JPH044740U - - Google Patents
Info
- Publication number
- JPH044740U JPH044740U JP4614790U JP4614790U JPH044740U JP H044740 U JPH044740 U JP H044740U JP 4614790 U JP4614790 U JP 4614790U JP 4614790 U JP4614790 U JP 4614790U JP H044740 U JPH044740 U JP H044740U
- Authority
- JP
- Japan
- Prior art keywords
- dry etching
- chamber
- barrel
- type dry
- etching device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001312 dry etching Methods 0.000 claims description 5
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4614790U JPH044740U (pl) | 1990-04-26 | 1990-04-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4614790U JPH044740U (pl) | 1990-04-26 | 1990-04-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH044740U true JPH044740U (pl) | 1992-01-16 |
Family
ID=31560970
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4614790U Pending JPH044740U (pl) | 1990-04-26 | 1990-04-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH044740U (pl) |
-
1990
- 1990-04-26 JP JP4614790U patent/JPH044740U/ja active Pending