JPH0446068A - Joined body composed of ceramic body and metal body - Google Patents

Joined body composed of ceramic body and metal body

Info

Publication number
JPH0446068A
JPH0446068A JP15167290A JP15167290A JPH0446068A JP H0446068 A JPH0446068 A JP H0446068A JP 15167290 A JP15167290 A JP 15167290A JP 15167290 A JP15167290 A JP 15167290A JP H0446068 A JPH0446068 A JP H0446068A
Authority
JP
Japan
Prior art keywords
metal
ceramic
joined
ceramic body
bonding strength
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15167290A
Other languages
Japanese (ja)
Inventor
Hiroshi Matsuzaki
浩 松崎
Takehiko Kato
武彦 加藤
Toru Shimamori
融 島森
Toshiaki Ito
敏明 伊藤
Masayuki Shima
誠之 嶋
Eiji Seki
英治 関
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP15167290A priority Critical patent/JPH0446068A/en
Publication of JPH0446068A publication Critical patent/JPH0446068A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To enhance bonding strength by forming an active middle layer reacting with the principal constituent of a ceramic body on the surface of the ceramic body contg. a specified amt. of a spinel compd. and joining the ceramic body to a metal body. CONSTITUTION:The surface of an Al2O3-based ceramic sintered body contg. >=70wt.% spinel compd. such as MgAl2O4 is polished and washed with a solvent. An active metal reacting with the principal constituent of the ceramic body, e.g., Ti or Zr and an Ag-Cu alloy as a brazing filler metal are put on the washed surface to be joined and a metal body such as stainless steel is further put. A middle layer is then formed by heating to a prescribed temp. in vacuum or in an inert gaseous atmosphere and the ceramics sintered body is joined to the metal body with the middle layer in-between to obtain a joined body having superior bonding strength and radiation resistance.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、セラミックス体と金属体との接合体に関し、
さらに詳しく言えば、1赦射線性、接合強度および気密
性に優れた接合体に関する。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a joined body of a ceramic body and a metal body,
More specifically, the present invention relates to a bonded body with excellent radiation tolerance, bonding strength, and airtightness.

本発明は、中性子等の放射線に晒される溝境で使用され
る部品、例えば原子炉、核融合炉等の部品等に利用され
る。
INDUSTRIAL APPLICATION This invention is utilized for the components used in the trench boundary exposed to radiation, such as a neutron, for example, the components of a nuclear reactor, a nuclear fusion reactor, etc.

〔従来の技術〕[Conventional technology]

従来のセラミックス体と金属体との接合体としては、例
えば、図に示すようf;電離箱型中悸子検出器が知られ
ている。この検出器においては、般に、電離箱1の陽極
2を絶縁支持する支持セラミックス体3a、3bが陰極
である容器(金属体)4にロー付され、また隔壁セラミ
ックス体11a、11bと外側導電体12をロー付して
案内ケーブルlOと電離箱1を気密に隔離したもの等が
知られている。上記におし1て、案内ケーブル側支持セ
ラミックス体3as隔壁セラミック体11aおよびll
bの少−=くとも1つのロー付により、電離箱1の気密
性が保持されている。
As a conventional joined body of a ceramic body and a metal body, for example, an ion chamber type medium-wavelength detector as shown in the figure is known. In this detector, supporting ceramic bodies 3a and 3b that insulate and support the anode 2 of the ionization chamber 1 are brazed to a container (metallic body) 4, which is the cathode, and are connected to the outer conductive ceramic bodies 11a and 11b. A device is known in which the guide cable 10 and the ionization chamber 1 are hermetically isolated by brazing the body 12. In the above, the guide cable side support ceramic body 3as partition wall ceramic body 11a and ll
The airtightness of the ionization chamber 1 is maintained by at least one brazing.

なお、陰極4の内表面にはウラン等の中性子交・換物質
5が付着され、電離箱1の内部、即ち陽極2と陰極4の
間には、アルゴン等の不活性電離ガス6が封入されてい
る。
Note that a neutron exchange substance 5 such as uranium is attached to the inner surface of the cathode 4, and an inert ionized gas 6 such as argon is sealed inside the ionization chamber 1, that is, between the anode 2 and the cathode 4. ing.

