JPH0447763B2 - - Google Patents

Info

Publication number
JPH0447763B2
JPH0447763B2 JP58232499A JP23249983A JPH0447763B2 JP H0447763 B2 JPH0447763 B2 JP H0447763B2 JP 58232499 A JP58232499 A JP 58232499A JP 23249983 A JP23249983 A JP 23249983A JP H0447763 B2 JPH0447763 B2 JP H0447763B2
Authority
JP
Japan
Prior art keywords
strain
thin film
layer
multilayer thin
film layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58232499A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60124878A (ja
Inventor
Masahiro Kume
Koji Takada
Nobuhiko Fujita
Akira Doi
Akira Ootsuka
Hajime Ichanagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP58232499A priority Critical patent/JPS60124878A/ja
Publication of JPS60124878A publication Critical patent/JPS60124878A/ja
Publication of JPH0447763B2 publication Critical patent/JPH0447763B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Pressure Sensors (AREA)
JP58232499A 1983-12-08 1983-12-08 歪センサ Granted JPS60124878A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58232499A JPS60124878A (ja) 1983-12-08 1983-12-08 歪センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58232499A JPS60124878A (ja) 1983-12-08 1983-12-08 歪センサ

Publications (2)

Publication Number Publication Date
JPS60124878A JPS60124878A (ja) 1985-07-03
JPH0447763B2 true JPH0447763B2 (cs) 1992-08-04

Family

ID=16940280

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58232499A Granted JPS60124878A (ja) 1983-12-08 1983-12-08 歪センサ

Country Status (1)

Country Link
JP (1) JPS60124878A (cs)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2673138B2 (ja) * 1988-03-25 1997-11-05 株式会社イシダ 荷重検出用ひずみゲージ構造
WO2007052800A1 (ja) * 2005-11-07 2007-05-10 Rohm Co., Ltd. 半導体圧力センサ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55113381A (en) * 1979-02-23 1980-09-01 Hitachi Ltd Semiconductor displacement transducer

Also Published As

Publication number Publication date
JPS60124878A (ja) 1985-07-03

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