細く断線を生じ易い為に信頼性に乏しく、またそ
のためSi樹脂等のコート材が必要となる。更にワ
イヤボンデイング部の接着強度が弱い為、FPC
13の確かな固定が必要となる等の種々の欠点が
あつた。
In the conventional thin film magnetic head having the structure as described above, the pair of electrodes are connected by wire bonding. Therefore, it was necessary to connect each electrode one by one, which required a large number of man-hours.
Furthermore, since it requires minute connections, it is difficult to automate using a microscope. Furthermore, the wire 14 is very thin and easily breaks, resulting in poor reliability, and for this reason, a coating material such as Si resin is required. Furthermore, since the adhesive strength of the wire bonding part is weak, FPC
There were various drawbacks such as the necessity of securely fixing the 13 parts.

(発明の目的) 本発明は上述の如き欠点を全て除去するための
ものであり、詳しくは製造工程及び構造を簡略化
し、安価で信頼性の高い薄膜磁気ヘツドを提供せ
んとするものである。
(Object of the Invention) The present invention is intended to eliminate all of the above-mentioned drawbacks, and more specifically, to simplify the manufacturing process and structure, and to provide a thin film magnetic head that is inexpensive and highly reliable.

(実施例による説明) 以下、本発明を実施例を用いて説明する。第4
図A,Bは本発明の一実施例の薄膜磁気ヘツドの
構成要素となるヘツドチツプホルダを示し、第5
図は本実施例の薄膜磁気ヘツドの断面図である。
(Explanation based on Examples) The present invention will be described below using Examples. Fourth
Figures A and B show a head chip holder which is a component of a thin film magnetic head according to an embodiment of the present invention.
The figure is a sectional view of the thin film magnetic head of this embodiment.

図中、第3図と同様の構成要素については同一
番号を付し、説明は省略する。第4図Aに示すヘ
ツドチツプホルダ21にはヘツドチツプ10の媒
体摺接面の側面を押し当てて位置出しをする為の
基準面23を設け、更に後述する弾性コネクタ2
4(所謂エラスチツクコネクタ)を押圧して変位
させる時の度当り用段差部25が形成されてい
る。一方第4図Bに示すヘツドチツプホルダ22
にはFPC13の位置出し用基準面26を設けて
ある。
In the figure, the same components as those in FIG. 3 are given the same numbers, and their explanations are omitted. The head chip holder 21 shown in FIG. 4A is provided with a reference surface 23 for positioning by pressing against the side surface of the medium sliding surface of the head chip 10.
4 (so-called elastic connector) is formed with a step portion 25 for striking when it is pressed and displaced. On the other hand, the head tip holder 22 shown in FIG.
A reference surface 26 for positioning the FPC 13 is provided.

まずヘツドチツプ10をその側面をヘツドチツ
プホルダ21の基準面23に押し付けて接着剤に
て接合する。次にFPC13をチツプホルダ22
の基準面26に押し付けて同様に接着剤にて接合
の上固定する。この時にホルダ21の基準面23
とホルダ22の基準面26とは一致させておく。
そしてホルダ21とホルダ22とを対向させ、ヘ
ツドチツプ10の電極部とFPC13の電極部と
が対向し所定の間隙を以て各電極が一対一に対応
する如くする。ここで、エラスチツクコネクタ2
4を両電極間の間隙に配し、両ホルダ21,22
同志をビスや治工具等により締め付け結合するこ
とで、コネクタ24がその弾性により両電極に圧
接される。この時エラスチツクコネクタ24を圧
縮させる寸法はチツプホルダ21の後部に設けた
段差25が度当りとなつて常に一定にすることが
でき接触抵抗のバラツキをなくすことができる。
First, the side surface of the head chip 10 is pressed against the reference surface 23 of the head chip holder 21 and bonded with adhesive. Next, attach the FPC13 to the chip holder 22.
Press it against the reference surface 26 and fix it by bonding with adhesive in the same manner. At this time, the reference surface 23 of the holder 21
and the reference surface 26 of the holder 22 are made to coincide.
Then, the holder 21 and the holder 22 are made to face each other, so that the electrode portions of the head chip 10 and the electrode portions of the FPC 13 are opposed to each other, and each electrode corresponds one-to-one with a predetermined gap. Here, elastic connector 2
4 is placed in the gap between both electrodes, and both holders 21, 22
By tightening and connecting the connectors with screws, jigs, etc., the connector 24 is pressed against both electrodes due to its elasticity. At this time, the dimension in which the elastic connector 24 is compressed can be kept constant by the step 25 provided at the rear of the chip holder 21, and variations in contact resistance can be eliminated.

