JPH0446539U - - Google Patents
Info
- Publication number
- JPH0446539U JPH0446539U JP8928490U JP8928490U JPH0446539U JP H0446539 U JPH0446539 U JP H0446539U JP 8928490 U JP8928490 U JP 8928490U JP 8928490 U JP8928490 U JP 8928490U JP H0446539 U JPH0446539 U JP H0446539U
- Authority
- JP
- Japan
- Prior art keywords
- cooling
- plate
- heating
- power source
- wafer processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 7
- 238000001312 dry etching Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8928490U JPH0446539U (pt-PT) | 1990-08-27 | 1990-08-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8928490U JPH0446539U (pt-PT) | 1990-08-27 | 1990-08-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0446539U true JPH0446539U (pt-PT) | 1992-04-21 |
Family
ID=31823162
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8928490U Pending JPH0446539U (pt-PT) | 1990-08-27 | 1990-08-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0446539U (pt-PT) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011241917A (ja) * | 2010-05-19 | 2011-12-01 | Nissin Electric Co Ltd | 真空シールおよび配管接続機構 |
KR20220069187A (ko) * | 2020-11-19 | 2022-05-27 | 세메스 주식회사 | 지지 유닛 및 기판 처리 장치 |
-
1990
- 1990-08-27 JP JP8928490U patent/JPH0446539U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011241917A (ja) * | 2010-05-19 | 2011-12-01 | Nissin Electric Co Ltd | 真空シールおよび配管接続機構 |
KR20220069187A (ko) * | 2020-11-19 | 2022-05-27 | 세메스 주식회사 | 지지 유닛 및 기판 처리 장치 |