JPH0446539U - - Google Patents

Info

Publication number

JPH0446539U

JPH0446539U JP8928490U JP8928490U JPH0446539U JP H0446539 U JPH0446539 U JP H0446539U JP 8928490 U JP8928490 U JP 8928490U JP 8928490 U JP8928490 U JP 8928490U JP H0446539 U JPH0446539 U JP H0446539U

Authority

JP

Japan

Prior art keywords

cooling

plate

heating

power source

wafer processing

Prior art date

1990-08-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001816 cooling Methods 0.000 claims description 7
• 238000010438 heat treatment Methods 0.000 claims description 7
• 238000001312 dry etching Methods 0.000 claims 1
• 238000000034 method Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1

Cited By (2)