また、上記セラミックス体3a、3b、ll&11bの
材料としては、一般的なアルミナ、更にはマグネシア、
窒化硼素又はシリカ等が知られている(特開昭56−7
0481号公報、同57−52877号公報、同60−
230349号公体を従来の材料の銀−銅系合金等によ
りロー材するにすぎないので、上君己環境下においては
その接合強度および気密性が十分でない。しかも、−船
に、用いられるアルミナは、J、Nuc 1.Mata
rl、122/123 (1984)、P、1386〜
1392に報告されているように、約22 x 10 
”n/m’程度の線量の中性子照射をすると、スウェリ
ングを生じて容積が3.5%も増加して損傷が激しく、
セラミックス体中にクラックが発生してしまう。従って
、この場合は、接合強度および気密性に間層が生じる。
Furthermore, the materials for the ceramic bodies 3a, 3b, ll & 11b include general alumina, magnesia,
Boron nitride, silica, etc. are known (Japanese Patent Application Laid-Open No. 56-7
No. 0481, No. 57-52877, No. 60-
Since the body of No. 230349 is simply brazed with conventional materials such as silver-copper alloy, its bonding strength and airtightness are insufficient in a superior environment. Moreover, the alumina used for ships is J, Nuc 1. Mata
rl, 122/123 (1984), P, 1386~
Approximately 22 x 10 as reported in 1392
When irradiated with neutrons at a dose of ``n/m'', swelling occurs and the volume increases by 3.5%, causing severe damage.
Cracks occur in the ceramic body. Therefore, in this case, a gap occurs in bonding strength and airtightness.

更に、マグネシア等のアルミナ以外のセラミックス体材
料の場合も、アルミナの場合と同様な問題を有する。
Furthermore, ceramic body materials other than alumina, such as magnesia, have the same problems as alumina.

本発明は、上記間8点を解決するものであり、耐放射線
性、接合強度および気密性に優れた、セラミックス体と
金属体との接合体を提併することを目的とする。
The present invention solves the above eight problems, and aims to provide a joined body of a ceramic body and a metal body that has excellent radiation resistance, bonding strength, and airtightness.

〔課題を解決するための手段〕 本発明は、耐放射線性に優れたセラミックス材料として
スピネル化合物を見出し、しかもこの化「上君己スピネ
ル化合物を70%以上:とは、この化合物のみから構成
される場合も含む。この配合割合を70%以上とするの
は、接合強度および接合部の気密性、更には耐放射線性
を確保するためである。
[Means for Solving the Problems] The present invention has discovered a spinel compound as a ceramic material with excellent radiation resistance. The reason for setting this blending ratio to 70% or more is to ensure joint strength, airtightness of the joint, and radiation resistance.

上記活性金属とは、セラミックス体の粒界構成成分を除
く主要構成成分と反応するものであり、粒界構成成分と
の反応の有無は問わない。ここで粒界構成成分には、焼
結助剤、セラミック原料に元々含まれる不純物等がある
The above-mentioned active metal is one that reacts with the main components of the ceramic body other than the grain boundary components, and it does not matter whether or not it reacts with the grain boundary components. Here, grain boundary constituents include sintering aids, impurities originally contained in ceramic raw materials, and the like.

〔作用〕[Effect]

スピネル化合物は、J、Nucl、Mater、 、 
122/123(1984)、 P、 1386〜13
92に報告されているように、22 X 1026n/
m2程度の線量の中性子照射をしても、容積変化は−0
,39%と非常に小さく、耐放射線性に優れている。ま
た活性金属はセラミックスの主要構成成分と直接反応す
るもの、であり、接合強度及び気密性に優れた接合体が
得られる。
Spinel compounds are described in J. Nucl. Mater.
122/123 (1984), P, 1386-13
22 X 1026n/ as reported in 92
Even with neutron irradiation at a dose of about m2, the volume change is -0
, 39%, which is very small and has excellent radiation resistance. In addition, the active metal is one that directly reacts with the main constituent components of the ceramic, and a bonded body with excellent bonding strength and airtightness can be obtained.

〔実施例〕〔Example〕

以下、実施例により本発明を具体的に説明する。 Hereinafter, the present invention will be specifically explained with reference to Examples.

実施例1 本実施例の接合体は、10XIOX2([さ)關の板状
スピネルセラミックス焼結体(以下、単に焼結体という
)の表面に、円筒状金属体(外径6wφ×高さ5社ロ×
肉厚0.6I1m)を、中間層を介して接合された構成
をしている。この焼結体はMg A 1 * O−90
%およびアルミナ10%からなる。金属体は銅からブ;
す、その端面が接合面となっている。中間層はチタン(
以下、Tiという)、銀および銅の合金層となっている
Example 1 The joined body of this example is a cylindrical metal body (outer diameter 6 wφ x height 5 Company Ro×
0.6I1m) are joined via an intermediate layer. This sintered body is Mg A 1 * O-90
% and 10% alumina. The metal body is made from copper;
The end surface is the joint surface. The middle layer is titanium (
It is an alloy layer of Ti (hereinafter referred to as Ti), silver, and copper.

この接合体は、以下のようにして製作された。This joined body was manufactured as follows.

まず、上記焼結体の接合面を#600の研廖仕上げをし
、その後アセトンで洗浄をした。次i二、この接合面上
に活性金属であるTi箔(厚さ0゜01肛)および銀7
2%−銅28%のロー材(厚さ0.6mm)を置き、さ
らにその上に金属体をその端面が接合面とt;るように
置いた。
First, the joint surfaces of the sintered bodies were polished with a #600 abrasive, and then washed with acetone. Next, on this joint surface, Ti foil (thickness 0°01), which is an active metal, and silver 7
A brazing material (thickness: 0.6 mm) of 2% copper and 28% copper was placed, and a metal body was placed thereon so that its end surface was aligned with the joint surface.

次に、それを真空中850℃で10分間保持して中間層
を形成し、この中間層を介して焼結体と金属体とを接合
して接合体を製作した。
Next, this was held in vacuum at 850° C. for 10 minutes to form an intermediate layer, and the sintered body and the metal body were joined via this intermediate layer to produce a joined body.

この接合体の接合強度は5Kg f/献3であった。ま
たこの接合体の接合部の気密住はヘリウムのリーク量と
して10−”cc/秒以下であった。
The bonding strength of this bonded body was 5 kg f/3. Further, the airtightness of the joint of this assembly was 10-'' cc/sec or less in terms of helium leakage.

なお、接合強度は強度試験機による引張り強度試験で行
い、その気密性はヘリウムリークディテクターにより測
定した。
Note that the joint strength was determined by a tensile strength test using a strength testing machine, and the airtightness was measured using a helium leak detector.

実施例2 金属体としてコバール板(10X10X2  (厚さ)
 l11mを用5)ること以外は実施例1と同様にして
、接合体を製作した。この接合体の強度は7Kgf/c
tb”、接合部の気密性は10−” cc/ 秒以下で
あった。
Example 2 Kovar plate (10X10X2 (thickness)) as a metal body
A joined body was manufactured in the same manner as in Example 1 except that 111m was used 5). The strength of this joint is 7Kgf/c
tb", and the hermeticity of the joint was less than 10-" cc/sec.

実施例3 セラミックス焼結体としてMgAJz 04の配合割合
が70%であること、その焼結体形状として円柱状(外
径8 isφ、高さ5M)を用いること、活性金属使用
形態としてTi2%−銅98%のロー材を用いること、
金属体としてSUS 304の円筒体(外径8肛φ、高
さ4順、肉厚O95闘)を用いること、および中間層形
成温度を1200℃としたこと以外は、実施例1と同様
にして接合体を製作した。この接合体の強度は3.6K
gf/m1N2、接合部の気密性は10−1occ/秒
以下であった。
Example 3 The blending ratio of MgAJz 04 as the ceramic sintered body is 70%, the shape of the sintered body is cylindrical (outer diameter 8 isφ, height 5M), and the active metal usage form is Ti2%- Using brazing material made of 98% copper,
Example 1 was carried out in the same manner as in Example 1, except that a SUS 304 cylindrical body (outer diameter 8 holes, height 4 in order, wall thickness O95) was used as the metal body, and the intermediate layer formation temperature was 1200°C. A zygote was fabricated. The strength of this joint is 3.6K
gf/m1N2, and the airtightness of the joint was 10-1 occ/sec or less.

実施例4 セラミックス焼結体としてM g A l 20 sの
配合割合が85%であり厚さ5 ml++の板状体を用
いたこと、活性金属としてこの焼結体表面に蒸着された
ジルコニウム(以下、Zrという)を用いたこと、ロー
材として厚さ0.5比の金37.5%−銅62.5%の
合金を用し)たこと、金属体としてニッケル板状体<1
0XI OX2  (l![す) am) ヲF’A接
合体の強度は3Kgf/me”、接合部の気密性は10
−1c′cc/秒以下であった。
Example 4 As a ceramic sintered body, a plate-like body with a blending ratio of M g A l 20 s of 85% and a thickness of 5 ml++ was used, and as an active metal, zirconium (hereinafter referred to as , Zr) was used, an alloy of 37.5% gold and 62.5% copper with a thickness ratio of 0.5 was used as the brazing material, and a nickel plate <1 was used as the metal body.
0XI OX2 (l! [su) am) The strength of the wo F'A joint is 3Kgf/me", and the airtightness of the joint is 10
-1 c'cc/sec or less.

比較例 活性金属を含まない実施例1で用いた従来のロー材(銀
72%−銅28%)のみを中間層とすること以外は、実
施例1と同様にして接合体を製作した。その結果、ロー
材は後中間材とセラミックス体の界面で蘭単に剥離して
しまった。
Comparative Example A bonded body was manufactured in the same manner as in Example 1, except that the conventional brazing material used in Example 1 (72% silver-28% copper) containing no active metal was used as the intermediate layer. As a result, the brazing material simply peeled off at the interface between the intermediate material and the ceramic body.

実施例の効果 実施例1〜4は、セラミックス体の主要構成成分(Mg
A120<およびアルミナ)と反応してセラミックス体
との接合性を高める活性金属(T1又はZr)を含む中
間層をもつので、比較例と比べ、いずれも強度および気
密性に優れた。特に、金属体としてコバール板を用いた
実施例2では、実施例1の場合よりも接合強度はさらに
優れた。これは熱膨張係数がコバール板の方が小さく、
界面に発生する応力が小さかったためと考えられる。ま
た中間層形成的の活性金属の使用形態は、箔形状(実施
例1.2)、違常のロー材形状(実施例2)又は基着腹
形状(実施例4)のいすもの場合も、良好デー性能を示
した。
Effects of Examples Examples 1 to 4 show that the main constituents (Mg
Since they have an intermediate layer containing an active metal (T1 or Zr) that reacts with A120 (and alumina) to improve the bondability with the ceramic body, they all had excellent strength and airtightness compared to the comparative example. In particular, in Example 2 in which a Kovar plate was used as the metal body, the bonding strength was even better than in Example 1. This is because Kovar plate has a smaller coefficient of thermal expansion.
This is thought to be because the stress generated at the interface was small. In addition, the active metal used to form an intermediate layer may be used in the case of a chair in the form of a foil (Example 1.2), an abnormal brazing material shape (Example 2), or a base-bonded shape (Example 4). It showed good day performance.

またMgAlzC)tの配合割合が多い程、接合強度に
優れると考えられるが、それが70%(実施例3)でも
従来と比べ強度および気密性に優れた。
Further, it is thought that the higher the blending ratio of MgAlzC)t, the better the bonding strength will be, but even when it was 70% (Example 3), the strength and airtightness were superior to the conventional one.

さらに、スピネル化合物は1赦射線性に優れるたt、上
!2実施例1〜4のように、M g A l a○、の
配合割合が70%、85%、90%である場合でもアル
ミナと比べ著しく耐放射線惟に優れることは駄らかであ
る。
Furthermore, spinel compounds have excellent radiation tolerance. Even when the blending ratio of MgAla○ is 70%, 85%, or 90% as in Examples 1 to 2, it is a waste that the radiation resistance is significantly superior to that of alumina.

尚、本発明においては、上記具体的実施例に示すものに
限られず、目的、用途に応じて本発明の範囲内で種々変
更した実施例とすることができる。
It should be noted that the present invention is not limited to what is shown in the above-mentioned specific examples, but can be variously modified within the scope of the present invention depending on the purpose and use.

即ち、スピネル化合物としては、MgをFe(It) 
、Mn (II)等に、A1をFe (II[) 、C
r([l)等に置き換えたものとすることができる。
That is, as a spinel compound, Mg is replaced with Fe(It)
, Mn (II) etc., replacing A1 with Fe (II[), C
It can be replaced with r([l), etc.

他の配合セラミック材料としては、上託アルミナ以外に
マグ不ンア、窒化硼素、窒化珪素、炭化珪素等を用いる
ことができ、更に、これらの種類により種々の焼結助剤
が選択されて用いられる。活性金属としては他にニオブ
(Nb) 、Mn等とすることができる。またその使用
影響は、使用する中間層形成条件により中間層を形成で
きるもので。金属体の材料としては他種のステンレス綱
、チタン、鉄−ニッケル合金等を用し)ることができる
。上記セラミックス体および金属体の形状、大きさ等は
目的、用達により種々選択される。
As other compounded ceramic materials, in addition to superimposed alumina, magnuar, boron nitride, silicon nitride, silicon carbide, etc. can be used, and various sintering aids are selected and used depending on these types. . Other active metals that can be used include niobium (Nb) and Mn. Also, the effect of its use is that the intermediate layer can be formed depending on the intermediate layer forming conditions used. As the material of the metal body, other types of stainless steel, titanium, iron-nickel alloy, etc. can be used. The shapes, sizes, etc. of the ceramic body and metal body are selected depending on the purpose and use.

更に、本発明の接合体は、図に示す電離型中性子検出器
の他に、電離箱を用L’f;U’比例計数管等の他型の
中性子検出器、種々の様式の電離箱を用いた検出器、ま
た原子炉内のみならず原子炉外で用いられる検出器、他
の放射線に晒される環境で使用される種々の部品等に応
用される。
Furthermore, in addition to the ionization type neutron detector shown in the figure, the conjugate of the present invention can be used with other types of neutron detectors such as L'f;U' proportional counter tubes, and various types of ionization chambers. It is also applied to detectors used not only inside nuclear reactors but also outside nuclear reactors, and various parts used in environments exposed to other radiation.

E発明の効果〕 本発明のセラミックス体と金属体との接合体は、上l己
のように、セラミックス体の主要構成成分と反応する活
性金属を含む中間層をもつので、その接合強度および接
合部の気密性に優れる。
[Effects of the Invention] The bonded body of the ceramic body and metal body of the present invention has an intermediate layer containing an active metal that reacts with the main constituent components of the ceramic body, so the bonding strength and bonding are improved. Excellent airtightness.

更に、本発明は、スピネル化合物を含むセラミックス体
を用いるので、耐放射線住に優れ、そのたと中性子等の
放射線に晒される環境で使用されても、損傷が少なく、
使用8品の寿命を向上させることができる。また、同理
由のため、セラミックス体のクラックの発生も防止でき
るので、接合体の強度および接合部の気密性を維持でき
る。
Furthermore, since the present invention uses a ceramic body containing a spinel compound, it has excellent radiation resistance, and even when used in an environment exposed to radiation such as neutrons, there is little damage.
The lifespan of the eight items used can be improved. Furthermore, for the same reason, the occurrence of cracks in the ceramic body can be prevented, so that the strength of the joined body and the airtightness of the joint can be maintained.

【図面の簡単な説明】[Brief explanation of the drawing]

図は従来の電離箱型中性子検出器の要部断面図である。 i、を離籍、2;開極、3;支持セラミックス体、4;
陰極(容器)、5;中性子変換物質、6;不活a i 
n カス、10 ; IK内’y−1ル、11;隔壁セ
ラミ ックス体。
The figure is a sectional view of a main part of a conventional ionization chamber type neutron detector. i, separated from the register, 2; electrode opening, 3; supporting ceramic body, 4;
Cathode (container), 5; Neutron conversion substance, 6; Inert a i
n cass, 10; IK'y-1 ru, 11; partition wall ceramic body.

Claims (1)

【特許請求の範囲】[Claims] (1)スピネル化合物を70重量%以上含有、するセラ
ミックス体と、金属体と、該セラミックス体と該金属体
とを接合し少なくとも上記セラミックス体の主要構成成
分と反応する活性金属を含む中間層と、からなることを
特徴とするセラミックス体と金属体との接合体。
(1) A ceramic body containing 70% by weight or more of a spinel compound, a metal body, and an intermediate layer that joins the ceramic body and the metal body and includes an active metal that reacts with at least the main constituent components of the ceramic body. A joined body of a ceramic body and a metal body, characterized by comprising:
JP15167290A 1990-06-12 1990-06-12 Joined body composed of ceramic body and metal body Pending JPH0446068A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15167290A JPH0446068A (en) 1990-06-12 1990-06-12 Joined body composed of ceramic body and metal body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15167290A JPH0446068A (en) 1990-06-12 1990-06-12 Joined body composed of ceramic body and metal body

Publications (1)

Publication Number Publication Date
JPH0446068A true JPH0446068A (en) 1992-02-17

Family

ID=15523721

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15167290A Pending JPH0446068A (en) 1990-06-12 1990-06-12 Joined body composed of ceramic body and metal body

Country Status (1)

Country Link
JP (1) JPH0446068A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8505806B2 (en) * 2005-03-09 2013-08-13 Mersen France Py Sas Zirconium-coated steel plates and chemical device elements produced with such plates
JP2017009337A (en) * 2015-06-18 2017-01-12 株式会社東芝 Neutron detector, and atomic reactor output detecting system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6228067A (en) * 1985-07-30 1987-02-06 Sumitomo Cement Co Ltd Joining method for ceramics

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6228067A (en) * 1985-07-30 1987-02-06 Sumitomo Cement Co Ltd Joining method for ceramics

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8505806B2 (en) * 2005-03-09 2013-08-13 Mersen France Py Sas Zirconium-coated steel plates and chemical device elements produced with such plates
JP2017009337A (en) * 2015-06-18 2017-01-12 株式会社東芝 Neutron detector, and atomic reactor output detecting system

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