上述の如き本発明の実施例の薄膜磁気ヘツドの
構成によれば、以下の如き利点がある。まず基準
面23,26及びチツプ10、FPC13の精度
さえ正確にしてやれば確実にかつ一度に数多くの
電極の結線をすることができるため製造時の作業
工数を大幅に削減できる。また断線の恐れがなく
更にはコネクタの接触抵抗が一定であるため、均
一特性で信頼性の高いヘツドが得られる。その
上、ヘツドチツプ10とFPC13の固定がコネ
クタ24で兼用でき、かつSi樹脂等のコート部が
不要になるため製造が簡易なものとなり、製造の
自動化も容易に達成できる。更にはヘツド完成後
の使用中に断線が生じた場合にも各部の交換が容
易である為メインテナンス面でも極めて有利であ
る。
The structure of the thin film magnetic head according to the embodiment of the present invention as described above has the following advantages. First, if the precision of the reference planes 23, 26, the chip 10, and the FPC 13 are made accurate, a large number of electrodes can be reliably connected at once, and the number of man-hours during manufacturing can be greatly reduced. Furthermore, since there is no risk of wire breakage and the contact resistance of the connector is constant, a highly reliable head with uniform characteristics can be obtained. Furthermore, the head chip 10 and the FPC 13 can be fixed using the connector 24, and a coated portion of Si resin or the like is not required, so that manufacturing is simplified and automation of manufacturing can be easily achieved. Furthermore, even if a wire breaks during use after the head is completed, each part can be easily replaced, which is extremely advantageous in terms of maintenance.

(効果の説明) 以上、実施例を用いて説明した様に本発明によ
れば製造工程及び構造が簡易で安価かつ信頼性の
高い薄膜磁気ヘツドを得ることができるものであ
る。
(Description of Effects) As described above with reference to the embodiments, according to the present invention, it is possible to obtain a thin film magnetic head that has a simple manufacturing process and structure, is inexpensive, and has high reliability.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は一般的な薄膜磁気ヘツドチツプを示す
図、第2図は従来の薄膜磁気ヘツドの構造を示す
斜視図、第3図は従来の薄膜磁気ヘツドの構造を
示す断面図、第4図A,Bは夫々本発明の一実施
例としての薄膜磁気ヘツドの構成要素であるチツ
プホルダを示す斜視図、第5図は本発明の一実施
例としての薄膜磁気ヘツドを示す断面図である。 2は基板、6は電極、10はヘツドチツプ、1
1は電極、21は第1のチツプホルダ、22は第
2のチツプホルダ、24は弾性コネクタ部材であ
る。
Fig. 1 is a diagram showing a general thin film magnetic head chip, Fig. 2 is a perspective view showing the structure of a conventional thin film magnetic head, Fig. 3 is a sectional view showing the structure of a conventional thin film magnetic head, and Fig. 4 A. , B are perspective views showing a chip holder which is a component of a thin film magnetic head as an embodiment of the present invention, and FIG. 5 is a sectional view showing a thin film magnetic head as an embodiment of the present invention. 2 is a substrate, 6 is an electrode, 10 is a head chip, 1
1 is an electrode, 21 is a first chip holder, 22 is a second chip holder, and 24 is an elastic connector member.

Claims (1)

【特許請求の範囲】 1 基板に対して磁性材及び導電材を薄膜堆積法
で成膜形成してなるヘツドチツプと、 該チツプの位置出し用基準面を有する第1のチ
ツプホルダと、 該第1のチツプホルダと対向して設けられ前記
ヘツドチツプの電極と所定の間隙を以て対向する
電極が配された第2のチツプホルダと、 前記両電極間の前記間隙に配され、前記第1の
チツプホルダと前記第2のチツプホルダとの結合
時に両電極を電気的に結合するための弾性コネク
タ部材と、 を有する磁気ヘツド。
[Scope of Claims] 1. A head chip formed by forming a magnetic material and a conductive material on a substrate by a thin film deposition method, a first chip holder having a reference surface for positioning the chip, and the first chip holder. a second chip holder, which is provided to face the chip holder and has an electrode facing the electrode of the head chip with a predetermined gap therebetween; A magnetic head comprising: an elastic connector member for electrically connecting both electrodes when connected to a chip holder.
JP13063184A 1984-06-25 1984-06-25 Thin film magnetic head Granted JPS619815A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13063184A JPS619815A (en) 1984-06-25 1984-06-25 Thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13063184A JPS619815A (en) 1984-06-25 1984-06-25 Thin film magnetic head

Publications (2)

Publication Number Publication Date
JPS619815A JPS619815A (en) 1986-01-17
JPH0447887B2 true JPH0447887B2 (en) 1992-08-05

Family

ID=15038861

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13063184A Granted JPS619815A (en) 1984-06-25 1984-06-25 Thin film magnetic head

Country Status (1)

Country Link
JP (1) JPS619815A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2931477B2 (en) * 1991-06-07 1999-08-09 シャープ株式会社 Thin film magnetic head structure and method of manufacturing the same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5817613B2 (en) * 1977-04-30 1983-04-08 株式会社東芝 X-ray tomography device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5817613U (en) * 1981-07-23 1983-02-03 ソニー株式会社 Multichannel thin film magnetic head
JPS5881719U (en) * 1981-11-27 1983-06-02 ソニー株式会社 Multichannel thin film magnetic head

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5817613B2 (en) * 1977-04-30 1983-04-08 株式会社東芝 X-ray tomography device

Also Published As

Publication number Publication date
JPS619815A (en) 1986-01-17

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