JPH0447250U - - Google Patents
Info
- Publication number
- JPH0447250U JPH0447250U JP9100190U JP9100190U JPH0447250U JP H0447250 U JPH0447250 U JP H0447250U JP 9100190 U JP9100190 U JP 9100190U JP 9100190 U JP9100190 U JP 9100190U JP H0447250 U JPH0447250 U JP H0447250U
- Authority
- JP
- Japan
- Prior art keywords
- target
- shower device
- electron shower
- generates
- current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007935 neutral effect Effects 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9100190U JPH0754918Y2 (ja) | 1990-08-29 | 1990-08-29 | エレクトロンシャワー装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9100190U JPH0754918Y2 (ja) | 1990-08-29 | 1990-08-29 | エレクトロンシャワー装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0447250U true JPH0447250U (cs) | 1992-04-22 |
| JPH0754918Y2 JPH0754918Y2 (ja) | 1995-12-18 |
Family
ID=31826237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9100190U Expired - Lifetime JPH0754918Y2 (ja) | 1990-08-29 | 1990-08-29 | エレクトロンシャワー装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0754918Y2 (cs) |
-
1990
- 1990-08-29 JP JP9100190U patent/JPH0754918Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0754918Y2 (ja) | 1995-12-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |